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By Hongli Wen, Guangkun Shen, Qiong Deng, Shoujian Huang, Min Gan, Xiaohui Fan

"Due to the low iron grade and high sulfur content, pyrite cinder is difficult to be directly used for iron-making. In this paper, technology of magnetic roasting -grinding and magnetic separation -acid leaching was put forward for reclamation of pyrite cinder. For pyrite cinder of TFe53.51%, S2.20 %, studies showed that good magnetic effect can be achieved at roasting temperature 650~7000, reducing atmosphere CO/(CO + C02) 10~20% and roasting time 10~30 minutes. In separation conditions of grinding size -0.045mm accounting for 96.09% and magnetic field intensity of 1240 GS, iron concentrate of TFe64.81 %, S0.18% and iron recovery rate 91.44% was achieved. Acid leaching was studied to strengthen desulfurization. Results showed that high-quality iron ore concentrate of TFe66.3 l %, S0.10% was obtained under the conditions of hydrochloric acid mass fraction of 5%, pulp density of30%, leaching temperature of70? and leaching time of2 hours.IntroductionPyrite cinder is produced as a by-product of sulfuric acid industry [1] Domestic production is more than 12 million tons every year and occupied area is over 10 million square meters [2,3]. The pyrite cinder outdoor not only pollutes air but also damages surrounding surface [4] It after treatment used for iron-making is an ideal reclamation approach for its rich iron which is commonly 40-60% [5]. But pyrite cinder gets low utilization for its low iron grade and high sulfur content in China [6]. Therefore, comprehensive utilization of pyrite cinder has profound significance to environmental protection and the development of domestic iron and steel industry."

Jan 1, 2013

By Dolf Gielen

This paper discusses the results of a Western European energy and materials systems engineering study that analyses the impact of greenhouse gas (GHG) emission reduction on the future of the steel and aluminum industry. he technology selection will be significantly affected by future CO2 policies. The avail- ability of C02 removal and storage technology and the social acceptance of this strategy for GHG emission reduction is of key importance for the strategy selection. The use of coal based smelting reduction technologies is optimal in case of weak C02 policies or in case of strong C02 policies and low CO2 removal and storage costs. The selection of CCF or Corex technology depends on the penalty regime. However, if C02 removal proves to be problematic, CCF development fails and strong C02 policies are introduced, the gas based DRI production processes will become more attractive. In both cases, the energy efficiency of the iron and steel industry will further increase in the next decades. The impact of GHG emission reduction on aluminum prices and aluminum use can be significant. However contrary to common notions the aluminum production will be positively affected by GHG emission reduction, notwithstanding the currently high emissions in aluminum production. A combination of emission mitigation in production and significant GHG emission reduction effects further down the product chain cause this effect. A significant potential exists for improved materials efficiency. This potential is generally neglected in energy efficiency and CO2 reduction studies. However improved steel qualities are of similar importance for C02 emission reduction as increased energy efficiency. It remains to see if this potential will be used to its full extent in the next decades. Model calculations indicate that the impact of C02 policies on the competition with other materials will be limited. Greenhouse gas emission mitigation will have much more impact on materials production and waste handling than on materials consumption.

Jan 1, 1999

By Ji-He Wei

The ESR of Cu-Cr-Zr alloy has been experimentally investigated. The remelting experiments have been carried out with different slag fluxes in the Cal, + Nal, CaF2 + ZrO2 and CaF2 + NaF + ZrO2 systems on an ESR furnace of 25kg capacity; using a water-cooled copper mould of 96.5 mm diameter, with the forged square bar electrodes of 50x50 mm2. The slag amount was taken to be 1.5 kg. The remelting current and voltage used were 1600-1800A and !5-25K, respectively. The influence of the slag composition on the stability of the remelting process and the losses of alloying elements (2r and Cr) has been considered and examined. The technologies of hot working and heat treatment of the ES ingot have been described and discussed. Some physical properties of the slag in a CuF2 + NaF + ZrO2 system and the remelted Cu-Cr-Zr alloy have been determined. The results indicated that with the slag flux of CaF2 + NaF + l0 mass % ZrO2 and the other operation parameters employed, a high quality ingot of Cu-Cr-Zr alloy may be obtained at the considerably high yields of Zr and Cr by means of ESR. For the remelted Cu-Cr-Zr alloy with a specified composition of 0.5 mass % Cr and 0.1 mass % Zr, the appropriate electrical conductivity, hardness and softening temperature are as high as 45-46S/m, HRB 82-84 and 550°C. respectively. The properties of the Cu-Cr-Zr alloy products are in accordance with and superior to the requirements and specifications of ISO5l82-l99l(E).

Jan 1, 2000

By Anna Wasilkowska

The study concentrates on the effects exerted by microstructure, deformation history and uniaxial stress conditions (temperature, stress state, strain rate) on the mechanical properties offerritic TRIP-aided steels for automotive applications. In low-alloyed TRIP-steels it is quite difficult to separate the effect of the austenite to martensite phase transformation from the influence of the ferritic matrix contributing to the yield stress and uniform elongation. Investigation of transformation kinetics of retained austenite as a function of the deformation temperature show that using the parameter k to characterize the retained austenite stability allows to identify regious of different temperature sensitivity separated by a transition temperature of 10±5°C. The observed low strain-rate sensitivity of the flow stress is an intrinsic property of the ferritix matrix and points to defomtation governed by slip. The ultimate tensile strength is much stronger affected by temperature than the yield stress. The influence of the temperature on the elongation is complex, because of the heating of the specimens by 60-l20°C at moderate and high strain rates. The increase of the total strain can be understood in terms of thermal softening of the ferrite. On the other hand, the steep increase of the stress during dynamic testing is an effect of accommodated elastic and plastic strains in the matrix. The strain- hardening exponent is dependent on the conditions imposed during testing. The martensite transfomtation rate is lower and the critical stress for martensite nucleation is much higher under compression compared to tensile loading. In secondary tensile tests, the yield stress increases steeply, and the ultimate tensile strength and the total elongation depend linearly on the amount of pre-straining. The results confirm that in the range of 8=10-4 s-l the TRIP-effect governs room temperature plasticity. Keywords: TRIP-steels, mechanical properties, strain rate sensitivity, temperature sensitivity, austenite stability

Jan 1, 2003

By David T. Bunney

In .December of 1987, International Mill Service, Inc. signed an exclusive licensing agreement with Tetronics Research & Development Co. Limited of Faringdon, Oxfordshire., England to commercialize plasma technology which had been demonstrated in an EAF dust processing application. The intent of the process is to reduce and volatize the zinc, lead and cadmium oxides inherent in EAF dust and collect these elements as metals in an ISP (Imperial Smelting Process) zinc splash condenser, and to render the resultant slag an inert, non-hazardous material. With these objectives in mind, IMS started commissioning facilities in 1989 at Florida Steel in Jackson, Tennessee and Nucor-Yamato Steel in Armorel, Arkansas. This paper will address the commercial development and progress of the technology at these two installations. Process Description In the EAF steelmaking process typically the off gas stream is cleaned by some form of baghouse. The particulate collected is known as Electric Arc Furnace dust and has been designated by the U.S. EPA as hazardous waste number K061, once it leaves the collection system. This designation was given to the material due to the high toxic concentrations of lead and cadmium (nickel and chromium for stainless EAF dusts) inherent in the dust. IMS' method of operation is to locate the facilities on the client mill's property adjacent to the baghouse. The dust is transported directly to IMS via a closed conveyance system. This method enables the technology to be an additional processing step in the steelmaking process. Once the dust has been transported to the IMS facility, it is fed, metered and mixed mechanically in the feed conveyance system with a carbon reductant (typically coke breeze). The carbon reductant is approximately 10% of the dust feed rate. This mixture passes through the feed system and enters the furnace

Jan 1, 1992

By Zhao Hengxian

We studied the phase diagram of Na3AlFe-ZrO system, reduction of ZrO2 by aluminium and electrochemical behaviours of ZrO2 in the system. The results show that Na3ALF6-ZrO2 system is a simle eutectic one, that the velocity of reduction of ZrO2 in the system is rapid al 960'C and that the Zr content in the alloy abtained can reach as high as 2.5wt%. Potential scanning shows that there exist new current peaks on the potential scanning plats except for the cuurent peaks corresponding to the oxidation of aluminium. The method of making Al-Zr alloy in our paper has advantages over the traditional method of mixing metals.

Jan 1, 1992

By George P. Demopoulos

n this study we have sought to highlight the critical linkage between individual reaction kinetic parameters (usually determined in small bench scale experiments) and large continuous reactor performance by focusing on the industrially significant zinc pressure leach process. To this end a comprehensive mathematical model previously developed for the description of this process was employed. In this paper we have examined in particular how small variations in key kinetic parameters impact on the autoclave&apos;s performance, i.e. attainment of autogenous steady-state temperature, zinc conversion and solution chemistry. The reaction parameters studied were: (i) stoichiometry of the marmatite leaching reaction; (ii) the activation energy of the same reaction, E,; (iii) the rate constant of the ferrous to ferric oxidation reaction, k,; and (iv) the apparent equilibrium constant for ferric precipitation, K,. This parameter sensitivity analysis was done under no oxygen mass transfer control limitations. Model predictions were found to be more sensitive to the kinetic parameters under certain conditions than others. The most dramatic finding was the one related to the small amount of sulfate produced during marmatite leaching. In connection to this it was found that the small percentage (< 5 %) of sulfate produced enhances the autothermal operational stability of the autoclave. The need for accurate kinetic parameter determination under conditions similar to those encountered in industrial zinc pressure leaching was demonstrated.

Jan 1, 1999

By Shadia J. Ikhmayies

"Cadmium telluride (CdTe) is a very interesting material that has many applications. Thin films of p-type CdTe can be used as the absorber layer in the heterojunction CdS/CdTe thin film solar cells in which n-type cadmium sulfide (CdS) works as the window layer. A review of the photoluminescence (PL) spectra ofp-type CdTe thin films prepared by different techniques was performed. The presence of defects and impurities such as oxygen and chlorine influence the PL spectrum. Copper and other dopants change the PL spectra and enhance the defects band. Chemical-heat treatment especially with CdCh is known to improve the quality of CdTe thin films because it decreases the Cd vacancies and quenches deep traps, so it enhances the PL signal. A discussion of chemical-heat treatment especially with CdCh, the effect of the ambient atmosphere, and that of the measuring temperature is performed.IntroductionCadmium telluride (CdTe) is a II-VI compound semiconductor that has a cubic zincblende (sphalerite) structure with a lattice constant of 0 A4~11]. Other than all of II -VI semiconductors, CdTe can be made both n- and p-type. But due to self compensation it is not easy to get p-type CdTe films [2]. Polycrystalline CdTe thin films are interesting because they have a lot of applications. Most of the problems associated with the use of these films are attributed to inhomogeneity, self-compensation, and the difficulty of forming a stable and lowresistivity ohmic contact [3]. CdTe technology has been established for a large number of applications, including solar cells, optical and nuclear detectors, and thermal- and radiationimaging devices [3]. At present, the highest demonstrated conversion efficiency for a CdTe based heterojunction (ID), with CdS as a window layer, is 16.5% [4, 5]. CdTe thin films can be prepared by different experimental techniques, such as thermal evaporation [l], electrochemical deposition (ED) [3], close-spaced sublimation (CSS) [3, 4, 6], physical vapor deposition (PVD) [3], chemical molecular beam deposition (CMBD) [7], and close space vapor transport (CSVT) [8].The objective of this paper is to make a review of the photoluminescence (PL) spectra ofp-type CdTe thin films prepared by different techniques and discuss the factors that influence the PL spectra. The composition of the film is very interesting in determining its PL spectrum. Different kinds of defects, impurities and dopants have their finger prints in the PL spectrum. Deposition techniques and deposition parameters such as the deposition temperature and ambient atmosphere also have their influence. Heat and chemical treatments which are known to improve crystallization and reduce the defects change the PL spectrum."

Jan 1, 2013

By Guan-Yong SHI, Cong Wang, Zhi-he DOU, Ting-an ZHANG, Shi-gang FAN

Based on the pre-works, this paper proposed a new short stage process of the intensify aluminothermy reduction by the stage to prepare high titanium ferroalloy with low O and Al contents. We investigated the effects of Al and Ca and Si combination reduction agent, slag type and step-up reduction conditions on the Al content and distribution in the alloy. The results show that the step-up reduction can not only reduce effectively the oxygen content in the alloy, but also reduce effectively Al content. For instance, the oxygen content in high titanium ferroalloy is within 1%~4%, and the Al content is within 1%~5%. Its quality reaches the requirement of high titanium ferroalloy prepared by remelting process.

Jan 1, 2015

By A. M. Strachan

Capper Pass & Son Limited Was, until its recent closure, the world&apos;s largest producer of tin from secondary materials including solder drosses, non-ferrous smelter flue dusts, tin based metal alloys, residues and slags. Polonium-210, an alpha emitting radionuclide, was present in varying concentrations in some of the numerous feed materials processed by the smelter and refiner. The polonium-210 followed a complex path through the process flowsheet. This paper discusses the behaviour of polonium, both from its arisings in other smelters&apos; process streams and through the entire Capper Pass smelting and refining circuit. The consequential personnel safety and environmental precautions necessarily taken in some areas of the process operation are outlined.

Jan 1, 1992

By Grant E. Casley

Since 1970 Mount Isa fines Limited has made a significant increase in blister copper production from approximately 100,000 to 155,000 mt per annum and in fact 161,040 mt were produced in the calendar year 1974. Flowsheet developments including fluidised bed roasting and converter slag flotation are discussed, particularly their contributions to minimising major equipment changes in smelting and converting. The use of model- ling and simulation techniques for such an exercise is mentioned. The paper reports the alterations made to both equipment and operating techniques in the reverberatory furnace and converter sections to achieve the regular production of 250 mt of blister per converter day from a 41% Cu matte grade. The effects of flux composition on converting performance are highlighted. The air quality control programme is discussed in relation to its restriction of blister copper production.

Jan 1, 1976

By O. Norman Lotter

The formulation and use of mixed collector suites in sulphide flotation can be traced back as far as 1957 with the work of Glembottskii and his co-workers in Moscow. The subject was reviewed by Lotter and Bradshaw in 2010, and proposed a synergy between ideally-selected different reagent types to deliver improved performance, in particular the in situ catalysis of a xanthate to dixanthogen by a dithiocarbamate. Correctly formulated for a particular application, an optimally arranged mixed collector suite delivers the following improvements to the flotation process: • An increase in the flotation kinetics • Improvement in coarse, or middling, particle recovery • Reduction in total dosage requirement • Best results are found from testing the ratios of the collectors. This is of critical importance. In all an optimally formulated mixed collector system usually delivers an increase in paymetals recovery of 1–4% absolute, with a gain in concentrate grade in the range 10–20% relative. In recent years, the addition of semi-conductor theory and associated electrochemistry has contributed significantly to this toolbox by way of identifying optimum domains of Eh and pH for the flotation of individual minerals. In the case of mixtures of minerals, this is where the mixed collector system delivers significant value by way of presenting a mixed set of collector radicals and dimers in a common Eh and pH domain for overall performance. This calls on a fundamental understanding of organic chemistry, mineralogy, semiconductor theory, and electrochemistry. Whereas the selection of grinding media type effectively influences the Eh, the pH can be easily controlled by pH modifiers. The theory of this system, and some industrial case studies, are discussed.

By Wei Luo, Yuanbo Zhang, Zhixiong You, Zijian Su, Guanghui Li, Tao Jiang

"In this study, the appropriate sintering process parameters for low-grade ferromanganese ores were investigated. The results showed that, under the condition of natural basicity (R=0.03), the optimal parameters were obtained as follows: moisture of mixture 9 .1 %, coke powder 9 .9% and sintering negative pressure 7 KPa. And the corresponding yield, ISO tumbling index and utilization coefficient reached at 80.18%, 61.27% and 1.515t·m-2·h-1, respectively. Under the optimal parameters, the emission of harmful gases, such as S02 and NOx, were reduced evidently with 30% of coke powder replaced by biomass charcoal. Moreover, it was found that the basicity had obvious effects on the quality of the sinters when it changed between 0.03 and 2.4. The ISO tumbling index gradually decreased from 61.27% to 55.47% with the basicity increasing from 0.03 to 1.2, then, it began to increase after the basicity further increased to 2.4.IntroductionManganese is mainly consumed by steel and battery industries, particularly in the steel plants and ferroalloy units. The consumption of metal manganese in the ferroalloy industry accounts for 85%-90% of the total Mn [1-2]. Therefore, ensuring sufficient manganese alloys is essential to meet the rapid development of steel industry. Recently, rich-manganese slag containing high grade Mn (>40%), low Fe (1%) and P (<0.03%) is considered as superior raw materials for manganese alloys. While the sinters made from manganese ores are major raw materials for producing rich-manganese slag with the increasing exhaustion of natural rich manganese lump ores [3-5]."

Jan 1, 2013

By Kazuaki Mita

There are various intermetallic compounds in the Zn-Fe system. We synthesized them at about 673K. A specimen was examined chemically and X-ray diffraction was applied to ensure the formation of intermetallic compounds. Material containing two phases was placed in a Knudsen type effusion cell and the mass spectrum studied to evaluate the vapor pressure of zinc. The thermodynamic properties of intermetallics was then evaluated through measured intensity.

Jan 1, 1999

By Shengli Tao, Hongxu Li, Hao Bai, Yu Chen, Daqiang Cang

"China is the world's largest steel producer, in order to give environment load comprehensive analysis of steel and iron industry in china using LCA method, the life cycle inventory was compiled and assessment model based on Gabi software was also established. Environmental impact of two different routes ofBF-BOF and the EAF were analyzed respectively and intercompared. The results show that the modem EAF route is superior to the traditional BFBOF route on almost all the environmental impact indexes, which including acidification potential, eutrification potential, global warming potential, ozone depletion potential, etc. In the whole life cycle ofBF-BOF route in China, the transporting process ranks the biggest contribution part to the overall global warming potential, which can be explained by the fossil fuel burning of transporting vehicles during the long distance from Australia to China as the iron ore used are mainly imported from Australia. Apart from transporting process, Coking, blast furnace and iron mining processes could induce great environmental problems, while for the EAF route, the electricity consumption is considerable, which causing large amount ofC02 emission indirectly. Based on the analysis, several further countermeasures were proposed. Key words: Iron and steel industry, LCA, Gabi software, C02 emissionIntroductionCrude steel of china which reached 101.24 million tons in 1999 ranked the first column in the world since1999, So far has been to keep the world's largest steel output. At the year of2009, China crude steel output of 568 million tons, accounting for 46.6% of the global crude steel production, more than the total sum of crude steel production produced by 20 countries ranked behind. In 2011, China's crude steel production which is expected to be or close to 700 million tons, an increase of 12% than last year, will account for half of the global steel production.The steel industry, however, is intensive resources industry with huge consumptions of energy and water together with mineral resources. Energy consumption of the iron and steel industry has been about 10% of the total energy consumption since 1980. Coal dominants, power next and other energies share least in the energy consumption structure, for example coal accounts for 72.19%, power 23.52% and other total sums less than 5% in the steel energy consumption at year of 2002[2,3]. The consumption of coal discharges much emission of CO2, yet emissions of C02 in China steel industry, secondary only to the power and cement industry, ranked the third, and the coal dominant energy structure and its process have a close relationship. The aim of this research is to target steel production of typical blast furnace-converter (BFBOF) and electric furnace, using GABI software to evaluate and analyze resources and environment influence of LCA, directing at the existing problems in the development of China steel as well as finding the possible way to improve ability of reducing pollution and energy consumption in order to realize the sustainable development of the steel industry [ 4-7]."

Jan 1, 2012

By H. -Peter Sattler

The laser sorting technique for replacing the handpicking of the non-ferrous metal scrap from auto shredders was first introduced 1990, The process is based on the use of atomic emission spectroscopy induced by lasers to identify the scrap particles and sort them with adequate systems into main fractions of Al-, Zn-and Cu-alloys, stainless steel and lead, In the meantime the handling technique for the scrap, i.e. the singling and sorting technique as well as the analytical detector were further developed for more efficiency and higher reliability, i,e. less maintenance, minor sorting errors etc. These developments were mainly based, on and initiated by operational experiences from the startup phase of a first production plant. Part of the on going research work was the development of an ,aluminium detector which makes it the first time possible to sort mixed aluminium scrap automatically into specific alloy fractions.

Jan 1, 1995

By Tapani Järvinen

Non-ferrous metals and metals in general are considered as being non-renewable natural resources. Metals are needed because of their excellent and irreplaceable properties. The consumption of metals, with the exception of carbon steel, is steadily growing by 1-3 % annually, and that of stainless steel as much as 3-6 %. This is a general trend, which is periodically disturbed by cyclical variations. In recent years so-called "New Economy" has become prominent in the public media and the market value of the traditional industry has been well below its real value and importance. Nevertheless, the modem society requires metals today and also in the future, and the companies using the most modern technology in a responsible way and innovative solutions not only in technology, but also in everything they do will survive. This paper describes the role of Europe as a producer of primary base metals and as a supplier of technologies in the base metals industry. It concentrates on the development and commercialization of technologies and project implementation in the metallurgical industry. As one example ofa European approach to these matters the paper presents Outokumpu&apos;s response to the future challenges in the base metals industry. Outokumpu Oyj is one of the leading metals and technology companies in the world of stainless steel, copper, zinc, and sales of technology in metals and minerals businesses. Outokumpu applies its knowledge of metals and processing to generate value for its customers and shareholder. Everything we do, we do in an economically, environmentally and socially responsible way.

Jan 1, 2003

By Zhang Jianliang, Xu, Zuo, Runsheng, Haibin, Kexin, Jiao

Full oxygen blast furnace iron-making is one of the new technologies, which is most likely to realize large-scale application. In this paper, based on the technology of full oxygen blast furnace, the reduction behavior of pellets is studied systematically by using the analytic method of non-isothermal dynamics on the different atmosphere(CO,H2) and the dynamics model of gas-solid reduction reaction is constructed, which lay the foundation of reduction model establishment of full oxygen blast furnace burden. The result shows that the time of pellets which began to react is delayed with the increase of the content of H2. When the temperature is between 650 'C and 1050 'C, the content of H2 in the reduction atmosphere is larger, and the rate of the reduction pellets is larger. The reduction rate changes at 780 'C, and a certain amount of H2 in the reducing atmosphere will significantly improve the reduction reaction when the temperature is above 780 'C. Non-isothermal reduction behavior is controlled by interfacial chemical reaction and internal diffusion under high reduction potential. H2 ratio in reducing atmosphere increased from 0% to 100%. The reduction reaction of the apparent activation energy decreased from 49.03kJ-mor1 to 33.74kJ·mor1.

Jan 1, 2013

By Fiona J. Stevens McFadden, Gregory J. Hardie, Mark P. Taylor, William Uru

"Over 20 million tonnes of installed aluminium smelting capacity exists worldwide, with smelter energy con.sumption in the range 14-17 kWh/kg aluminium. In terms of the reduction cell technology itself, the lowest sustained energy consumption is just below 13DC kWh/kg, or 50% energy efficient.For 15 years Comalco Aluminium Ltd. in Australia has been engaged in developing and testing reduction cells that use a refractory hard cathode, composed of a TiBif carbon composite coating over a carbon cathode. This technology has the potential to reduce energy consumption significantly while simultaneously increasing the life of the cells, which is currently limited by wear rate of the conventional carbon cathodes used throughout the worldIntroductionThe successful development of an aluminium wettable cathode technology affords the opportunity to the cell designer and smelter operator to fundamentally change the physical operating characteristics of the Hall-Heroult process. With this revolutionary capability in hand, published papers and patents have indicated that the technology may be exploited in a wide variety of ways to improve the economic performance of aluminium smelting process. Comalco has been developing refractory hard cathode technology for more than 15 years and has been exploring a number of ways that the technology may be commercially applied in a smelter operation [l]."

Jan 1, 2000

By Takeo Fujino, Nobuaki Sato, Junichi Hasegawa, Masato Nakazawa, Kohta Yamada

"Tantalum oxide thin films were deposited on quartz substrates by laser ablation of Ta2O5 target using Nd:YAG pulse laser. Deposition-was observed when a laser light energy higher than 200 mJ and its repetition rate higher than 3 Hz. A thin film of 0.1 µm thickness was obtained by the ablation using a laser light of 300 mJ and 6 Hz for 2 sec. The thickness of the film increased with increasing energy, repetition rate and irradiation time of laser. By the SEM observation, it was found that many island-like particles were deposited on quartz substrate forming a thin film. The obtained thin film, which was identified as ? Ta-O by X-ray diffraction, was oxidized to Ta2O5 by the heat treatment in air at I273 K for 3 h.IntroductionTransition metal oxides have a potential to show special characteristics in electrical, magnetic and/or optical properties. When such compounds are fabricated in the form of thin film, the special properties would be improved or new characters would appear in comparison with bulk materials. Tantalum penta-oxide is widely used as a capacitor since Ta2O5 shows high dielectric constants up to high temperatures. The tantalum solid capacitor has been fabricated by the electrical oxidation of sintered Ta metal cylinder followed by MnO2 film coating. However, further improvements, reduction and layered structure formation, are required for compacting the devices. The layered structure of thin films would be applicable for the above requirements. The formation ofTa2O5 film by low pressure CVD1), photo CVD2) and magnetron sputtering3l were reported. The laser ablation -method is one of the most convenient techniques for the deposition of thin films from their compounds, such as oxides. Formation of Ta2O5 film by pulse laser deposition (PLD) method using ArF excimer4), Nd:YAG (533nm)5) and TEA CO2 6 lasers was reported. In these PLD studies, ablation was carried out in relatively high oxygen pressures resulting in formation of Ta2O 5 film. In this paper, the deposition of tantalum oxide thin film by the laser ablation of Ta2O 5 using Nd:YAG pulse laser was examined at a viliety oxygen pressures ranging from 10-8 to 10 Torr. The morphology of the films was also investigated in relation with substrate temperature and oxygen pressure."

Jan 1, 2000