Search Documents

By Robert E. Green, Wolfgang Sachse

Simullaneous ultrasonic attenuation measurements of both quasishear waves propagating in single cryslals of aluminum indicate that, in the undeformed annealed state, the dislocation density is generally not uniform on all slip systems. Change oof attenuation measurements made during plastic defortnation of crystals , which possessed specific orientations ideal for studying the orientation dependence of dislocation damping, indicate that, for low strain levels, dislocation motion occurs on additional slip systems besides the primary one, even for crystals oriented for plastic deformation by single slip. THE sensitivity of internal friction measurements permits such measurements to be used successfully in studying the deformation characteristics of metal crystals. On the basis of experimental observations, T. A. Read1 was the first to associate internal friction losses with various dislocation mechanisms. Since that time further work2-' has been performed and a dislocation damping theory has been formulated by Granato and Lucke.6 In the amplitude independent region, this theory predicts the attenuation a to be dependent on an orientation factor O, a dislocation density A, and an average loop length L. if is a constant, independent of crystallographic orientation. For a given crystallographic orientation, changes in dislocation density and loop length give rise to the observed attenuation changes accompanying plastic deformation. The Granato-Liicke theory suggests the investigation of the orientation dependence of attenuation measurements in hopes of obtaining information to separate dislocation motion losses from other losses.7 An experimental study of the orientation dependence of attenuation in undeformed annealed single crystals should yield an insight into the uniformity of dislocation distribution throughout the entire specimen. A similar study on crystals plastically deformed in a prescribed fashion should give information about the alterations in the dislocation distribution on the slip systems activated during plastic deformation. The possible modes of elastic waves which can be propagated in aluminum,8 copper,9 zinc,10 and other hexagonal metals" have been calculated. Associated with each mode of wave propagation are dislocation damping orientation factors, which are based on the resolution of the stress field of that particular elastic wave onto the various operative slip systems in the material. These orientation factors have also been calculated as a function of crystallographic orientation in the papers cited above. Einspruch12 obtained agreement between predicted and observed attenuation values of longitudinal and shear waves in (100) and (110) directions of two undeformed aluminum crystal cubes. He ascribed the slight deviations between predicted and observed values to a nonuniform dislocation distribution, or to other loss mechanisms. In shear deformation of zinc crystals, Alers2 found that the attenuation of shear waves having their particle displacements in the slip plane was very sensitive to the deformation, while the longitudinal wave attenuation was affected only when the wave propagation direction was not normal to the slip plane. Using aluminum single crystals oriented for single slip, Hikata3 et al. found that during tensile deformation the change of attenuation of the shear wave (actually quasishear) having particle displacements nearly perpendicular to the primary slip direction exhibited the easy-glide phenomena, while longitudinal waves did not. Similar results were reported by Swanson and Green5 during compressive deformation of aluminum crystals. These results are in qualitative agreement with the calculated orientation factors for specimens of this orientation. In well-annealed, undeformed aluminum crystals, the damping is expected to be due to dislocations vibrating on all twelve slip systems. The orientation factors associated with this initial damping will be designated by O2 and O3, where a, represents the average orientation factor for the slow shear (or quasishear) wave and O3 represents the average orientation factor for the fast shear (or quasishear) wave. The calculation of these values for aluminum crystals by Hinton and Green8 shows that they vary very little as a function of crystallographic orientation—at most, by a factor of 2.47. If the dislocation density and loop length are uniform, then in the initial undeformed state, Here the subscript zero refers to the initial value of the attenuation. Also for aluminum, the calculations8 show that the orientation factors for primary slip only, associated with each shear wave, exhibit a sharp minimum for particular crystallographic orientations. A composite plot of the two shear wave orientation factors for primary slip only is shown in Fig. 1. Since these orientation factors are associated with dislocation motion occurring on the primary slip system only, the proper condition to check these factors might be attained by slightly deforming a single crystal oriented for primary slip. For dislocation motion on the primary slip system only,

Jan 1, 1969

By H. W. Norman

DURING the first few years of the new atomic age the Colorado Plateau was the focal point of uranium exploration. There was little incentive to expend time and effort in an area so far removed from the known deposits as the Pacific Northwest, and there were too few local prospectors to cover the vast territory involved. In 1949 the AEC established an exploration office in Spokane to evaluate the uranium potential of the northwestern states. Interesting occurrences were found in the Coeur d'Alene district in Idaho and in the Boulder Batholith of central Montana, but the AEC discontinued the Spokane office in 1952, and for the next two years prospecting in the area was negligible. In April 1954 John and James LeBret, prospecting on the Spokane Indian Reservation with an ultra violet lamp, located an occurrence of the fluorescent uranium mineral autunite. This discovery was not announced until the following September, after a lease had been granted by the Spokane tribe. Exploratory drilling carried on by the AEC throughout the winter verified the existence of a commercial orebody. This property, the Midnite mine, has since developed the largest known ore reserve in the district.

Jan 6, 1957

By Ernest Kirkendall

THE amount of research done in the last few years on the subject of diffusion in solid metals is significant of the importance of this problem. To review the literature dealing with diffusion is unnecessary here. Desch1 in 1912 reviewed the work that had been done on diffusion in solids and gave a bibliography of the literature published before that time. Mehl's paper in 1936 2 is an excellent review of diffusion in metals and contains a large bibliography. Of importance also for its review and bibliography is an article by A. I. Krynitsky.3 While considerable material has appeared in the literature on diffusion in brass, the amount of information is not great compared to that pertain-ing to some of the other alloys. Most of the information published is of a qualitative nature; that which is quantitative varies considerably. Thus the quantitative determination of the rates of diffusion of copper and zinc in alpha brass by a new method appeared worth while. In the present investigation the rate of diffusion of zinc in approxi-mately the same composition alpha brass has been determined at three temperatures.

Jan 1, 1938

By L. W. Pommier, F. B. Brien

In order to determine the ability of cyclones with heavy liquids to preconcentrate ores, a study of the variables which govern the behavior of the solids in the apparatus has been made. To assess the test results, the cyclone products have been examined by sink and float analysis at various specific gravities and the results examined by the Tromp type curves. This analysis has allowed the development of the SG50 unit — specific gravity of the particles, 50% of which goes to overflow and 50% to underflow — rather than the d50 (size) unit used in classification. The results of tests using the closed circuit laboratory cyclone assembly with dry feed samples show the validity of the equation: Results indicate that 83% of the feed may be rejected containing 0.1% Sn. Recoveries in excess of 80% are obtained at a grade of 1.7% Sn from feed samples assaying 0.4% Sn. As water-wetted particles may comprise the plant feed, separate tests were performed to examine the effect of water in the feed material. Results indicate that the entrained water divides into two fractions, one of which is defined as free water and is rejected to the cyclone overflow, the other fraction forms an adhering envelope of water on the ore particles, altering their effective size and density. The presence of the envelope of water on the particles increases the ease with which the heavy liquid can be recovered but decreases the concentration efficiency. It is proposed that the detrimental effect of water in the cyclone may be minimized by using a higher feed pressure cx by the use of surfactants. A higher feed pressure, by increasing shearing forces, would reduce the thickness of the water envelope on the particles. The surfactants, by adsorbing on the particles and producing hydrophobic surfaces, would displace the water envelope and allow the heavy liquids to wet the modified surfaces. In both cases a larger proportion of the entrained water would report to the cyclone overflow as free water, thus minimizing the detrimental effect of water on the concentration efficiency. Additional testing is required on the behavior of water in the system; to determine the optimum particle size for the preconcentration step; to determine final particle size for optimum liberation and subsequent treatment of the products in present plants and to determine the efficiency with which the heavy liquids may be recovered from the products. For many years tin mining in Bolivia has been very important to the economy of the country. In recent years the tin content of the ore reserves has been steadily declining. An improvement in concentration efficiency is highly desirable in order to increase productivity from the present low-grade mine ores and to allow retreatment of the many millions of tons of tailings from past operations, some of which equal the present ores in tin content. A number of investigators have been or at present are working on various phases or approaches to the problem. Gravity concentration is used in Boliva today as it has been in the past to recover tin minerals from the mine ores. An objective of the work reported in this paper was to examine the possibility of treating present low-grade ores and sink-float tailings products, at a relatively coarse grind, in order to produce a higher grade feed material to the present gravity concentration plants. The possibility of using heavy liquids in cyclones to treat large tonnages with a minimum of outlay presented itself and is of particular interest since heavy liquids are now available with physical properties which lend themselves to simple recovery methods. Tests were carried out using a closed circuit laboratory cyclone assembly. It was desirable to determine the value of using the SG50 concept and Tromp curves for analyzing the cyclone concentration test results. The effects of entrained water on the behavior of ore particles in the cyclone were examined. THEORY AND TECHNICAL CONSIDERATIONS Three types of heavy liquids are available: aqueous solutions of very soluble salts, salts or mixtures of

Jan 1, 1964

By C. A. Heiland

Geophysical methods are playing an ever increasing part in various engineering fields. About ten years ago, geophysical exploration was first applied in civil engineering to the study of foundations and the location of construction materials and water. Its usefulness is now being extended into the field of structural engineering. Almost every structure has to be so designed that it will withstand any force to which it may be subjected. Such forces may result from its own weight, applied loads, pressures of various kinds, including those due to wind and water, ground subsidence and vibrations. The last two, problems involving the nature and dynamic behavior of surface and subsurface formations, are within the scope of geophysical investigations. In the design of any structure, the disposition and dimensions of its members as well as their materials must be so selected that they will withstand any or all of the forces enumerated above. In other words, its "resistance" to such forces must be sufficient, allowing for a definite margin of safety. Often a static treatment of the problem leads to satisfactory results, but the static method entails serious errors when vibrations are involved, as in resonance with an impressed vibration the displacements of a structure or parts thereof may dangerously exceed the allowable values. The principle of "dynamic design"† is, therefore, avoiding or reducing resonance by suitable selection of the natural frequency of a structure, or by the provision of damping. Methods of Investigation Dynamic design of structures is required where ground vibrations occur naturally or are produced artificially. Earthquake regions fall in the first group; areas of industrial activity where vibrations are produced by machinery, blasting, etc., fall in the second. In either case, dynamic

Jan 1, 1940

By C. A. Heiland

Geophysical methods are playing an ever increasing part in various engineering fields. About ten years ago, geophysical exploration was first applied in civil engineering to the study of foundations and the location of construction materials and water. Its usefulness is now being extended into the field of structural engineering. Almost every structure has to be so designed that it will withstand any force to which it may be subjected. Such forces may result from its own weight, applied loads, pressures of various kinds, including those due to wind and water, ground subsidence and vibrations. The last two, problems involving the nature and dynamic behavior of surface and subsurface formations, are within the scope of geophysical investigations. In the design of any structure, the disposition and dimensions of its members as well as their materials must be so selected that they will withstand any or all of the forces enumerated above. In other words, its "resistance" to such forces must be sufficient, allowing for a definite margin of safety. Often a static treatment of the problem leads to satisfactory results, but the static method entails serious errors when vibrations are involved, as in resonance with an impressed vibration the displacements of a structure or parts thereof may dangerously exceed the allowable values. The principle of "dynamic design"† is, therefore, avoiding or reducing resonance by suitable selection of the natural frequency of a structure, or by the provision of damping. Methods of Investigation Dynamic design of structures is required where ground vibrations occur naturally or are produced artificially. Earthquake regions fall in the first group; areas of industrial activity where vibrations are produced by machinery, blasting, etc., fall in the second. In either case, dynamic

Jan 1, 1940

By Joseph Kelly

DEPLETION of anthracite resources in Lackawanna County, Pennsylvania, has forced the recovery of coal tracts formerly considered unminable. Chief among these are the large areas of outcrop coal lying on a heavy pitch on the mountain sides, abandoned thirty or forty years ago as too costly and too hazardous to mine. The old companies, in many instances, stopped their chambers 80 or 100 ft. hack from the actual outcrop, and then dropped back another 100 ft. before starting to rob the pillars, thus leaving large areas of coal. Recovery of this coal naturally leads to mining hazards not encountered years ago. The first step is to sink a slope from the surface with the pitch of the vein, and then drive counters across the pitch as close to the robbed area as proper protection for the lower side of the -counter will permit. Next, the old chambers are advanced or new ones driven in the solid, as the conditions require. As these chambers approach the outcrop the real safety work begins-that of preventing the miner from being buried or locked in by an avalanche of mud.

Jan 1, 1936

American Bureau of Metal Statistics, 33 Rector St., New York, N Y. It is not the policy of this publication to include reference to works issued by commercial publishers except where it is felt that the publications have a unique value, particularly, works of a statistical nature The American Bureau of Metal Statistics issues a Year Book of this nature, summarizing important statistics of nearly all of the nonferrous metals Published about the end of May each year. Price, $2. Interim Reports, mostly monthly, in mimeographed form, are also available to suscribers on a scale of terms

Jan 1, 1933

By G. L. Gates

The comments by George L. Gates are appropriate to the characteristics that we sought to feature in our study and they are appreciated by the authors. In our laboratory deposition tests the smoothness of the surface seemed to be more important than the type of surface. However, we also noted that even where very smooth glass, plastic or polished metal coupons were used, scale deposition still occurred though the rate varied. Much more information is needed, however, and new work to solve the mineral scale deposition problem by mechanical and chemical means is expected to continue.

By M. E. Prunty

Activity in coal preparation in 1967 was on the up-swing and all indications are that demands will be greater in the future. Feed tonnages to plants are increasing and a significant factor is that the top size being fed to plants is decreasing. This has been brought about by market demands, better cokability in some cases and emphasis on sulfur reduction in others. New plants are being built and some are in operation in the coal fields of southern Illinois. These plants are producing metallurgical coal in circuits that contain heavy medium cyclones and froth flotation on the - ½ mm x 0.

Jan 2, 1968

William Andrews Clark, former United States senator from Montana, died at his home in New York on March 2, at the age of 86, after a brief illness due to pneumonia. He was the last of the three great Montana mining magnates, Clark, Daly and Heinze. He was born in Connellsville, Pa., on Jan. 8, 1839, and in 1863 arrived in Bannock, Ida., with only five dollars, after a journey of 65 days. On reaching Idaho, he became successively a miner, teamster, machinist, railway builder, mine owner, capitalist and, in his more recent years, philanthropist and art collector.

Jan 1, 1925

By J. C. Wynn

This paper outlines research conducted by the US Geological Survey on the geophysical signatures of chromite. Results of the chromite study highlight the importance of a laboratory research Phase (petrophysical and petrographic studies) at the beginning of work on a new commodity; a realistic ore deposition model to serve as a conceptual framework, and the necessity to continually test, refine, and modify it during the study; and indirect geologic/geochemical indicators, secondary associations, and the use of multiple physical properties. The keystone to the success of the study is frequent and substantive dialogue among geologists, geophysicists, and geochemists.

Jan 1, 1984

William Kent, New York City: I regard the paper of Professors Lord and Haas as the most important and valuable that has yet appeared on the subject of the calorific value of American coals. The close correspondence of the results they have obtained by the use of the bomb calorimeter with those calculated by the Dulong formula from the ultimate analyses, confirming the work done by Mahler in France some years before, is evidence of the extreme accuracy of their work, and gives us renewed confidence in Mahler's modification of the Berthelot calorimeter, and in Dulong's formula, which latter, until

Jan 1, 1898

By R. C. Mahon

Operators concerned with the destruction of their piping by acid mine waters will be interested in the method by which this problem was solved at the Cardiff mine of the Homer group. Rubber lined, or acid resisting metal pipes were found too expensive. Casting concrete lining in pipe would have required a minimum thickness of one inch, thus excessively reducing the pipe's diameter, as well as taking twenty four hours per length of pipe. The Naylor Pipe Co. of Chicago, having experimented with centrifugal lining of pipe with concrete, provided information which eventually solved the problem. An experimental plant was constructed as shown, and the following procedure developed : (1) Kerosene is used to remove the interior oil coating of new pipe. Closed with blank flanges, the pipe is revolved for eight minutes at varying speeds. Stopping and starting the motor achieves a good washing action. The kerosene is then drained off, and similar washing action with caustic soda removes any excess. Swabbing in done with burlap fastened to a 1/2-in. pipe. (2) The aggregate, made of one. part quick-setting cement and two

Jan 1, 1949

By Fred C. Bond

There is acute need for a method that will measure the size distribution of finely divided materials, particularly when the particle sizes are smaller than the openings of the finest screen cloth regularly available for testing. Several methods and types of apparatus are in common use, but none are entirely satisfactory for all purposes. The commonest methods are microscopic grain counts, elutriation by liquids or air, and sedimentation. Valuable results have been secured by air elutriating devices, typified by the Haultain Infra-Sizer and the Pearson Air Analyzer. These are especially useful in obtaining sized fractions that can be examined and analyzed separately. They are particularly advantageous because the sizes of the samples produced are adequate for a considerable amount of subsequent manipulation and testing. The sedimentation methods, such as the Wagner and Klein turbidimeters, and the sedimentation balance, do not deliver sized fractions, but they do provide a means for reasonably rapid comparative determina-tions of fineness and surface area, which are important in many industries. The sedimentation balance consists essentially of a balance pan suspended in a liquid that contains falling particles. These are weighed as they settle onto the pan, and the time rate of settling is determined. The size distribution is computed from the settling rate. The balance appears to be inherently more accurate than any of the other methods, and it has served a useful purpose in the study of numerous problems, but there have been limitations which have restricted its scope of application. Because of the essential simplicity of the method, it was felt that intensive investigation might lead to modifications that would make it a valuable tool [or the operators in industries that require precise information regarding the results secured from grinding equipment. A large number of size-distribution determinations below 200 mesh were required in connection with a particular research problem in fine grinding. The sedimentation balance was used in this investigation, and a technique was gradually developed that ultimately gave good results. A serious difficulty appeared early in the work. It was discovered that less material always settled on the sedimentation pan and more on the bottom of the containing jar than could be accounted for by calculation, and also that the material that settled to the bottom of the jar outside the edges of the pan was considerably finer than that on the pan. This segregation was so great that the distribution obtained for the finer sizes was obviously very much in error; material ground to about the degree of comminution of cement might have only 60 per cent of the calculated weight actually settling on the pan, and the error increased with the fine-

Jan 1, 1943

By Fred C. Bond

There is acute need for a method that will measure the size distribution of finely divided materials, particularly when the particle sizes are smaller than the openings of the finest screen cloth regularly available for testing. Several methods and types of apparatus are in common use, but none are entirely satisfactory for all purposes. The commonest methods are microscopic grain counts, elutriation by liquids or air, and sedimentation. Valuable results have been secured by air elutriating devices, typified by the Haultain Infra-Sizer and the Pearson Air Analyzer. These are especially useful in obtaining sized fractions that can be examined and analyzed separately. They are particularly advantageous because the sizes of the samples produced are adequate for a considerable amount of subsequent manipulation and testing. The sedimentation methods, such as the Wagner and Klein turbidimeters, and the sedimentation balance, do not deliver sized fractions, but they do provide a means for reasonably rapid comparative determina-tions of fineness and surface area, which are important in many industries. The sedimentation balance consists essentially of a balance pan suspended in a liquid that contains falling particles. These are weighed as they settle onto the pan, and the time rate of settling is determined. The size distribution is computed from the settling rate. The balance appears to be inherently more accurate than any of the other methods, and it has served a useful purpose in the study of numerous problems, but there have been limitations which have restricted its scope of application. Because of the essential simplicity of the method, it was felt that intensive investigation might lead to modifications that would make it a valuable tool [or the operators in industries that require precise information regarding the results secured from grinding equipment. A large number of size-distribution determinations below 200 mesh were required in connection with a particular research problem in fine grinding. The sedimentation balance was used in this investigation, and a technique was gradually developed that ultimately gave good results. A serious difficulty appeared early in the work. It was discovered that less material always settled on the sedimentation pan and more on the bottom of the containing jar than could be accounted for by calculation, and also that the material that settled to the bottom of the jar outside the edges of the pan was considerably finer than that on the pan. This segregation was so great that the distribution obtained for the finer sizes was obviously very much in error; material ground to about the degree of comminution of cement might have only 60 per cent of the calculated weight actually settling on the pan, and the error increased with the fine-

Jan 1, 1943

By L. W. Holm

This study shows that in the presence of foam, gas and liquid flow separately through porous media representative of reservoir rock. These results were obtained by using tracer techniques to measure the flow of the gas and liquid comprising the foam. Foam does not flow through the porous medium as a body even when the liquid and gas are combined outside the system and injected as foam. Instead, the liquid and gas forming the foam separate as the foam films break and then re-form in the porous system. Liquid moves through the porous medium via the film network of the bubbles and gas moves progressively through the system by breaking and re-forming bubbles throughout the length of the flow path. The flow rates of the gas and liquid are a function of the number and strength of the films in the porous medium. There is no free flow of gas; i.e., no continuous gas phase. On the basis of these results, foam can be expected to improve a water flood or gas drive by decreasing the permeability of the reseruoir rock to a displacing liquid or gas. This improves the mobility ratio and thus the conformance of the flood. INTRODUCTION Foam is formed when gas and a solution of a surface active agent are injected into a porous medium either simultaneously or intermittently. During the past few years, several papers have been published on the subject of foam flow in Dorous media. Foam has been used successfully in the removal of capillary water blocks from producing formations.''2 The use of foam in gas storage reservoirs to reduce gas leaks and to increase storage capacity has been considered in recent years. Foam has also been investigated as an oil displacing agent,3-5 and as an agent to improve the mobility ratio in a waterflood.6-10 However, the mechanism by which the gas and liquid phases comprising the foam flow through a porous medium has nor been described adequately. Normally, when two immiscible phases (gas and liquid) flow concurrently through a porous medium, each phase follows separate paths or channels. At given saturations of the two phases, a certain number of channels are available to each phase, and as saturations change, the number and configuration of the channels available for each phase also change. The effective permeability of each phase is a function of the saturation of that phase only, and the flow of each phase can be described by Darcy's law. When foam is present, the effective permeability of the porous medium to each phase is greatly reduced compaced with permeabilities measured in the absence of foam.6,11-13 Based upon the observed flow of surfactant solutions and gas in capillaries, it has been concluded that the gas and liquid may flow separately or they may flow combined as foam. At least four mechanisms have been postulated to explain how fluids flow with foam present: 1. A large portion of the gas is trapped in the porous medium and a small fraction flows as free gas, following Darcy's law.9 2. The foam structure moves as a body; the rate of gas flow is the same as the rate of liquid flow. 6,13 3. Gas flows as a discontinuous phase by breaking and re-forming films. Liquid flows as a free phase.12 4. A portion of the liquid and gas move as a foam body while excess surfactant solution moves as a free phase.14 It also has been suggested that different flow mechanisms exist for high quality (dry) foams made from dilute surfactant solutions and for foams made from more concentrated solutions. Studies conducted on the flow of foam through capillaries have shown that a plug-type flow occurs and that foam flows as a body.6,15 Fried also has described the flow of foam through porous media as

Jan 1, 1969

By E. D. Gardner

The tide of increasing demand for metals turned during early 1949, with resultant lower prices. The production of the principal metals was less than in 1948. The problem of high unit costs, however, was held over from 1948. With the lower prices for metals, greater efforts are being made to reduce operating costs. The labor supply was adequate during the latter half of the year in most districts. The force has been reduced at most mines; some mines were idle during part of the year because of strikes, and others ceased operations on their own account. In the main, labor efficiency increased during the year in underground metal mines. Efforts are being made generally to improve labor relations. Green men hired in the time of the scarcity of skilled miners are becoming better trained. The supervisory personnel of most mines is cost conscious, and the planning of operations has been improved. Overhead costs are being scrutinized. The trend toward mechanization underground continued strong. Mining technology rapidly is becoming a problem of handling materials. Surface miners, underground miners and miners of metals, nonmetallics, and coal can learn much Gardner from each other. A mine, however, may become overmechanized. The capital charges against new equipment may exceed the saving in labor costs where sufficient daily tonnage is not handled.

Jan 1, 1950

Application of Kutter's Formula to Gases Discussion of paper by F.-ERNEST BRACKETT, presented at the Pittsburgh Meeting and issued, as Pamphlet No. 1578-A-F, with MINING AND METALLURGY, June. 1926. C. S. WITHERELL, New York, N. Y..(written discussion).-There is no reason to doubt that the relationship between the rate of, flow and. the impelling force of all fluids can be expressed by a general typical equation that takes cognizance of all relevant factors such as density, viscosity (or its reciprocal, mobility) and nature of channel-walls. Most fluids that are commonly conveyed by flow in confined channels are so highly mobile that they may be considered non-viscous, hence for these fluids the factor of viscosity does not need to appear in the equation. Water is the outstanding example of this class of fluids and its dynamic behavior has been so thoroughly investigated that proven formulas pertaining thereto, be they rational or empirical, would naturally serve as prototypes for the other non-viscous fluids. As non-viscous fluids can be classed all gases and vapors, most unsaturated aqueous solutions, gasoline, alcohol, etc. Viscous fluids comprise those that have a sluggish flow such as most oils, tar, molasses, etc., the' high viscosity of which is due to shearing resistance between molecules, a force that must betaken into account in figuring the flow of fluids of this class.

Jan 10, 1926

By G. Krauss, J. M. Thompson, H. Y. Kumagai

Boron-doped p-type and arsenic-doped n-type source materials were used to deposit thin silicon films on amorphous fused quartz substrates by cathodic sputtering in argon atmospheres. All as-sputtered films were found to have high electrical resistivities of about 104 ohm-cm, despite controlled variation of the substrate temperature from 50O to 400°C. The high resistivity of the n-type films persisted even after postdeposition heat treatments as high as 1000°C, while p-type films showed a sharp decrease in re-sistivity to values on the order of 1 ohm-cm or lower after heat treatments above 650°C. X-ray and electron diffraction, together with transmission electron microscopy of the p-type films, revealed that the improved electrical properties resulted from two distinct processes. A primary crystallization or recovery within the pains, which were approximately 200Å diam in the as-sputtered films, accompanied the initial sharp drop in resistivity at 650°C. Following this process, a secondary recrystallization or discontinuous grain growth was nucleated in films heated at 1000°C. The resulting significantly increased size of certain grains and the corresponding decrease in grain boundary area accompanied an additional decrease in resistivity after heat treatment at 1000°C. The properties of thin silicon films are of interest because of their possible application in device technology. Although evaporated silicon films on amorphous substrates1-3 and both sputtered and evaporated germanium films4-' have been studied in some detail, sputtered silicon films have not been widely investigated. It has been observed that evaporated silicon films deposited at substrate temperatures below approximately 600°C are amorphous.1,3,9,10 At substrate temperatures higher than this, the films are polycrys-talline, sometimes exhibiting a fiber texture with the fiber axis normal to the substrate surface.' Similar results have been obtained with germanium films, although in this case the substrate temperature for the amorphous to crystalline transformation is reported to be as low as 150OC.5 The mechanism of film deposition by cathodic sputtering differs markedly from that of thermal evaporation. It might be expected, therefore, that the properties of sputtered and evaporated silicon films would also differ. The purpose of our study was to determine the effects of deposition conditions and heat treatments on the electrical resistivity, structure, and composition of thin silicon films sputtered on fused quartz substrates. EXPERIMENTAL DETAILS Apparatus. A schematic diagram of the sputtering apparatus is shown in Fig. 1. The vacuum chamber was enclosed by an 18-in.-diam by 12-in.-high Pyrex bell jar mounted on a stainless-steel base plate. Access holes in the base plate were used to supply argon gas to the chamber, to allow for various electrical feedthroughs, and to provide mechanical motion to the shutter between the source material and substrate. The chamber was evacuated by a pumping system consisting of a 720 liter per sec oil diffusion pump backed by a 13 cu ft per min mechanical pump. Ultimate pressures of less than 1 x 10-6 torr could be achieved. The substrates were securely mounted on the stainless-steel substrate holder by quartz tabs held in place by stainless-steel screws. Temperatures of the substrate holder were measured by a thermocouple inserted within the holder. A quartz lamp was used to heat the holder and temperatures as high as 420°C could be maintained. Deposition Conditions and Procedure. The substrates used were polished fused quartz slides 116 by 1-12 by 3 in. and were outgassed at 200°C for 1 hr at a pressure less than 1 x 10-5 torr before film deposition. This was followed by a presputtering period of 2 hr during which the movable stainless-steel shutter was so positioned that deposition on the substrate was prevented. At a sputtering voltage of 5000 v dc and an argon pressure of 0.03 torr, the cathode cur-

Jan 1, 1967