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By Karl-Michael Zett, Marcus Kirschen, Ashraf Hanna

"Bottom purging systems are well established practice in refining metallurgy and an increasingly important technology for the EAF process in steel industry. Direct bottom purging provides efficient mixing of the entire melt volume, increases turbulence intensity in the melt, and improves mass exchange of alloy additions or oxygen. Continuously rising columns of dispersed gas bubbles helps to increase removal of volatile components carbon monoxide and hydrogen avoiding boiling retardation. Direct purging (DPP) systems provide cost benefits especially for EAF processes where metallurgical constraints have to be considered, e.g. for alloyed and stainless steel production, foundries. Case studies are presented.IntroductionCurrent EAF Technology and Production Constraints in Steel IndustryApproxinlately 30 % of steel, 446 Mio. tonnes in 2011, was melted in the electric arc furnace (EAF) with increasing tendency due to its large flexibility in production volume and raw materials. With recent increase of prices for ferrous raw materials the requirements for production of high quality steels from low quality scrap, direct reduced iron (DRI) and blends of ferrous raw material in various qualities increased. Maximum yield of ferrous raw material, oxygen, carbon, and alloys and minimum energy costs are of high importance. At modem high productivity levels even small process improvements provide considerable cost savings. Such improvements are caused, e.g., by efficiency increase of mass and energy transfer in the EAF. Optimization of flow pattern in the steel bath is therefore important for efficient melting of scrap and DRI and high homogeneity of the melt [1-4]."

Jan 1, 2013

By M. J. King

The Chino Smelter embarked on a program to reduce smelter emissions. Fugitive sulfur dioxide and particulate emissions were reduced by (i) removing the flash furnace settling chamber and (ii) installing a baghouse, to treat converter secondary emissions. Neutralization plant capacity was increased, to accommodate increased flow from the flash furnace off-gas cleaning system and to reduce costs.

Jan 1, 1998

By M. Yoshida, S. Hanada, T. Takasugi

"A study has been conducted to examine the effect of ternary alloying elements on high temperature deformation of the C15 NbCr2 based intermetallics in Nb-Cr-X (X=V, Mo and W) alloy systems, which have attractive properties as high temperature structural materials. The high temperature deformation of the C15 NbCr2 intermetallics can be improved by two alloying methods. One method is based on geometrical consideration for site occupation and atomic size factor of component elements and additive elements in the single phase C15 lattice; addition of Mo and V can promote dislocation movement without introducing significant hardening. The other method is based on microstructural modification through ternary alloying; moderate addition of these elements results in a variety of duplex microstructure consisting of the C15 phase and bee solid solution without forming any intermediate phases, and can enhance the high temperature deformability. Particularly, alloys with duplex microstructure equilibrating with Cr-rich bee solid solution is shown to exhibit superior deform ability. Also, lattice property of the additive atoms in the C15 structure and phase relation between the C15 structure and the bee solid solution are investigated by OM, XRD, TEM and ALCHEMI observations and then discussed in association with observed mechanical behavior.IntroductionLaves intermetallics with AB2 stoichiometry belong to the largest group in a large number of intermetallics with various kind of crystal structures, and have a variation of the cubic CIS, the hexagonal C14 and the dihexagonal C36 structures, depending on stacking sequence of XYZ type, each of which consists of four interpenetrating atomic layers (1-3). Some of the Laves intermetallics have good functional properties and therefore are considered to be used as, for instance, magnetic materials, magneto-optical materials, hydrogen storage materials and superconducting materials (2). Also, the Laves intermetallics are considered to be good candidate as high temperature structural materials operating at high temperatures and in severe environment because they have high melting point, low density, and potential resistance to corrosion and oxidation. However, the Laves intermetallics are very brittle at low temperatures because they consist of complex crystal structures similar to many other intermetallics."

Jan 1, 1996

By J. A. Innes

"""The oxygen, next uniting with the carbon, sent up an ever-increasing stream of sparks and a voluminous white flame. Then followed a succession of mild explosions, throwing molten slags and splashes of metal high up into the air, the apparatus becoming a veritable volcano in a state of active eruption.""IntroductionHenry Bessemer F.R.S(An autobiography, 1905)Thank you Mr Chairman for the opportunity to speak: at this, the opening session of your International Symposium on the subject of ""Injection in Pyrometallurgy"". Judging from the list of papers to be presented over the next three days, the Symposium promises to provide a most valuable addition to our existing knowledge base in what is now an extremely active area of R&D investigations. Whilst we have obviously come a long way since Sir Henry Bessemer's pioneering experiments of the mid-19th century, there is still much for us to learn.Most importantly, the Symposium offers a further opportunity to acknowledge the many significant technical contributions made in this field by the Organising Committee's special guest, Professor Howard Worner - one of this country's most respected research leaders.When first approached to give this talk I had two areas of concern. Firstly, I was not entirely clear just what injection metallurgy was meant to cover. How should the overall scope of this particular subject be defined?My second concern related to Howard Worner himself - a man for whom I have the highest personal regard and who, in fact, played a most influential role in respect of shaping my own career. Having already spoken about Howard's achievements on earlier occasions, I wondered what I could sensibly add.Notwithstanding these personal reservations, I am delighted to be here with you this morning. If my thoughts on the meaning and scope of injection metallurgy appear to be slightly off-course, and if Howard should perhaps recognise some repetition in my remarks, then I hope I can be forgiven."

Jan 1, 1996

By Manoj Kumar, Vinay Kumar, Nikhil Dhawan, Manish Wadhwa

"Electronic waste (e-waste) is a collective name given to discarded electronic devices such as Television, Cellular Phones and Personal Computers. Among the heterogeneous metals present in the e-waste are the base metals: copper, aluminium, nickel, tin, zinc, iron and precious metals: gold, silver, palladium, platinum apart from several hazardous and halogens metals. Hence there is a need to recover these metals from electronic scrap by recycling and then re-use, which can meet large amount of metals demand. Hydrometallurgical processing was employed for the recovery of metals from television printed circuit board (TV PCB). Different lixiviants such as hydrochloric acid, Sulphuric acid, and nitric acid were used to understand the dissolution behavior of copper, iron and lead present in the TV PCB. Effect of increasing concentration of nitric acid was also studied. Selective recovery of tin over 95% in the form of tin oxide was precipitated. The precipitated tin oxide was identified by X-ray diffraction technique. Tin oxide of purity more than 99.9% was obtained.IntroductionThe electrical and electronic industries comprising computers, television, mobiles, etc, which are manufactured utilizing printed circuit, boards, capacitors, resistance, soldering material etc. During production, at the end-of service life and degradation due to the advanced version with latest features generate valuable metallic and non-metallic constituents. European Union Council on waste electrical and electronic equipment (WEEE) has classified these into different categories as listed in Table 1 [Streicher-Porte et al., 2005]. Among these the information technology, telecommunications and consumer equipment constitute electronic waste (e-waste) [EC, 2002]. Almost all e-waste consists of an integrated part of printed circuit boards which is a valuable source of several metals such as copper, tin, lead, aluminium, iron, silver, gold, platinum etc. [Relay et al., 1990]."

Jan 1, 2008

By Gary K. Elliott

Many industrial processes generate hot waste gases which contain particulate pollutants. Conventional clean-up techniques suffer limitations either because collection efficiency is low or because the gas must be cooled before treatment. thereby increasing costs and preventing energy recovery. The application of increasingly stringent environmental legislation to the non-ferrous metallurgical industry is presently illustrating these conventional technology limitations. Low density ceramic media allow filtration to ta,ke place at 'high temperatures and are now rapidly becoming accepted In many industries. This paper reviews experiences with a proprietary low density ceramic filter element. CerafH. It includes consideration of the structure, composition. typical operating and case studies with particular reference to non-ferrous metallurgical furnace applications.

Jan 1, 1992

By K. H. Bech, S. T. Johansen

"The mass transfer at fluid-fluid interfaces due to turbulent agitation is investigated theoretically. In particular a theory is derived for interface stresses due to interface energy and surface renewal. This theory indicates that surface renewal may take place if the geometry is sufficiently large and if surface tension is sufficiently low.By using a model for a typical turbulent structure we compute the interface mass transfer for a stressless interface and a fully interface. Results for the general situation is not presently available. The computed results are used to derive analytical expressions for the mass transfer based on turbulent kinetic energy and free stream turbulent length scales.One important application of the theory is the mass transfer at the electrolyte side of the bath-metal interface in the Hall-Heroult process. For this process we show that mass transfer should be expected to be of the rigid surface type."

Jan 1, 1999

By P. A. Treasure

The EMEW® cell has been developed to overcome a number of inherent limitations in conventional electrowinning technology, particularly the high cost and restricted process windows characteristic of conventional hardware. The technology has been widely demonstrated to achieve high performance for various metals under chemical conditions well outside the limits required for efficient operation of conventional cells. This process flexibility offers significant opportunities for cost savings. in recovery of zinc from primary and secondary sources. The EMEW® technology is now available on a fully engineered basis, as a versatile commercial alternative to conventional electrowinning hardware. Application of the EMEW® cell for recovery of secondary zinc material offers significant advantages to the recycling industry. For example, a selective caustic leach can be used where there are high levels of iron or other contaminants in the target material. The reagent requirement is minimal as most of the caustic is regenerated in the bell and zinc dust that may be required for electrolyte purification is produced in the cell. A high purity zinc powder or cathode is produced in the cell. In the case of acidic zinc electrolytes, the cell is capable of operating over a much wider range of operating conditions than a conventional cell.

Jan 1, 2000

By Ragnhild Aune

In fire refining of copper, the affinities of various impurity elements on dissolved oxygen is of great significance. Further, in the design of oxygen probes in liquid copper, the influence of solute interactions on the activity of oxygen need to be considered in order to evaluate the oxygen concentration in molten copper. The present paper presents a series of measurements of the activities of oxygen in liquid Cu-M-o alloys (where M stands for Mn, Zn, As, Se or Te) carried out by the present group employing the solid electrolyte galvanic cell technique. Extreme care was taken to control the oxygen potentials in the inert gas atmosphere, and to keep the oxygen levels very low in the molten metal. The oxygen content was determined by analysis of the samples taken out from the melt. The results obtained showed that Mn has a strong negative influence on the activity coefficient of oxygen in liquid copper. A similar, but less prominent effect was observed in the case of Zn. Arsenic had no influence on the activity of oxygen in Cu (liq.). Se and Te had slight negative effect on oxygen activities in copper at XO > 10-5, while at lower oxygen levels the interaction coefficients were found to be positive. The results obtained were compared with empirical models for the calculation of interaction coefficients available in literature.

Jan 1, 2003

By Ko-ichiro Ohno

It is recently recognized that the iron reduction and melting as well as the slag separation of a composite of granular iron ore and coal are completed in a very short period of about IO minutes when the composite is rapidly heated up to approximately 1673K. These phenomena are expected to be applied to a new iron-making process. The mechanism of iron ore reduction and iron-slag separation during rapid heating has not yet been revealed and the fundamental research has just started. Carburization of the reduced iron is regarded as one of the most important steps in this process. In the present work, the composite was prepared from four kinds of coal or graphite as a carbon source and electrolytic iron powder as a completely reduced iron ore. The temperature at which the liquid formation and iron carburization occurred was monitored. Direct observation of smelting reduction behavior was made by a confocal laser-scanning microscope combined with the infrared image-heating furnace to clarify the effect of molten ash on iron carburization. It was found that the meltdown temperature of composite became lower as the melting temperature of coal ash decreased. From the observed result, it was presumed that the liquid slag would act as an important media for the carbon transfer from coal to iron. The carburization mechanism during the smelting reduction was estimated as follows. When slag containing iron oxide melted down and contacted carbon, iron oxide in the slag was reduced and the formation of the metallic iron particle as well as the its carburization occurred simultaneously at the slag-carbon interface. Carburized iron particle was carried from slag- carbon to slag-iron interfaces due to the slag convection flow caused by the difference of the interfacial tension between the carbon-slag and iron-slag interfaces. Carburization of reduced iron could proceed with a repeat of the above-mentioned process.

Jan 1, 2003

By Miguel Barron

Recently, a new lance design for BOF steelmaking has been proposed in the literature. This lance, in addition to six peripheral inclined supersonic nozzles, contains a vertical centered nozzle whose oxygen flow is independent from the main oxygen supply. The above authors affirm that their lance maximizes the droplet generation without causing spitting. In this work, the performance of a lance with four peripheral nozzles and one vertical centered nozzle is numerically modeled by means of Computational Fluid Dynamics software. Transient two dimensional computer simulations were carried out considering two phases, namely molten steel and gaseous oxygen. Numerical results confirm that bath agitation and droplet generation are enhanced as a result of the vertical centered nozzle, however a proper performance of this lance, related to a conventional one, strongly depends on the Mach number of the oxygen jets and the lance height.

Jan 1, 2008

By Zhijing Zhang

Sodium borosilicate is the basic composition of coating materials, Vycor and Pyrex glasses. In the present study, viscosities of Na2O-Si02-B2O3 ternary melts were measured under various compositions and temperatures. Experiments were carried out using rotary viscometer and graphite components. Our experimental results were compared with those in literature. Based on present experimental results, the previous structure based viscosity model was modified. The predicted viscosity results are in excellent agreement with the present experimental data in the temperature range with molten state samples. The fitting ranges of the model cover the composition of XB2O3 from 0.1 to 0.6 combined with xSio2 / xNa2O = 0.5, 1,2 and 5 respectively.

Jan 1, 1998

By Christina V. White

An experimental study was undertaken to investigate the feasibility of utilizing vapor transport for the treatment of heavy metal contaminated smelter soils. The focus of this project was to develop process chemistries that would make incineration a viable process for the treatment these soils. The experimentation concentrated on the elimination of arsenic, cadmium, and lead, and was performed in a laboramry scale rotary kiln setup. Three soil samples from non¬ferrous smelter sites, which contained various concentrations of contaminants, were utilized in the experimentation. Three chemistries were investigated for the volatilization of the heavy metals: Chloridizing volatilization, ferric chloride vapor complex formation, and the use of oxygen potential control. The samples were analyzed for residual heavy metals so that the extractions could be determined. However, the ultimate test was the leachability of the residual arsenic, cadmium, and lead, as determined by the TCLP test. The results firmly establish that incineration is a feasible process for the treatment of metal contaminated soils. It was found that no one process chemistry is suitable for all different soil samples. A two-step process consisting of a reducing step followed by a hydro-chlorination step was required to make Soil Sample-B pass the TCLP tests for all three heavy metals. Soil Sample-A passed the TCLP tests for arsenic, cadmium, and lead using a hydro-chlorination process at a minimum temperature of 700°C. In addition to passing the TCLP mm for Soil Sample-A and Soil Sample-B, 70 to 80 percent removal of the impurities was accomplished. This demonstrates that the leachability of the impurities was decreased primarily due to the removal of a large fraction of the contaminants, Soil Sample-C possessed very high levels of cadmium and lead and only moderate extractions of the impurities were generated from this soil. The arsenic TCLP test was passed at 500'C using a process gas containing ferric chloride and at temperatures of 700°C and above using chlorination of hydro-chlorination.

Jan 1, 1996

By M Phil Schwarz

"A CFD model for the gas-side of an impinging jet iron bath reactor has been developed to assist in the interpretation and design of oxidizing gas-melt reaction rate experiments. Heat transfer and reaction at the surface have been included. A free surface model, which solves for the liquid motion within the bath as well as the gas motion above the bath, has also been developed. This model also predicts extent and shape of the dimple formed on the liquid surface by the impinging jet. Both models have been run for conditions typical of jet impingement experiments using CO2 , H2O and O2• The main conclusions are• Results from the model for gas-side mass transport are in good agreement with the empirical correlation of Belton and Belton (1980)• Experimentally determined rates of decarburization by CO2 should be corrected for mass transfer because the experiments are often carried out under mixed rate control, eg for gas flow rate 10 L/min when the sulphur concentration is lower than 0.045• If the rate constant for oxygen reaction is greater than about 5 mol/m2.s.atm, it cannot be determined using a gas flow rate of 10 L/min or lower because of mass transfer control.• A cavity of depth 4.5 mm is predicted for a gas flow rate of 10 L/min and this substantially changes the flow field (and hence reaction rate) compared with a simulation in which the surface is assumed to be flat."

Jan 1, 1999

By S. Malinov, J. J. McKeown, W. Sha, S. McShane

"A model is developed for prediction of fatigue stress life S-N diagrams for Ti-6Al-4V alloy at different conditions, using Artificial Neural Network (ANN). Different factors which have influence on the S-N diagram are involved as input parameters of the NN, namely microstructure, environment, texture, test/work temperature, surface treatment and stress amplitude. As the output the S-N fatigue diagram is simulated and plotted.The model is based on standard multilayer feedforward neural network. The NN is trained with a comprehensive data set collected from the literature, using Levenberg-Marquardt training algorithm in combination with Bayesian regularisation. A very good performance of the trained Neural Network is achieved. Good correspondence between ANN"" prediction and experimental S-N diagrams is observed. Using the model S-N diagrams for different conditions are predicted and analysed. Graphical User Interface is developed for use of the model. We believe that the model will be important for practical applications in solving various problems on fatigue behaviour of the titanium alloy.IntroductionTitanium and its alloys have an increasing range of applications due to their very good combination of mechanical properties, corrosion and erosion resistance. They are currently finding widespread applications in many industries due to their desirable and versatile properties. Most important among the alloys is Ti-6AI-4Y. Jet aircraft manufacturers are the principal 'consumers of Ti-6Al-4V and it is often specified for critical parts, the failure of which could result in the loss of an entire system. A generic class of Ti-6AI-4V has been developed over the past years and it has become the best understood of all the titanium alloys. The advantages of titanium alloys include: (i) low densities, giving very attractive strength to weight ratios allowing lighter and stronger structures; (ii) superior corrosion and erosion resistance in many environments; (iii) high temperature capability. Although the titanium materials are still considered as expensive materials, for many applications the cost of titanium alloys can be justified on the basis of their desirable properties."

Jan 1, 2001

By K. Asokan, K. Subramanian

"Electrowinning of copper by monopolar cells require common anode and cathode busbar and crossbars to connect each electrode to the respective common busbar. On the other hand, the bipolar configuration warrants the end electrodes only to be connected to busbars; there is substantial reduction in copper requirement. In the present work, an electrowinning cell with bipolar electrodes and end electrodes, each having an area of 1000 cm2 was designed and operated. The bipolar electrode is made of mixed metal oxide coated titanium mesh welded to plain titanium sheet. Coated titanium mesh acts as anode and the plain titanium sheet acts as cathode. Environmentally unacceptable lead anode and the recurring loss of lead are done away with. Closer spacing of the electrodes, paves way for the application of higher current density leading to mass transfer enhancement. Performance of bipolar copper electrowinning cell is reported.1. IntroductionThe normally adopted practice in electrowinning of copper is the conventional monopolar configuration. In this practice, the individual electrodes act either as anode or cathode. Hence there is a need to connect every one of the electrodes to the common anode or cathode busbar and crossbars running across the top of the cell are necessary. The common busbar carries very high current which is divided among the individual crossbars and hence has to be thicker in relation to the current load of the cell. The drawback of the need to use common busbars of thicker cross section and the need to have crossbars are obviated in the bipolar configuration."

Jan 1, 2009

By W. G. Davenport

Chapters 19 and 20 examine direcHo-copper flash smelting and flash converting. This chapter compares the two processes and suggests which is likely to be 'the more economic for a given concentrate. It: (a) uses Chapter 19's direct-to-copper industrial oxygen and oil requirements (b) adds the energy required for electric furnace recovery of Cu from direct-to-copper slag (Czemecki et al 1999) (c) combines Chapter 20's, flash converting calculations with Chapter 18's flash smelting calculations to determine their combined industrial oxygen and hydrocarbon fuel requirements (d) adds the energy required to granulate, crush and dry flash smelting matte for the flash converter (e) adds the energy required to granulate and dry flash converter slag for recycle to flash smelting (f) compares direct-to-copper and flash smelting/flash converting in terms of their total equivalent hydrocarbon ener.gy requirements.

Jan 1, 2001

By A. V. Kuznetsov, R. I. Kamkin, V. M. Paretskiy, A. Y. Mamaev, V. P. Bystrov, A. S. Vernigora

"Vanukov furnace technology is an efficient, proven pyrometallurgical injection technology, used extensively in Russia and Kazakhstan for a number of different applications. The technology was most widely adopted for processing copper sulfide concentrates for matte in smelters in Norilsk, Revda (Russia) and Balkhash (Kazakhstan). The following applications also were developed and tested at industrial scale: treatment of sulfide lead and lead-zinc concentrates, laterite nickel ore, production of cast iron, treatment of antimony gold-containing ores, and municipal solid waste. In this paper, current experience of Vanukov furnace application to these technologies is described with a number of general development trends and new areas of application.IntroductionAt the present time, the Vanukov process, developed at the Moscow State Institute of Steel and Alloys at the Department of metallurgy of non-ferrous, rare and noble metals with collaboration with other research organizations, is a highly efficient technological solution for processing different kinds of raw materials. The process was invented by Professor Andrey Vladimirovich Vanukov, whose research work began in 1949. From 1956 to 1975 test runs of the technology were carried out at the smelters in Norilsk and Balkhash. In 1976 a pilot Vanukov furnace was built in Ryazan. Furnace designs was modified to suit the various test programs. A major objective of each experiment was the determination of optimal working conditions for processing different types of raw materials such as copper, copper-nickel, copper-zinc, lead or pyrite concentrates, and materials containing secondary lead and zinc. After the death of Andrey Vladimirovich Vanukov in 1986, this technology and furnaces based on the technology were named after him: “Vanukov process” and “Vanukov furnace”. Today, the following furnaces based on Vanukov technology are either working or were tested at semi-industrial scale: three in Norilsk, two in Revda (Russia) and two in Balkhash (Kazakhstan) for treatment of copper sulfide concentrates for matte, one in Orsk (Russia) for processing laterite nickel ore, one in the Buruktal plant (Russia) for antimony gold-containing ores for antimony oxide sublimates and gold-containing metallic antimony, and one in China for processing sulfide lead and lead-zinc concentrates for production of black lead and zinc-containing sublimates."

Jan 1, 2011

By Daniel Kim, Michael Free, Justin McAllister, Urian Marshall, Shijie Wang

"Cathode impurity levels of electrorefined copper were evaluated based on 1/10* scale laboratory electrorefining tests. Cathodes were evaluated near the top, mid-section, and bottom sections of cathodes on both the set and mold sides and strip and scrap cycles. Slime weights were measured, and slime and electrolyte samples were also evaluated for impurities. Results from these tests have been compiled and compared to evaluate the effects of changes in operating conditions and electrode location on cathode impurities.IntroductionMany types of impurities are commonly found in commercial copper electrorefining anodes. The smelter operations that produce the anodes process concentrates that contain a wide variety of impurities that vary based on the mineralogy of the ore. Most anode impurities are removed during electrorefining. However, a portion of the anode impurities is incorporated into the copper cathode product. The mechanisms by which impurities are transported from the anode to the cathode are not well understood. Some impurities can be transported as anode slime particles to the cathode where they are incorporated into the cathode. Other impurities can be transported as dissolved species that are electrochemically reduced with the copper to become part of the cathode. Although research has been performed on anode slimes and impurities [1-4], there is a need for additional information regarding the relationships associated with electrorefining cycles, electrode faces, local electrode positions, anode impurities and specific cathode impurities. The objective of this study was to evaluate lead, arsenic, and antimony cathode impurity trends associated with electrorefining cycles, electrode faces, local electrode positions, and anode impurities. A variety of techniques including electrolyte filtering, anode heat treatment, high electrolyte arsenic concentration, high arsenic and/or lead in anodes, flocculation of slime particles, and appropriate current density control were used to vary cathode impurity levels. Each test was performed only once for a strip cycle and once for a scrap cycle. Consequently, the results for the individual conditions are preliminary and are not the focus of this study. However, the collective set of data with varying impurity modifying techniques provides a broad range of impurity levels, and the associated trends with respect to lead, arsenic, and antimony are discussed in this paper. Approximately 180 analyses of copper cathode were used to track the antimony, arsenic, and lead impurities. Eighteen anode slime samples were also analyzed for antimony, arsenic, and lead."

Jan 1, 2012

By Jim Hardy, Tim McKnight

"The thermal mass flow controller, or MFC, has become an instrument of choice for the monitoring and controlling of process gas flow throughout the materials processing industry. In the semiconductor industry, these MFCs are used on over 70% of the processing tools. Reliability and accuracy are major concerns for the users of the MFCs. Calibration and characterization technologies for the development and implementation of mass flow devices are described. Sources of inaccuracy in process gas handling are described, and a model to correct for these inaccuracies is outlined. A gravimetric calibrator is described that allows flow sensors to be calibrated in corrosive, reactive gases to an accuracy of 0.3% of reading, at least an order of magnitude better than previously possible. All described capabilities are implemented in a Department of Energy User Facility which is available to industry and universities to test and develop gas flow sensors and controllers and evaluate their performance related to environmental effects, reliability, reproducibility, and accuracy.IntroductionMaterials processing is at the heart of semiconductor manufacturing. To make today's advanced integrated circuits, silicon wafers are subjected to over 200 process steps. Most of these steps involve processes such as etching, implanting, diffusion, annealing, deposition, and lithography (resist deposition and hardening). Often one or more process gases are used to complete the process step. To achieve the quality and performance required in the micro devices, accurate measurement and control of these gases is essential. The Oak Ridge National Laboratory (ORNL), in conjunction with the semiconductor industry, has been working to improve process gas measurement and control accuracy and reliability. Standardized test methods have been developed to characterize and benchmark the performance of mass flow controllers (MFCs), the method of choice for monitoring and controlling gas delivery. Testbeds have been designed and fabricated to produce repeatable and accurate data using these standards. Baseline testing was performed along with development of a unique mass flow instrument, the gravimetric calibrator."

Jan 1, 1997