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By Guo-Sen Zhu

Research on the formation mechanism and control of corner transverse cracks was carried out. The optical microscope and SEM were applied to analyze the characteristics of cracks. It is found that the cracks occur at the relatively lower temperature due to unbending strain and have almost nothing to do with the mold cooling and powder. The keys to prevent corner transverse cracks are to optimize the corner temperature of slab and maintain the good state of casting machine. Increasing casting speed and decreasing the cooling water flux at the corner in the unbending segments, resulting in mild cooling, were applied during investigation to control corner temperature above the upper limit temperature of the No.3 brittle zone of Nb-contained steel tested by Gleeble-1500 system. As a result, corner transverse cracks were minimized, but centerline segregation got worse. And then increasing the cooling water flux at the corner (intensive cooling) was applied to make corner temperature below the lower limit temperature of the No.3 brittle zone. Great diminution of both corner transverse cracks and centerline segregation was achieved finally.

Jan 1, 2006

By Alfonso Nájera

Turbulent flow of liquid steel and its control is studied using different geometries of turbulence inhibitors. Four designs of turbulence inhibitors were characterized through experiments of tracer injection I a water model and mathematical simulations using the Reynolds Stress Model (RSM) of turbulence. Geometries included octagonal-regular, octagonal-irregular, pentagonal and squared. A layer of oil was used to model the behaviour of tundish flux during steel flow. Fluid flows in a tundish using these geometries were compared with that in a bare tundish. Experimental and simulation results indicate that the flow in the bare tundish and a tundish using turbulence inhibitors open large areas of oil due to strong shear stresses at the water-oil interface but the squared inhibitor. These phenomena are explained by the high gradient of the dissipation rate of the turbulent kinetic energy using the squared inhibitor. Using this device the kinetic energy reports a high gradient from the tundish floor to the free bath surface as compared with other geometries.

Jan 1, 2006

By Hideyuki Itou

Municipal wastes are mainly incinerated in Japan. Both bottom ash and fly ash from the incineration treatment are smelted recently to decrease the volume. Direct smelting of municipal wastes is also becoming popular. The smelting treatment generates fly ash which contains concentrated heavy metals such as Zn, Pb and Cu, and the harmfulness is causing concern. The smelter fly ash is mainly landfilled after stabilization. An effective treatment process of the smelter fly ash is required to recover the metals. For the treatment process, an application of chloridizing volatilization technique is considered. Chloridizing volatilization experiments were carried out to determine the effects of various factors on the volatilization behaviors in this study. A pretreated ash was mixed with a main raw material which mainly consists of hematite. Calcium chloride water solution was added into the mixture. The mixture was pelletized, dried and used as samples for the volatilization experiments. The sample was placed in the reaction tube heated in an electric resistance furnace. 5%02-95%N2 gas with controlled humidity was introduced into the reaction tube. Effects of humidity in the carrier gas, addition of calcium chloride and mixed ratio of the ash to the main raw material were investigated on the volatilization of Zn, Cu and Pb. To determine the volatilization behavior, samples were taken from the furnace at specified temperatures on the heating stage. In addition, experiments at specified holding temperatures for 15 minutes with shortened heating time were conducted. The two series of experiments revealed the effect of heating temperature on the volatilization behavior of Zn, Cu, Pb and Cl.

Jan 1, 2006

By Vaughan R. Voller

In many high temperature processes involving liquid melts the common practice is to solidify a fraction of the melt adjacent to the containment wall; a practice that can provide protection of the structural components of the process. The position, shape and transient behavior of these so called "skulls" and/or "ledges" are directly dependent on the thermal process conditions. This paper presents a model of a generic ledge process that can predict the steady shape of a ledge. Two numerical implementations are presented and compared: (1) based on a space grid of continuously deforming finite elements (2) based on a conjugate grid of fixed control volumes and deforming boundary elements.

Jan 1, 1996

By Jacob Bummer, Greg Roset, Dayle Flynn

"IntroductionStillwater Mining Company operates a Precious Metals Smelter (PMS) located in Columbus, Montana USA. The PMS processes iron, copper, and nickel sulfide bearing concentrates containing platinum, palladium, gold, and rhodium. The concentrates are produced from two mines in the Beartooth Mountains located in south central Montana. The PMS utilizes a 7.5 megawatt 3-in line electric furnace to smelt the concentrates, and two Top Blown Rotary Converters (TBRC's) to remove iron. In addition to the mine concentrates, the PMS also processes various forms of Platinum Group Metal (PGM) bearing recycled catalyst. The sulfide matte produced within the electric furnace and TBRC's acts as a collector for the PGMs. Throughout the operation of the PMS, there are three different forms of molten material that are processed through the Stillwater Granulation system: TBRC matte, TBRC slag, and electric furnace matte. This paper describes the operation of this granulation system.Tapping the FurnaceWhen a sufficient level of molten PGM bearing matte has been reached within the inner volume of the electric furnace, the molten material is ""Tapped"". Tapping requires drilling into the electric furnace until reaching the molten matte phase. The matte phase will drain out of the drilled hole through a graphite launder into a 5 ton refractory lined ladle. Once the ladle is full, the tap is plugged with a mud gun."

Jan 1, 2012

By Aureo D. V. Machado

An experimental study to obtain zirconia powders (ZrOz) from carboxylate zirconium solutions followed by hydrogen peroxide stripping and precipitation, has been carried out. Zirconium carboxylate was prepared by solvent extraction from a chloride aqueous phase using magnesium carboxylate as organic phase. The variables examined in the precipitation reaction were: Temperature: 25 - 90 ?C ? H202= concentration: 0.3 - 5% wt/wt - pH: 1 ? 9 Organic/Aqueous ratio (1/1) and reaction time (30 minutes) were maintained at constant levels. The optimum results (98% precipitation) were achieved at 25 °C, 5 % wt/wt H202=, and pH = 5. The precipitates were composed of large amorphous aggregates (<I00 micrometers). After calcination for 1 hour at 1000 OC, monoclinic ZrO2 with a large variation in particle size (1 -100 micrometers) was obtained.

Jan 1, 1991

By Gabriel Plascencia

Copper was oxidized in the temperature range from 300 to 1000 °C under different pressures of oxygen, In the range from 300 to 500 °C, copper oxidizes following the logarithmic rate law; while in the range from 600 to 1000°C oxidation follows the parabolic rate law. Transition from logarithmic to parabolic growth occurs at about 525°C. X-ray diffraction was performed on oxide scales to account for the CuO/Cu2O ratio at different temperatures. Activation energies found in this work are in good agreement with reported values.

Jan 1, 2003

By Kenshi Kawabata, Mitsuji Ueda, Junko Umeda, Katsuyoshi Kondoh, Kantarou Kaneko

Solid-state recycling process of in-house scraps of machined magnesium (Mg) alloy wastes has been established to directly produce wrought materials via the repetitively plastic deformation by Roll-compaction (RCP) and the conventional hot extrusion. The coarse chips, wasted in machining AMX602 (Mg-6Al-0.2Mn-2Ca) cast billets used for the gate bar used in Electronic Toll Collection (ETC) of the high-way system, were employed as the input materials in this study. RCP process enabled to serve coarse Mg alloy powder consisting of refined grains and intermetallics with no re-melting. They were easily consolidated by hot extrusion, and their wrought alloys showed both homogeneously refined grains less than 1~2 µm by dynamic recrystallization and randomized texture by repetitive plastic deformation on the input wastes. These materials revealed extremely advanced mechanical properties of high tensile strength of 356MPa and high ductility of 14.8%, compared to the originally virgin materials with 270MPa TS and 5% elongation. When applying the same Mg alloy wastes via RCP process to the mass production in the company, the large-scale extruded materials also indicated the superior tensile properties. It means that this direct solid-state process is held as “Up-grade recycle of metal wastes”.

Jan 1, 2008

By Blas Melissari, Stavros A. Argyropoulos

"In this paper a computational approach was employed to estimate the melting of solid spheres immersed in different liquid metals and under different convective conditions. The spheres are made from the same material as the liquid metal. The SIMPLER algorithm was implemented using a three-dimensional system in Cartesian co-ordinates. Experimental validation of the dimensionless correlation was carried out in two fluids with vastly different Prandtl numbers. The dimensionless heat transfer coefficient (Nusselt number) is obtained as a function. of the Reynolds and Prandtl number.IntroductionThere is a paucity of dimensionless convective heat transfer correlations applicable to fluids like liquid metals. The existing correlations cover single Prandtl number metals [l] or at most two different Prandtl number metals [2]. A knowledge of heat transfer rates from particles at high flux levels has become increasingly important to the design of energy transfer systems. Melting of solid particles has been studied extensively as it relates to many engineering and environmental applications, such as materials processing, space applications, water resource and energy conversion. When objects are immersed in a fluid with a temperature higher than their melting point, they melt and produce molten material that then mixes with the surrounding fluid. These objects experience not only size variation but also changes in their shape. This observation is more pronounced when the melting occurs in a forced convective flow.Yuge performed pioneering experimental work on the heat transfer from a sphere to air under mixed convection [3]. He suggested procedures for predicting the Nusselt number. Hieber et al [4] studied the spherical system analytically, but their study was limited to flow with small Reynolds numbers. Many researchers studied the melting dynamics of ice spheres in water at different convective regimes. Aziz et al [5] and Hao et al [6] performed measurements of the heat transfer coefficient in the water system by measuring the melting time of ice spheres in forced convection. Hao et al [7] performed visualization studies of ice spheres melting in water under mixed convection regime. All of this groundbreaking work, however, did not involve the use of liquid metals"

Jan 1, 2004

By Kongfang Feng, Fei Ruan, Zhiyu Liu, Jieyu Zhang, Xin Hong, Shaobo Zheng, Jixu Wang, Jinyin Xie

"Mixing phenomena in smelting reduction furnaces with asymmetric side blowing were studied in this paper. Mixing phenomena in a smelting reduction furnace was represented as the mixing time by electrical conductivity measurements. Experiments were performed in a water model under various operating conditions to determine the effects of horizontal angle, radial angle, inserting depth, flow rate of the upper and the lower side nozzle, the included angle between the upper side nozzle, and the lower side nozzle on mixing phenomena in smelting reduction furnace. Comparing mixing time and mixing phenomena, the optimal conditions were obtained for an asymmetric side blowing process.IntroductionIn recent years, many countries have put forward development strategies for saving resources and environment-friendly, the development of various industries had to face its influence for resources and the environment .As we all know, the steel industry is a pillar industry of the global economy, in which ironmaking is an important part of it. In the modern ironmaking process, the blast furnace is regarded as the most important equipment and tool. But with the increasing scarcity of metallurgical coke resources and considering the environmental impact of such processes, metallurgists proposed the concept of smelting reduction. Smelting reduction processes to produce hot metal from iron ore and coal were being developed as a possible alternative to the traditional blast furnace. At present, a number of smelting reduction processes had been developed all over the world, they were mainly included COREX, HISMELT, FINEX, DIOS, etc."

Jan 1, 2012

By Tian Tang, Sergio D. Felicelli

"The laser cladding is an important surface treatment for enhancing resistance against corrosion, abrasion, and wear. The focus of the present study is to develop a three dimensional finite element model to analyze the temperature history and thermal stress evolution during multi-pass laser cladding process on H13-H13 tool steel sample. A sequentially coupled thermal-stress analysis methodology was adopted in this study. The thermal model was firstly established to investigate the temperature history of the laser cladding process. Then the temperature history was used as input to mechanical model to calculate the thermal stress evolution during the process and the residual stress after the sample completely cooled down to room temperature. The influences of process parameters including the scanning speed and scanning strategies on temperature history, thermal stress evolution, and residual stress were investigated in details.IntroductionLaser cladding is an advanced material process technique, which is often used to improve mechanical properties or increase corrosion resistance, repair worn out parts, and fabricate metal matrix composites. In this process, the injected powder or wire feedstock material and a thin layer of substrate are melted and consolidated by use of a laser in order to coat part of a substrate or fabricate a near-net shape part.Numerous mathematical models have been established for analyzing the effects of process parameters, microstructure evolution, and thermo-mechanical behavior of laser cladding. Zhou et al. [1] established an analytical model to investigate the laser induction hybrid rapid cladding for Ni-based WC composite coatings. Huang et al. [2] also developed an analytical model to theoretically investigate the interaction between the laser beam and the powder stream of laser cladding process. A simple and realistic model of laser cladding was proposed by Picasso et al. [3]. The cladding layer is very sensitive to cracks due to the accumulation of residual stress, caused by non-uniform temperature changes, which have limited the wide application of laser cladding technique in industry. Recently, fmite element method has been increasingly used to simulate the laser cladding process [ 4-6]."

Jan 1, 2014

Laminated ceramics have received widely scientific and commercial attention because their properties, such as mechanical properties and electrical properties, can be tailored by adjusting the structure, thickness and composition of the different layers. For example, ferroelectric Bi4T13O12 (BIT) which has a positive temperature coefficient of dielectric constant (TE) can be used to modify the negative of typical microwave dielectric ceramic BaNd2Ti4O12(BMT). However, BaNd2Ti4O12/Bi4Ti3O12/BaNd1Ti4O12 (BNT/BIT/BNT) laminated ceramics could not be prepared by the general method because the optimal sintering temperature of BaNd2Ti4O12 ceramic (around 1350°C was much higher than that of Bi4Ti3O12 ceramic (around /1100°C). in this research, a new method of spark plasma sintering (SPS) combined with post-sintering was successfully proposed to prepare BNT/BIT/BNT laminated divided proposed to prepare ceramics. It was divided into three steps. In first step, the BaNd2Ti4O12 ceramics were prepared by conventional sintering method. In second mop, the calcined and pre-pressed Bi4Ti3O12 powders were sandwiched between BaNd2Ti1O12 ceramic pellets and spark plasma sintered at 900&apos;C for 10min to synthesize BNT/BIT/BNT composite ceramics. In the last step, a post-sintering was employed to reoxidize the partially reduced BNT/BIT/BNT composite ceramics. The results of scanning electron microscopy (SEM) and electron probe mircoanalysis (EPMA) showed that BNT layer and BIT layer were well bonded and no significant interfacial infiltration between them was observed. The sandwiched BNT/B1T/BNT ceramic with 10.7% BIT in volume has a dielectric constant of 92.8, a low dielectric loss of 0.0068 and a small temperature coefficient of dielectric constant v/35 ppm/C at 1 MHz.

Jan 1, 2003

By Per Anders Eidem, Merete Tangstad, Jens Davidsen

"During excavations of submerged arc furnaces producing silicomanganese, silicon carbide (SiC) has been found. Contributing to the size of the inactive area of the furnace, the active area of the furnace where reactions occur will decrease, thus reducing the potential for pre-reduction in the furnace.This work studied the formation of SiC from the liquid-solid reaction between slag, metal, and metallurgical coke. Slags and metals with different levels of silica (S1O2) and silicon (Si) have been studied. The slag and metal has been heated together with coke, and the samples investigated by microprobe. The results show that SiC was formed on the coke particle through reactions with both slag and metal. For the metal, the carbon most likely diffused through the SiC to react with Si in the alloy. SiC formation with slag is likely to go through the reduction of Si02 to Si.IntroductionToday, Silicomanganese (SiMn) is produced in submerged arc furnaces (SAF) by reduction of S1O2 and manganese oxides, mainly with metallurgical cokes. Typically, the tapped metal has a silicon content of 17 - 20 wt.%. To achieve higher levels of Si, the metal can be refined by adding off-grade silicon metal, yielding low carbon SiMn. [1]. What is believed to be SiC that has been found during dig-outs of SiMn furnaces producing high silicon alloy. It is possible that excess amounts of SiC in the furnace cause operational problems, since SiC will occupy furnace volume. As SiC accumulates, the active volume of the furnace will decrease, increasing the flow of material and gas in the active areas of the furnace. Formation of SiC is inevitable, so it is desired to keep the formation as low as possible. To be able to control the formation of SiC, one has to understand the basic mechanisms."

Jan 1, 2012

By N. A. Warner

To filly secure the environmental and social acceptability benefits of making a sulphide smelting facility and its ancillary sulphuric acid plant or other means for fixing sulphur, a virtually zero gas emission operation, it will be necessary to utilise exclusively technically pure oxygen. The strategy proposed for preventing the smelter from overheating involves highly efficient energy transfer by promoting sulphur trioxide formation at a relatively higher temperature than normal. A closed-loop gas circuit uses an eductor system actuated by the process oxygen to recirculate sulphur trioxide and unconverted sulphur dioxide back to the smelter, the endothermic dissociation of sulphur trioxide becoming a major contributor to the removal of excess heat. The only gases leaving the system relate to the bleed of nitrogen impurity introduced in the tonnage oxygen.

Jan 1, 1998

By K. Narayan Prabhu, W. D. Griffiths

"Heat transfer during the unidirectional solidification of a cast iron alloy against cast iron chills was investigated using an inverse modelling approach. Chills of thickness 100 mm and 10 mm were used, to simulate gravity die cruiting conditions and the use of chills in sand moulds. In both cases transient heat transfer, measured by the interfacial heat flux and heat transfer coeffieient; declined from initially high values in the first few seconds of solidification, to values about an order of magnitude lower which persisted for the remainder of the experiments. In the case of the thin chill it became saturated with heat until it was no longer in a position to extract further heat from ·the casting. These results were interpreted by studying the resistance to heat transfer from the casting offered by the ·casting-chill interface and the chill itself for example, the thermal resistance of the casting-chill interface can be influenced by the deformation of their respective surfaces and their subsequent relationship.IntroductionDie casting cast iron offers several advantages such as energy savings, higher mould yield, and better surface quality over the sand casting process1 • The process is· environmentally' friendly because of the elimination of the sand. However the design and construction of metallic moulds is expensive and a faulty die design may result in a defective casting: A simulation based process design of die castings would enable die designers and solidification modellings to try better designs of dies on the computer and arrive at a cost effective solution more quickly. This has numerous benefits for the die caster, as he would be able to produce sound castings with very short lead times.The success of a solidification model to predict accurately the thermal history and the location of hot, spots inside a solidifying casting depends to a large extent on the heat transfer data prescribed at the metal/mould interface. Many measurements of the heat transfer coeffident (or the heat flux) between a solidifying aluminum alloy and a chill have shown that the heat transfer coefficient is a function of most of the variables of the casting process2 - 8. However heat transfer studies during the solidification of ferrous alloys are rather limited. The high temperatures involved suggest that the contribution due to radiation heat transfer cannot be neglected."

Jan 1, 2000

By W. K. Tolley

The Bureau of Mines is investigating hydrometallurgical processing techniques to recycle metals from semiconductors and other advanced materials. Cadmium and tellurium were recovered from CdTe scrap produced in the manufacture of infrared optic devices. Sulfation, ferric chloride leaching, and oxygen-pressure leaching have been tested. Cadmium dissolution was achieved using oxygen-pressure leaching in dilute sulfuric acid. However, no satisfactory scheme for dissolution of the higher valued tellurium has been devised. Leaching the ground CdTe for 75 min at 110°C in 1.1M H2S0, under 120 psig 0, yielded 99.5% Cd extraction. Tellurium remained in the leach residue as TeO, and elemental tellurium; residual cadmium was less than 0.5%. The cadmium in the leach liquor was purified of coextracted metals such as gallium and iron by adjusting the pH. The cadmium was recovered as cadmium sulfate crystals by evaporating the solution. Recovery of by product metals, notably gallium, is possible.

Jan 1, 1991

By M. O. Lai

"Metal matrix composite (MMC) with composition of Al-4.Swt.%Cu reinforced by IOwt.%TiB2 or ISwt.%SiC particulate has been successfully fabricated using powder metallurgy technique. Disk, compression and beam specimens were prepared with (a) layered structure containing ductile Al-4.Swt.%Cu with brittle Al-4.Swt.%Cu/TiB2 or Al-4.Swt.%Cu/SiC layers, and (b) homogenous constituent with composition of Al-4.Swt.%Cu/lOwt.%TiB2' The specimens for the fracture toughness measurement were built through three ductile-brittle-ductile alternating layers. For the beam specimens, the layers were built through brittle-ductile-brittle sequence. The brittle layer consisted of Al-4.S%Cu with fixed amount of reinforcement. Fracture toughness testing revealed an increase for layered composites although the total amount of the reinforcement was the same for all disk specimens. The increase in fracture toughness is due to the existence of ductile layers which manifests a strong influence on delaying the occurrence of fracture. It acts as a barrier to resist the propagation of crack and hence increases the fracture toughness of the layered MMC specimens, Delamination in the beam specimens was observed to be due to shear stresses. Fracture surfaces of both disk, compress and beam specimens were characterized using the SEM. IntroductionMechanical and thermal properties can be achieved by the incorporation of refractory secondary phases to constrain the plastic flow of the matrix in a metal matrix composite (MMC). The size of the reinforcement particulate incorporated must be in the range larger than the dislocation cell size and strongly bonded to the matrix (I). Particulate reinforced metal matrix composites hence provide high modulus, improved wear resistance and strength (2-4). Because of the incorporation of refractory phases which are generally brittle, the major limitation in the mechanical properties of MMCs is their limited ductility in comparison to their base metals. Cracks normally initiate from the reinforcement and voids (4, 5). Due to the lack of ductility, cracks propagate rapidly with increase in load. As a result, the interactions between reinforcement particles and propagating cracks have recently been of great research interest (6). In addition, volume fraction of reinforcement and aging condition of the matrix significantly affect the mechanical behaviour of MMCs. In the case of AI-3.5%Cu reinforced with varying volume fractions of SiC particulate, it has been found that the probability of particle fracture increased with increasing volume fraction of reinforcement (7)."

Jan 1, 1996

By T. T. Natarajan, Nagy EI-Kaddah

"Numerical simulation of electromagnetic confinement systems generally requires large CPU time due to the strong coupling between the electromagnetic and the free boundary problems. The present paper examines the accuracy and the computational efficiency of the most common numerical schemes used in modeling such systems. Levitation melting was taken as a test case. In this study, a comparison was made between the finite element and surface integral methods for electromagnetic field calculations. The computational efficiency of Lagrange and the modified Hestenes methods for solving the free boundary problem were investigated. The convergence of the Lagrange method was found to be much faster than the modified Hestenes method. It was also found that finite element method not only gives accurate solutions, but faster convergence to the final equilibrium shape than the surface integral method. The applications and the limitations of these techniques in modeling electromagnetic confinement systems will be discussed.IntroductionIn recent years there has been a growing interest in the use of electromagnetic forces for confinement of molten metals as a means to eliminate molten metal contamination during melting and to improve surface quality of cast products. Continuous casting of metal without contact of a mold is now a reality, and is being commercially applied for casting of aluminum slabs /1/, and copper rods /2/. New applications of electromagnetic confinement in melting and casting include containerless melting (Magnetic Suspension Melting) /3/, edge containment in twin roll casting, and meniscus shape control in continuous casting of steel /4/.Modeling of confinement systems involves the determination of the electromagnetic field and the equilibrium shape. These two problems are strongly coupled due to the dependence of the field on the shape of the melt. While significant advances have been made in computational electromagnetics /5/, the application of developed computational techniques to electromagnetic confinement problems is not a simple task. The principal difficulty in using these methods is that the solution domain is not known a priori. due to coupling between the electromagnetic field and the free boundary problems. These two problems have to be solved simultaneously, leading to an iterative solution procedure. As a result, numerical simulation of electromagnetic confinement systems are computationally intensive with computational time at least an order of magnitude larger than the fixed domain problems."

Jan 1, 1994

By Gretel Parker

In situ Raman spectroscopic investigations of copper iron sulfides in leach solutions have been undertaken. Coupling potentiodynamic techniques to Raman spectroscopy produces a powerful tool for studying mineral surface response to changing conditions, while ESEM and high-vacuum techniques provide complementary ex-situ information on surface structure and composition. Oxidative acid leaching of chalcopyrite at ambient temperature yielded a product with S-S bonds that were shifted from those seen with covellite, with little evidence of elemental sulfur formation. Leaching of chalcopyrite led to non-homogeneous product distribution. Raman spectroscopy was able to identify the products formed on the mineral surfacein situ while leaching was occurring. Raman mapping and imaging demonstrated a surface distribution of the products which can be related to composition and structure changes of the mineral surface. The surface formed on chalcopyrite after anodic oxidation at 0.570 V vs. Ag/AgCl in 0.1 mol dm-3 HCl undergoes laser-induced transformation.

Jan 1, 2003

By Serdar Aksu, Fiona M. Doyle

"CMP will be an essential process in the production of integrated circuits containing copper interconnects. This study aims to improve our mechanistic understanding of the role that organic chelating agents might play in the reactive slurries used in copper CMP. Copper dissolution behavior in EDTA arid glycine was first examined by producing potential-pH diagrams for the copper-water-EDTA and copper-water-glycine 'systems. The results of potentiodynamic polarization experiments were then considered in light of these diagrams. . In-situ polarization experiments were conducted to gain insight into the electrochemistry of copper during dynamic polishing in slurries prepared from EDT A and glycine.IntroductionCopper has recently started to replace aluminum as the interconnect metal in integrated circuits. Copper interconnection offers faster and more reliable integrated circuits due to its higher electrical conductivity and superior electromigration resistance (1). The damascene method is used to form multilevel interconnects in the manufacture of integrated circuit devices with copper metallization (2, 3). Copper is deposited by CVD or electroplating into vias and trenches etched in the interlayer dielectric (IDL), over a diffusion barrier usually made from titanium, tantalum or their nitrides. Chemical mechanical planarization (CMP) then prepares the wafer for the next deposition step, by removing excess copper and planarizing the surface. During CMP, the wafer is rotated and pressed against a rotating platen covered with a polishing pad. Chemically active slurries containing submicron size abrasive particles (Si02, Al20 3, ceria, diamond, etc.) are applied. Both the mechanical action of the abrasive particles and the chemical action of slurry constituents remove material from the wafer surface. Planarization results because material is removed faster from protruding regions on the surface than from recessed regions. Since CMP can globally planarize .the entire wafer, it has become one of the key technologies for producing integrated circuits with copper metallization."

Jan 1, 2000