Search Documents

Sanes are utilized to make molds for metal castings in the foundry industry. Approximately a half ton of sand is disposed of for each ton of metal cast in this country. The purpose of this investigation was to study and develop a process to separate chromite sand and silica sand from reclaimed sands for a steel foundry. Physical separations were utilized to yield silica and chromite sands with desirable molding properties. Several different separation methods, including electrostatic, magnetic, and various gravitational approaches were examined. Experimental results are presented. A method was developed to separate chromite sand from silica sand after mechanical or thermal reclamation. The reclaimed sands are passed through a rare earth magnetic separator to separate chromite sand and magnetic impurities from non-magnetic silica sand. Chromite sand can be recovered from magnetic silica sand or magnetic impurities very effectively using a wet concentrating table. The applicabilities of the separation methods are discussed.

Jan 1, 1995

By Jiling Wang, Xuefeng Liu, Haojian Duan, Lifeng Zhang, Ying Ren, Wen Yang

"In order to study the influence of MgO-C refractory on steel cleanliness and inclusions during steelmaking process, and to understand the reaction mechanism deeply, laboratory deoxidation and equilibrium experiments were respectively performed in MgO crucibles at 1873K. In the former experiment, after Al addition, steel samples were taken at different holding time. In the latter experiment, different slag components and different contents of carbon and aluminum in steel were considered respectively. The inclusion characteristics of each experiment were analyzed. The results showed that with the increasing of holding time after deoxidation by Al, MgO existed in the small inclusions firstly, and then in the large ones such as the clusters. The MgO content in the inclusions increased with the increasing of holding time, indicating that the MgO in crucible could be individually reduced by the aluminum in the molten steel. The reaction could occur within nine minutes.IntroductionNon-metallic inclusions would have positive or negative effect on steel quality depend on the quantity, size and composition of inclusions. Large inclusions are always detrimental. From the point of view of inclusion property, plastic inclusions are required by steel cord, while hard inclusions are preferred by pipeline steel. One of the most important ways to increase the steel quality is reducing the inclusion size and controlling the inclusion composition in steel. Nowadays, MgO based refractory is used as ladle glaze material with more and more frequency, which results in different inclusion characteristics in molten steel, for example, the inevitable generation of MgO contained inclusions during ladle treatment of steel. In other words, the inclusions in this type ladle will influence on the steel cleanliness and the product property. Thus, keeping an eye on the inclusion formation behavior in the steel with MgO-C ladle glaze is important for the steel industry. There have been a few studies in this regard. Li et al[l] studied the reactions between MgO-C refractory, molten slag and metal using a high temperature X-ray radiographic apparatus. They found that the local corrosion was regarded as due to the cyclic dissolution of MgO and graphite in the refractory into slag and metal phase. The gas bubbles formed according to the reaction of (FeO)+C(s)=Fe(l)+CO(g) greatly influenced the corrosion. On an industrial scale, Du[2] found that ladle glaze is a major source of inclusions in the ladle. An experimental study has been performed by Lehmann in order to estimate the importance of the reaction between a MgO-based tundish refractory and an Al-killed steel[3]."

Jan 1, 2014

By David Cocke

Study of surface and subsurface interfacial chemistry of metallic and similar systems has its enormous technological importance. Copper, for example, is a common component of many alloys and bulk amorphous systems. It is being increasingly studied today because of its use for electronic interconnect systems where processing is done below 200 ºC. Since several types of copper oxides exist, and the degree of their formation is dependent on temperature, perhaps characterization by EDS-SEM depth profiling and EIS might delineate one type of oxide from another. In this paper, we described our work on transformation of copper oxides with temperature ranging from 70 to 350 °C and their characterization by SEM, EDS, and XRD. We also showed the use of the phase angle portion of the impedance as a means to identify the predominant structure and the transition through Cu3O2 between the predominant stable CuO and Cu2O.

Jan 1, 2009

By Michael B. Mooiman, David J. Kinneberg, Philippe Cettou, Leo W. Simpson, Pierre Ramoni

"The demand for high purity precious metals began with certain industrial applications having uncompromising requirements for quality and performance. As industrial uses proliferated and as the jewelry industry became increasingly sophisticated, the demand for high purity gold has reached the point where 99.99% is now the standard in the marketplace. A similar evolution is expected for other precious metals.In this paper, we examine both the production and use of high purity precious metals, specifically gold, silver, platinum and palladium. After defining what is meant by ""high purity"", we discuss the various analytical techniques used for measuring impurity concentrations. Next, we review process strategies employed by extractive metallurgists to produce high purity precious metals. Lastly, we describe some of the principal applications for high purity materials including thick films, thin films, bonding wire, thermocouples and jewelry manufacture.Precious metals have unique physical properties that, despite their expense (and the ever-continuing search for more economical alternatives), make substitution difficult if not impossible. These physical properties are dramatically affected by small concentrations of certain impurities. As long as manufacturers continue to demand quality and performance, there will be a need for high purity precious metals.IntroductionIn the precious metals industry, the qualifier ""high purity"" describes any specification over and above commodity grade. High purity specifications delineate lower limits on overall metal purity or upper limits on individual impurities or both. Sometimes, if these special requirements become commonplace, either because of improved refining technology or because of market pressures, yesterday's ""high purity"" material becomes tomorrow's commodity. This transition is now occurring with gold bullion and probably will soon occur with platinum and palladium as industrial use of these materials grows."

Jan 1, 1998

By Sevket Acar, Tim Acton

"Zarafshan/Newmont is a 50/25/25 joint venture between Newmont Gold and the State Committee for Geology and Mineral Resources, and Navoi Mining and Metallurgical Combinat, two entities of the Republic of Uzbekistan. The Zarafshan/Newmont joint venture consists of a heap leaching operation which will process 220 million metric tonnes of existing low-grade oxide ore stockpiles (averaging 0.036 oz Au/t) from the Muruntau mine. Net recovery over the 17-year life of the project is expected to be 4.8 million ounces of gold.The plant construction started in October 1993 and operations commenced on May 25, 1995. The crushing plant consists of four stages of crushing and screening to produce a 95% passing 3.35 mm product, followed by heap leaching and gold recovery by the Merrill-Crowe process. The dore metal is refined at the Muruntau refinery. All gold produced by the joint venture is sold on the world market. IntroductionThe Muruntau mine and nearby town of Zarafshan are located in the center of the Kyzylkum desert, 250 miles west of Tashkent, capital of Uzbekistan. Following a mining conference in Moscow in 1990, a Newmont geologist was among the first team of westerners to visit the Muruntau Mine, the second largest gold producer in the former Soviet Union. At Muruntau, they found 220 million tonnes of low grade gold ore that had been stockpiled during the previous 25 years. In February, 1992, six months after Uzbekistan's independence, Newmont signed a 50/50 joint venture agreement with the Uzbek government to use heap leach technology to process the ore. The feasibility study was completed in November of 1992. Plant construction started in October, 1993 and operations commenced on May 25, 1995.Newmont Metallurgical Services performed metallurgical studies to obtain heap leach process design criteria parameters. The initial metallurgical study on 20 grab samples is the subject of this paper."

Jan 1, 1997

By Richard A. Leiby

The recycling of lead-acid batteries in the United States has become a challenge as to how to balance ever increasing environmental regulation and cost with efficient operations. East Penn's captive secondary lead smelter has developed into a recycling facility producing lead, polypropylene, sulfuric acid, ammonium bisulfite, and non-hazardous discard slag. The emphasis has been to design a facility to comply with environmental regulations, to eliminate wastes, and to produce products, while at the same time, continuing to supply the company's battery manufacturing raw material needs.

Jan 1, 1993

By Wang Shuchan, Zhang Zimu, Zhang Dianhua, Liu Yan, Zhang Ting-an, Zhao Qiuyue, Lv Chao

Rare earth extraction tank has many adverse effects like big floor space and high production accumulation during industrial production. Current researches usually focus on changing the device structure without making a breakthrough towards gravity clarification. This paper attempts to achieve this goal by using both the action of clarification by gravity and clarification by stirring. Because many physical parameters affect the clarification and separation rates, the density, viscosity and surface tension of the two phases were determined at different temperatures and different concentration of aqueous solution. The innovation of this research involves adopting the Karl-Fischer method to investigate water content in oil phase during the stirred separation process. In this paper, the separation effect of different physical parameters was studied and the dimensional equation between water content and the physical parameters was established by combining with the experimental data.

Jan 1, 2014

By Yuanbo Zhang, Xiaoming Mao, Zhixiong You, Zhenyu Fan, Tao Jiang

"It is generally known that the formation of calcium ferrite is favorable during the iron ore sintering, which dominatingly contributes to the improvement of strength and reducibility of the finished sinters. In this study, effects of roasting temperature and 02 content of inlet gas on the sintering mineralization properties of typical iron ores, including hematite, limonite, specularite and magnetite, were investigated. The results showed the amount of calcium ferrite initially increased then decreased with the increase of the roasting temperature. The temperature of maximum calcium ferrite generation amount for different iron ores was determined as follows: hematite and limonite was 1275 °C, whereas specularite and magnetite was 1250 °C. Increasing 02 content of inlet gas was advantageous to the generation of calcium ferrite during the sintering. The sequence of 02 content affecting the mineralization properties of different iron ores was determined as follows: magnetite > hematite > specularite > limonite.IntroductionThe mineralization property of iron ore plays a significant role in the mineral composition and microstructure of finished sinters, which determine the quality and output of the sinters [1-2]. The mineralization process of sinters is composed of solid-phase reaction, formation of liquid-phase and crystallization. The formation and crystallization of liquid-phase is the foundation to the mineralization as the quality of the sinter is poor when concreted by solid-phase consolidation [3-4]. With respect to the iron ore sintering, liquid-phase regarded as bonding phase is generated between the iron ores and fluxes at high temperature [5]. Calcium ferrite is the most favorable liquid-phase among the bonding phases which dominatingly contributes to the improvement of strength and reducibility of the finished sinters [6-8]. Especially for high iron-low silicon sintering and high basicity sintering, making sure sufficient calcium ferrite quantity and reasonable distribution is crucial to the sinters [9-10]. Therefore, carrying out the researches on the high temperature reaction properties of iron ores is of great significance [11]."

Jan 1, 2013

By D. R. Flynn

The recovery of nickel and cobalt from electromachining sludges in the form of relatively high-purity marketable products has been investigated. The investigation has shown that a series of metallurgical unit operations can be performed to recover nickel and cobalt from electromachining sludges in the form of al kal i nickel ic hydroxide and cobalt sulfate/cobal t metal, respectively. The recovery unit operations for nickel include high pH cyanide complexation, followed by oxidation and precipitation of alkali nickel hydroxide. The resultant filtrate can be treated for cobalt recovery by neutralization and acid baking to produce cobalt sulfate. The cobalt sulfate can then be treated for cobalt recovery by electrowinning. Results from laboratory bench scale test work are discussed in terms of appropriate operating conditions.

Jan 1, 1991

By G. B. Harris

Jaguar Nickel Inc. is developing the Sechol Nickel-Cobalt Laterite Project in Guatemala, Central America. Recognizing the potential advantages offered by chloride brine chemistry, Jaguar, at the facilities of Process Research ORTECH Inc, Mississauga, has developed an Atmospheric Chloride Leaching Process using a mixed chloride lixiviant to recover the nickel and cobalt, whilst leaving the majority of the iron and magnesium in the leach residue. Subsequent solution purification and mixed nickel/cobalt hydroxide product recovery is by standard precipitation methods, using recycled caustic magnesia, with a final stage of pyrohydrolysis of a portion of the concentrated magnesium chloride brine for recycling both the caustic magnesia and chloride lixiviant. The flowsheet that has been developed also offers opportunities for by-product recovery and efficient, environmentally clean process effluent management. The paper discusses some of the early leaching results in the context of strong chloride brine chemistry, with emphasis on how the controlling of water activity, hydrogen ion activity and chloride concentration permits the selective leaching of nickel and cobalt from an iron-magnesium matrix. Keywords: nickel, cobalt, iron, magnesium, Sechol, Guatemala, chloride, pyrohydrolysis

Jan 1, 2004

By Jingwei Lou, Bing Li, Suzhen Li, Miao Shen, Jianguo Yu

"As a main impurity in primary lithium metal, magnesium is difficult to remove because of the very close relative volatility of the two metals. Electrochemical refining provides a possibility to completely remove Mg in the LiCl-KCl melt prior to Li reduction. MgCl2 reduction processes in LiCl-KCl- MgCl2 melt were investigated by cyclic voltammetry (CV), square wave voltammetry (SWV), chronoamperometry and chronopotentiometry. Then potentiostatic electrolysis was carried out and Mg (II) ion was reduced onto a liquid lead cathode from the LiCl-KCl-MgCl2 melt at the Mg deposition potential. The results show that Mg ( II ) is reduced in one step with two-electron transfer. The reduction potential of Mg ( II ) was well defined. The reduction of Mg( II) results in Li ( I ) underpotential deposition at 0.2V more negative potential than that of Mg( II) reduction. Therefore, in order to prevent Li ( I ) from codeposition with Mg, accurately controlling Mg ( II) reduction potential during the potentiostatic electrolysis was necessary. Ninety three to 99 % removal rate of MgCl2 was achieved after 8-12 h electrolysis when liquid lead was used as cathode.IntroductionMetallic Li has been widely used in batteries, light weight alloys and in fusion reactors because of its excellent properties. Currently, the only way in industry to produce metallic Li is by electrowinning from molten LiCl-KCl at about 450 °C [l-5]. LiCl-KCl is the only electrolyte used, because they presents a lower eutectic temperature and KCl shows a slightly higher theoretical decomposition voltage than LiCl, as shown in Table l .The produced metallic Li generally contains 1-2 wt% impurities including Na, K, Al, Ca, Mg, Si, etc. [6l, which are derived from the corresponding metal chloride compounds or metal oxide compounds existing in the LiCl and/or KCl raw materials. These impurities have to be removed by subsequent vacuum distillation at high temperatures to meet the requirements for metal Li purity in the final products. Separation of Mg from Li by vacuum distillation is difficult because their relative volatilities are very close, as shown in Table 2."

Jan 1, 2011

By J. D. Scott

The counter-current jarosite acid wash circuit presently in operation in the zinc plant produces a combined jarosite plus Pb/Ag residue which is discarded. Extensive pilot-scale testwork, and some past in-plant operational experience, has shown that the zinc plant can be easily reconfigured to produce two residues during periods of high silver feeds and/or prices. Plant.optimized circuit configurations are available for silver recovery to a Pb/Ag residue and are in use for the prevention of Pb/Ag-jarosite formation in both the neutral and high-acid leaching circuits. Silver in the zinc plant undergoes several changes in state as it proceeds through these circuits. The roaster calcine is ~3:1 silver sulfate: silver metal, with metallic silver mainly as micro-Inclusions In an aluminosilicate phase. In neutral leach residue, the majority is as silver sulfide or Pb/Ag/Zn-sulfide coatings on unroasted sphalerite grains, with minor Pb/Ag-jarosite and some residual metallic silver in unreacted alumina-silicate grains. In high-acid leach residue, silver occurs as Se-rich silver sulfide particles in sulfur/jarosite ball aggregates, as silver sulfate impregnations in silica-gel masses and in solid solution in Pb/K/Zn~jarosite. Silver concentrations in solution range from 20 to 60 ppb.

Jan 1, 1990

By Marco Olper

The CX-EW technology, developed by B.U.S Engitec, is improved introducing besides the battery paste electrowinning, the direct electrorefining of metallic lead (grids and poles) obtained from CX breakers. This new concept of electrorefming the antimonial lead scrap is aimed to the production of 99.99 lead and of slimes with high antimony content, avoiding gaseous emissions in melting lead scrap, and expensive and pollutant thermic refining operations. In this way, practically all lead content in the battery is available as 99.99 lead, hence with a wider market for the lead recyclers. This paper will describe the tests performed on a pilot plant scale with special reference to the relatively low energy consumption of the process.

Jan 1, 1993

By A. H. Castillejos E., F. A. Acosta G.

Filtration is widely used as a terminal refining step for metals, particularly for the casting of aluminum alloys, but still more knowledge is required to understand how several factors affect the efficiency of removal of inclusions. In this study, both, initial and long term filtration efficiencies of a ceramic foam filter have been obtained from the computed trajectories of solid particles suspended in molten aluminum. The complex structure of the foam filters is represented by a unit cell which is formed by a pair of pores with average dimensions. The fluid flow field was determined from the numerical solution of the Navier-Stokes equation, and periodic fully developed flow was assumed at the inlet of the calculation domain, as a boundary condition. This flow field corresponds to laminar flow as that found in ceramic filters operating under normal conditions. Computed initial filtration efficiencies showed that filtration efficiency decreases sharply with fluid velocity for particles larger than 30 µm, but smaller particles are better trapped at higher fluid velocities. Finally, it was found that long term filtration efficiency for particles of 8 µm decreased with time, in spite that perfect particle-wall attachment was assumed. Filter aging was considered in this study, and it was found that the distorted flow field, around the already trapped small inclusions prevented further collection.

Jan 1, 1999

By F. H. (Sam) Froes, C. Suryanarayana, K. C. Russell, C. M. Ward-Close

"Far from equilibrium synthesis allows development of novel crystal structures and microstructures, leading to achievement of enhanced physical and mechanical properties. A number of ""far from equilibrium"" techniques are reviewed with emphasis on the amount of departure from equilibrium. The ability of two such techniques, mechanical alloying (MAl, and physical vapor deposition (PVD) to develop novel structures are discussed in detail. For the MA process emphasis is placed on intermetallic compound compositions. Solubility extension, beyond rapid solidification (RS) levels, is found in terminal compositions but not for the intermetallics. Nanostructure-sized grains (< 100nm) form which can be retained after ""low temperature"" compaction. On continued milling in many cases the nanometer-sized grains transform to an amorphous structure. Ordering is destroyed by MA, except in those intermetallics with large negative enthalpies of formation. For the PVD process, a review of application to terminal light alloy compositions is presented. This includes a new high-temperature aluminum alloy, layered materials with nanometer spacing, corrosion-resistant magnesium alloys and low-density titanium compositions. IntroductionTo enhance the mechanical property combinations of advanced structural materials innovations in process/synthesis are required [1-6]. In this paper the capability of various ""far from equilibrium"" synthesis techniques [7,8] to produce novel constitutional and microstructural effects, and hence potentially enhanced physical and mechanical properties, in advanced materials is presented. The application of two such methods, mechanical alloying (MA) and physical vapor deposition (PVD) is discussed in detail. For the MA process emphasis is on intermetallic compositions with consideration given to solid solubility extension, microstructural refinement, amorphization, and formation of intermetallic compounds. For the PVD process application to terminal light alloy compositions is discussed."

Jan 1, 1994

By L. A. Mills

After three years of experience in operating the pilot plant for the Noranda Continuous Smelting Process, the decision was made, in March 1971, to build an 800 ton per day commercial plant at Noranda, Quebec. The de- sign and layout of the plant is discussed and the installed equipment described. Experience previously gained in the pilot plant is mentioned when it has been used in the choice of equipment or plant layout. The full- scale reactor was started up in March 1973 and the operational datacollected and the experience acquired during the first 30 months of operation are described. This includes operation to produce both high grade matte and copper. Areas discussed include refractory wear, fuel consumption and throughput of copper concentrates. Changes made to original equipment and methods of operation are discussed, together with the reasons. The ad- vantages of using solid fuels to handle inert materials and to maximize converting air flowrates and concentrate throughputs are described. Relative efficiencies of oil and natural gas are compared. The addition of oxygen from a 94 ton per day oxygen plant to the reactor converting air was started in August 1975 and the initial operating results are included.

Jan 1, 1976

By Yuanbo Zhang, Yingming Chen, Zijian Su, Bingbing Liu, Jun Chen

Iron, tin-bearing tailings is a kind of hazardous solid waste generated from cassiterite dressing operation. It is difficult to utilize the tailings by present mineral processing methods due to the complex dissemination characteristics. In this study, a process of gas-based magnetizing roasting followed by magnetic separation was studied for separating and recovering iron from the tailings. The effects of roasting and magnetic separation parameters on the recovery of iron were systematically investigated. The optimum parameters were proposed as follows: CO/(CO+CO2) content of 5%, roasting temperature of 850 C, roasting time of 60 min, grinding particle size of 90% less than 45 μm and magnetic field intensity of 800 Gs. Under these conditions, the magnetic concentrate containing 68.5% Fe and 0.06% Sn was achieved, which can be used as high-quality raw materials for direct reduction iron production.

Jan 1, 2016

By Chang Wei, Zhigan Deng, Minting Li, Cunxiong Li, Xingbin Li

A direct hydrometallurgical process of extraction molybdenum and nickel from molybdenum-nickel ore by pressure water leaching without reagent was studied. The extraction of Mo and Ni from molybdenum-nickel ore by oxygen pressure leaching, which exploit the characteristic of molybdenum-nickel minerals contain high concentration amorphous sulfide which has highly active, and make the most of easily oxide to sulfuric acid and sulfate at low temperature and excess oxygen presence of the amorphous sulfide. Under oxygen pressure conditions, considerable molybdenum and almost all the nickel were extracted into solution in the leaching process. The results show that with the leaching time for 3~4h, temperature at 150o C, liquid-to-solid ratio of 2mL/g, mineral granularity of 0.074mm, oxygen partial pressure of 0.4~0.5MPa without other reagent, molybdenum leaching percentage can be over 80% and nickel leaching percentage can be more than 97%. Furthermore, about 80% sulfur in the Mo-Ni ore has been transformed into sulfuric acid.

Jan 1, 2014

By Bowen Li, Matthew D. Andriese, Jiann-Yang Hwang, Zhiwei Peng

"Magnetic iron sulfide ore particles heat rapidly by microwave (MW) irradiation generating plasma during oxidation of surfaces. The high temperatures produced by the exothermic event decompose local portions of samples forming a differentiated flux of partially melted silicate (si-mt) with entrained metal-sulfide (sul-mt) droplets. The si-mt forms crystals of olivine (01) in Ca-rich pyroxene (Cpx) melt that resorbs a portion of iron sulfide (Po). The immiscible sul-mt droplets of (Fe,Ni,Cu)1-xS contain magnetic subsolidus Ni-pyrrhotite (Ni-Po) with Cr-bearing ferrospinel (Mag). Sub-micron sized flecks of Au are found on the surface of a sul-mt droplet with scanning electron microscope (SEM).IntroductionSulfide ore deposits supply the world's mineral resource in the production of non-ferrous metals. Particularly, Cu-Ni deposits are chemically enriched in metals from high sulfur saturation during magmatic formation that creates the proper geochemical environment for metals enrichment [1, 2]. The sulfur and oxygen fugacity control redox conditions of a differentiated silicate/sulfur magmatic melt with the concentration of iron playing a dominate role in the chemical partitioning of metals in sulfide liquid [3, 4]. The initial magnetic crystallization of (Fe,Ni)i-xS monosulfide solution (mss) from metal-sulfide liquid has an exclusive effect on the fractionation of mineral assemblages (zoning) [5].Phase equilibria of sulfide melt (sul-mt) components are related by a miscibility gap with mss forming Ni-rich pyrrhotite (Ni-Po) followed by the crystallization of (Fe,Cu)1-xS intermediate sulfide solution (iss) [6]. Precious metals form stable chacogenides and are retained in solution until the final liquid solidifies. The redistribution of metals now occurs by subsolidus cooling of mss and iss that exsolve low-temperature Fe-Cu-Ni bearing mineral assemblages [7]. The proper interpretation of ore genesis increases processing capabilities by isolating chemically enriched zones during extraction and should be used to aid in sustainable mine site development [8-11]."

Jan 1, 2013

By Scott Samson, Weidong Wang, Shekhar Bhansali, Vandana Upadhyay

"We present an improved design for the two-arm polysilicon thermal actuator. The classic thermal actuator design produces a localized hot spot at approximately the center of the thin actuator arm. This phenomenon limits the actuator efficiency, lifetime, and reliability. Since the actuator deflection is based on thermal expansion of the material, advantage may be gained by making the temperature profile more uniform along the hot-arm length. In our design, the geometry of the thin arm is modified by forming a nonlinear structure near the approximate location of the original hot spot. Electromechanical simulations of this design show an increase in deflection, due to a flattening of the temperature profile along the hot arm. The solid model generation, finite element analysis and simulations are carried out using PEA software. Experimental devices are in the process of being fabricated by using a polysilicon rnicromachining process.1. IntroductionMost active MEMS devices employ some kind of actuating mechanism to increase functionality. Various actuating mechanisms like magnetic, electrostatic, thermal, magnetostatic and piezoelectric have been investigated and incorporated for actuating microstructures. The primary features required from many on-chip actuating mechanisms are large deflection (>10 µm), low actuation voltage, low power.consumption, reliability, fast response, ease of design and fabrication, and small size. Thermal actuation is an attractive mechanism for rnicromechanical devices requiring high actuation forces, large deflections, good linearity and low actuation voltage. Thermal actuators, also known as ""electrothermal actuators"", ""heatuators"" or ""U-shaped thermal actuators"", have been largely used in MEMS based devices to provide both in-plane and out-of-plane actuation [l] .Thermal actuators are also easily compatible with standard CMOS circuitry due to their low driving voltage. However, high power consumption remains a major drawback of the thermal actuation mechanism."

Jan 1, 2004