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By T. Plikas, L. H. Gunnewiek, L. Oshinowo

"Electric furnace smelting is one of the principal unit operations for ferroalloy production, and increased process intensity, improved availability, minimal maintenance and a longer campaign life are common objectives for electric furnace operation in order to obtain favourable economics of production. Furnace designers have continued to develop innovative solutions, e.g., furnace cooling systems, that have allowed these objectives to be realised and CFD modelling plays a key role in the design process. Enhanced understanding of the energy transfer process in the furnace and the ability to develop, evaluate and optimize components of the crucible design to match process requirements are the key motivators for modelling.This paper provides an overview of recent applications of CFD to the design of electric furnaces. The aim is to illustrate what can be done, and identify areas where further work is needed in this field. Examples include furnace bath simulation, crucible cooling system design, taphole design, baking of Soderberg electrodes, off-gas systems, and fume control and building ventilation. It is argued that the trend is for numerical models to become more encompassing while at the same time more accessible, and therefore further improvements in furnace design will be realised with continued and well validated modelling efforts.IntroductionOne of the main processing steps in ferroalloy production is the smelting of ore in electric furnaces. The three-electrode, AC submerged arc furnace is most prevalent method for smelting in the industry, with shielded-arc and DC plasma arc furnaces achieving limited application (1,2). Commercial furnaces range in size from a few megawatts to more than eighty megawatts of supplied power, and operate with the objective of maximising the return on capital invested. Maximising productivity and energy efficiency are two pathways to achieving this objective, through process intensification, increased availability, minimal maintenance, and increased campaign life for the furnace and associated equipment. Concurrently, the need to reduce the environmental impact of metal production by controlling the emission of particulate emissions, greenhouse gases, and other harmful by-products must also be met."

Jan 1, 2004

By P. Kim, M. Tangstad, T. Larssen, R. Kawamoto

The reduction rates of MnO and SiO2 were investigated for various charge compositions. The empirical activation energies of MnO and SiO2 reduction from SiMn slags were calculated between 1500 and 1650 °C under CO atmospheric pressure. The amounts of metal produced at different temperatures were compared, and the Arrhenius plots were described for each slag A, slag B and synthetic slag, which shows that the raw material have significant influence on the reduction rate. The rate of Mn-produced in slag A was faster than slag B despite of the relatively lower driving force. The lower rate constant in slag B implies that other kinetic factors, such as viscosity, affects the reduction rate. The estimated activation energies of MnO were 920, 304 and 975 kJ/mol MnO for slag A, slag B and synthetic slag, respectively. The rates of Si-produced were similar and slow for all slag types. However, the different activation energies of SiO2 between industrial ores and synthetic materials implied that the trace elements can have catalytic effects toward SiO2 reduction in SiMn slags. The estimated activation energies of SiO2 reduction were around 800 kJ/mol for slag A and slag B.

Mar 1, 2017

By G. L. Hundley, D. N. Nilsen

The U.S. Department of Energy investigated the use of liquid-emulsion membranes (LEM) for the selective removal and recovery of metals such as copper and zinc from mine waste waters. This investigation included field tests of a mobile, pilot plant-scale, continuous-flow LEM system. The system was tested at copper mines with solutions containing from 100 to 1,400 ppm Cu, and at a zinc mine with a solution containing 115 ppm Zn. Typical results from the copper tests were >90% copper recovery, and zinc extraction from waste water also was typically>90%. Although all of these waste waters contained high impurity levels, pure products were produced. On several of these field tests, integrated systems were tested that resulted in recovery of metal by-products, selectiv~ precipitation of iron, and polishing to reach discharge targets for essentially all of the contained metals. In addition, some results are included from laboratory-scale tests.

Jan 1, 2000

By Wenbo Luo, Kang Liu, Jilai Xue

"Coal fly-ash(CFA) from thermal power plants is rich in Al2O3, which has great potential as an alternative resource for alumina production. In this work, Alz03 contained in the coal fly-ash was extracted using an acid sintering-leaching process. This process was enhanced by aid of power ultrasound during the leaching. The recovery rate of Al2O3 was increased with ultrasound, compared with the similar process without ultrasound under the identical operation conditions. Leaching temperature can be lowered by about 10-l5°C and the processing time reduced by about 50%. The process kinetics were investigated in details for a better understanding of the fundamentals on the effects of power ultrasound. The obtained results demonstrate the potential application in reducing processing energy and increasing production rate.Introduction Coal fly ash is a typical solid waste generated from coal combustion in thermal power station. Vast amount of CF A accumulation lead to serious environmental problems such as air and water pollution, cropland occupation, radioactive contamination, etc. However, CFA is rich in Al2O3 and SiO2 content, so that it has a potential use as recourses for alumina and silica production [1]. Aluminum industry, especially in China, has made a rapid expansion in recent years accompanying with a large amount of bauxite consumption, resulting a urgent demand to develop secondary alumina resources like CF A to maintain a sustainable development of aluminum industry that faces grim challenge [2].Acid leaching is an efficient technology to use in alumina extraction from CF A. Since the particle of CF A is not naturally existed mineral but was formed in molten state at high temperature, the internal Al-O-Si bonds are so strong to separate alumina from the ash particle. Because of this reason, the direct acid leaching [3-6] operated at ambient temperature has low extraction efficiency, approximate 30% to 40%, which is attributed to self inhibition effect from CaS04 generated by reaction between CaO and H2S04 [7-8]. High pressure leaching can efficiently decompose mullite to release A12O 3 content in the fly ash particles, but this requires autoclave material having strong acid corrosion resistance, high temperature (100°C-300°C) and pressure (1.0MPa-2.SMPa) resistance while its operating security is low and its acid consumption is large [9]. Concentrated acid boil process is conducted at near acid boiling point (200 °C - 300 °C) in 4 mouth flask wrapped by electric heating jacket with high mass ratio of acid and ash to achieve high Al203 recovery rate from CFA. Its disadvantages are similar to the high pressure leaching technology except no-pressure, and also the operating solution at nearly boiling point acid may easily spill and splash with additional acid loss and potential safety hazard [10]."

Jan 1, 2014

By R. T. Seaman

Pressure oxidative treatment of whole ores and/or mineral concentrates is used to leach or liberate metals of value for downstream recovery. Silver, when present, is often lost in processing, precipitating as a cyanide-insoluble jarosite in the residue. Depending on pressure oxidation conditions, the degree of silver loss to jarosite can vary dramatically. Batch bench-scale testwork is often performed to define that loss, and then assess the implications in continuous operations. This paper focusses specifically on the impact of CESL pressure oxidation conditions on silver recovery, and discusses limitations of batch bench-scale testing as well as means of overcoming these limitations to better predict silver recovery in the scale up from bench-scale to continuous operations. Since silver is only partially soluble in both sulphate and chloride media, it will gradually leach and deport to a jarosite as oxidation progresses. When a silver-insoluble anion, for example iodide, is dosed prior to oxidation, there is a marked improvement in silver recovery from batchgenerated residue; however, that benefit is not consistently seen in continuous operations. The difference has been attributed to the dynamic solution conditions in the batch test, specifically the first few moments of oxidation. Using these principles, a predictive correlation has been established between initial leach concentrations of iron and acid and ultimate silver recovery with iodide addition.

By Guo Xian Jian

In this paper, the gas composition calculations on the FeS-H20 system at elevated temperature were performed. The results show that the gas constituents are H20, S02, H2S, Sj, H2, and O2 and the order of the compositions partial pressure is PH2o> PH2 >PSO2 >PSj >PH2S >PO2 when FeS is oxidized into Fe304 and FeO by steam in the temperature of 700°C -960°C, the Claus process occurs with the decrease of gas temperature in the off-gas and the S02 and H2S in the gas are transformed into Sj , the critical temperature for the transformation is 600°C, and conversion percent of Sj is 97% at 330°C,

Jan 1, 1996

By Larry G. Twidwell, Jannette L. Chorney, Bryce D. Ruffier, Katelyn M. Lyons, Daniel W. Gaede, Ryan J. Foy, Jerome P. Downey

The Metallurgical and Materials Engineering Department at Montana Tech is investigating various methods of extracting and refining rare earth elements from mineral ores and concentrates. As part of this research, an elevated temperature “roasting” process has been evaluated as a means of converting the rare earth elements contained in various matrices to bromides as a pretreatment step in preparation for downstream rare earth element extraction and recovery operations. Laboratory and bench-scale experiments have been performed to assess the effects of varying temperature (150 to 400° C), time (1 to 4 h), and the ammonium bromide to rare earth oxide molar ratio (6 to 24) in the roaster charge. The results show that nearly complete bromination of the rare earth oxide is achievable when the roast is performed under optimum conditions.

Jan 1, 2015

By Fumitaka Tsukihashi

Phase diagrams of the CaO-SiO2-FeOx-MgO, Al2O3 systems are necessary for the analysis of copper smelting reactions and sintering process of iron ore. The effect of MgO and Al2O3 addition on the liquidus of the phase diagram of the CaO-SiO2-FeOx system at low oxygen partial pressure was observed. The liquid phase area changed by the addition of MgO and Al2O3 with a changing oxygen partial pressure from 10-8 to 10-3 atm (10-1 to 102 Pa) at 1573K. The effect of Fe3+/Fe2+ ratio on the melting mechanism is discussed.

Jan 1, 2003

By D. W. Lawler

Prior to the manufacture of sulphuric acid in metallurgical plants, the SO2 rich gas from the smelter, roaster, or furnace must be cleaned to removed particulates, volatile contaminants, SO3, and water. Cleaning is accomplished by contacting the. gas with cooled weak acid. The system is designed so that all the contaminants, originally in the gas are captured in the weak acid, which then becomes an effluent from the plant. Historically, the entire weak acid effluent stream has been treated for disposal, with no attempt to recycle or recover any part if it. This is becoming increasingly environmentally unacceptable, and operators must consider better methods of treatment and recovery. In this paper, Kvaerner Chemetics discuss a number of options that allow the contaminants to 'be separated from the acid' value. This will result in an acid byproduct that can be sold or used elsewhere, and will minimize the volume of hazardous byproducts that must be discharged.

Jan 1, 1998

By Leonardo Mota, Felipe Perissé Duarte Lopes, Marcelo Gomes da Silva, Sergio Neves Monteiro, Helion Vargas

"Natural fibers, as a class of material, are attracting the interest of engineering sectors owing to specific advantages such as comparatively reduced cost and lower density as well as environmental benefits associated with renewability and biodegradability. For industrial applications, thermal properties, among others, are required. These are major requirements, especially in the case of an insulating natural fiber. In the present work, thermal properties of the curaua were investigated by photothermal techniques, i.e., the open photoacoustic cell and a method based upon the monitoring of the temperature evolution as a function of time. This investigation, in tum, permitted to evaluate two important thermal properties: the thermal diffusivity and the specific heat capacity of the curaua fibers. Indirectly, by means of simple mathematical relations, the thermal conductivity was also obtained. The results were compared with other materials and characterize the curaua fiber as an efficient insulator.IntroductionMaterials are gaining attention in recent years owing to their benefits for the environment as compared to synthetics. Being biodegradable, yearly renewable and recyclable, the natural planted-based are considered fully sustainable [1]. In particular, their life-cycle, from growing to industrial processing, absorbs as much C02 as it is emitted and makes them neutral with respect to greenhouse gases responsible for global warming [2]. Typical examples of these environmentfriendly materials are the lignocellulosic fibers that have been used in simple items such as ropes, baskets, textile, modest roofing, etc, since the beginning of our civilization [3]. In the past few decades, these natural fibers have been extensively investigated [ 4-1 O] as a possible reinforcement phase of polymer composites in substitution for synthetic fibers. In fact, engineering application of lignocellulosic composites are today in the market, especially in the automobile industry [11-13]. Out of the hundreds available natural fibers, only part of them exhibits superior properties to be qualified for composite reinforcement."

Jan 1, 2011

By Yoshihiko Maeda

It is said that the 21 st century will be an era of the remedy of the global environment. In order to reserve natural resources for the future and to avoid the dispersion of heavy metals after usage and to avoid pollution problems, it is extremely important to recycle heavy metals as much as possible by reasonable recovery procedures. The nonferrous metal industry is expected to play a important role in the recycling of heavy metals that are originally their products. From the depressed metal price experienced in Japan in 1980th due to the sudden change in current exchange rate between US dollar and Japanese yen, one of major nonferrous metal company, Dowa Mining, has diversified its business area not only to the so-called down stream, but also to the environmental business including metal recycling, industrial waste treatment and soil remediation by utilizing technologies and facilities once used or still used for mining and smelting of copper, zinc, lead and precious metals. In this paper some of these applications will be presented.

Jan 1, 2003

By Vinicius Alves Gomes, Jean Igor Margem, Thallis Cordeiro, Frederico Muylaert Margem, Roberto Faria Jr., Sergio Neves Monteiro, Marina Rangel Margem

Natural fibers are attracting the interest of engineering sectors owing to specific advantages such as lightweight and lower cost as well as for their inherent condition of being renewable, biodegradable, recyclable and neutral with respect to CO2 emission. In particular, the fiber extracted from the malva plant stem is nowadays recognized as one of the strongest lignocellulosic fibers. However, the thermal properties of the malva fibers have yet not been fully investigated. The present work had as its objective to investigate, by photoacoustic spectroscopy and photothermal techniques the thermal properties of diffusivity, specific heat capacity and conductivity of a pressed malva fibers sample. The results revealed that these fibers showed a superior thermal insulation capacity.

Jan 1, 2015

By Wei Gao, Qing-cai Liu, Cun-fang Lu, Huimin Zheng, Jian Yang, Chun-ling Yao

"Mercury in flue gas of coal-fired plants was concerned as another serious pollution when sulfur dioxide pollution was controlled now. The adsorbent made from fly ash by thermal precipitation sulfur to remove mercury in fuel gas from coal combustion plant, SEM, BET, TGA and other measurement methods were used to characterize the effect on surface morphology, sulfur distribution and specific surface. High temperature deposition furnace was applied to increase sulfur content in fly ash based adsorbents produced in lab. The study found that sulfur attached to the adsorbent surface, mesopore and microporous structure, increasing its sulfur content of adsorbent. Sulfur was filled in interspace as small molecule S2, S5, increased their surface area and enhanced their adsorption capacity. The specific surface area increased by thermal precipitation sulfur, and specific surface area which increased with increasing temperature.1. IntroductionThe mercury emission caused by human activity has accounted for 10%-30% of total mercury emission all over the world[11, and the emission from coal-fired power plant have a huge proportion of these emission caused by human activity. Active carbon microstructure and surface morphology play an important role in its adsorption capability, which offers the potential for controlling environmental pollutant, such as sewage, fuel gas, atmosphere and et al [2,31, because it is a material with high specific surface area that long been considered as an excellent adsorbent. At present, include activated carbon, fly ash, calcium-based sorbents and other novel adsorbents. The adsorption capacity and production cost were very important in the process of mercury removal by adsorbents, so the mercury removal has focus on developing adsorbents of highly-efficient. In particular, the waste of metallurgical from coal combustion and the others have a significant advantage about the cost, and they have the highly-efficient in mercury removal after modified to enhance their adsorption capacity, such as fly ash of coal-fired. Apart from specific surface area, element content, pore structure, and surface morphology of activated carbon have great effect on its adsorption ability. Compared to adsorbents without modification, active carbon impregnated with other elements, such as chlorine, sulfur, bromine and et al. had more excellent characteristics to remove specific pollutants."

Jan 1, 2011

By Zhendong Tao, Wei Huang, Zhongxi Yang, Hang Guo, Haoran Geng, Jingxiang Yao

"CaSO3.0.5H2O typed Flue Gas Desulfurization (FGD) gypsum is a by-product formed in flue gas desulfuration by double-cycle fluid bed method, its composition is different remarkably from that of gypsum yield by normal desulfuration methods, and few studies using it as cement retarder have been carried out. In this paper, the experimental study using CaSO3•0.5H2O typed FGD gypsum as cement retarder was carried out. The experimental results indicate that, when FGD gypsum is added solely into cement, the retarding action is not satisfactory because of its slow dissolution rate; The composite retarder composed of FGD gypsum and natural gypsum can regulate efficiently setting time of cement over a wide range of addition and rate of both each other, and the mechanical property of cement can be improved significantly.Fire-power plants have discharged a lot of harmful gases such as SO2 etc., which has resulted in serious pollution on the environment. To reduce harmful gas containing sulfur in the flue gas, various flue gas desulfuration (FGD) techniques have been developed. At present, the FGD method used widely is to add desulfuration agents such as limestone powder or other calcareous-contained materials during the coal burning or in the flue gas so that the components containing sulfur react with them to form solid sulfate or sulfite and to be separated from the flue gas by collectors. CaSO3•0.5H2O and CaSO4•2H2O typed FGDgypsum can be obtained respectively by dry and wet FGD process[1,2]. As a by-product of fire-power plant, features of of FGD gypsum and its applications have been paid great attention. Pavel Tesa'rek et al [3] presented in full the characters and properties of FGD gypsum; Zofia Konik et al[4] prepared expansive additive used to cemnent industry by using FGD gypsum and aluminate clinker; A. K. Alva et al [5] investigated the effects of FGD gypsum and fly ash on soil properties and found the growth of seedlings of either rootstock improved significantly in soils amended with FGD gypsum and fly ash. FGD gypsum also can be used in gypsum binders, plasters and plasterboard manufacture [2.6]. C. S. Poon et al [7] investigated the effects of FGD sludge on the pozzolanic reaction of reject-fly-ash-blended cement pastes. Many studies using CaSO4•2H2O typed FGD gypsum as cement retarder has been reported[2,8-12]. Howevere, few studies using FGDG as retarder were reported so far. In present study, the chemical compositon, phase composition, structure and features of CaSO3•0.5H2O typed FGD gypsum have been analyzed, and its application characters used as cement retarder have been investigated experimentally."

Jan 1, 2008

By S. N. Monteiro, J. Alexandre, L. G. Pedroti, D. P. Santos, B. C. Mendes, A. R. G. Azevedo, G. C. Xavier

The glass cutting industry is responsible for generating large quantities of waste, during the stages of cutting and polishing. The disposal of this material generates a cost to the company, thus looking for ways to repackage it, so there is the possibility of incorporating it into the adhesive mortar. The objective of this work is the characterization of waste and assessment of the properties of these mortars, fresh, and check the possibility of their use. As for the characterization, were carried out particle size testing, density and pozzolanic activity, for the fresh state were performed tests of air content, water retention consistency and entrained particular index. Were incorporated 0,10, 15 and 20% of the amount of sand. The results showed that the material on display ha spotential for use in adhesive mortar, with values within the limits stipulated by Brazilian standards.

Mar 1, 2017

By Chao Li, Lim Hongxu, Yuyue Wang, Xie Yang

"A intergrated process of sulfuric acid leaching, sodium chloride leaching, lead chloride crystallization, lead hydroxide synthesis and roasting was carried out for the recovery of lead, cadmium, copper and zinc from lead smelting dust containing various metals. The results showed that the separation of cadmium, zinc and copper from dust could be obtained after sulfuric acid leaching and corresponding leaching rate were 92.12%, 90.25% and 88.26% respectively. The subsequent sodium chloride leaching carried out for lead with optimized parameters as: sodium chloride concentration 250g/L, leaching temperature 90°C, leaching time 2h, pulp density 33g/L, 0.12mol/L CaCh; The lead compounds crystallization rate reached 86.67%, and then transferred into mPbO·nH2O, the product of 98.66% ß-PbO could be obtained through roasting under 502°C. In the end, a feasible method of ß-PbO preparation from lead containing dust was put forward.IntroductionThe pyro-metallurgy flue dust from smelting lead activities are often stockpiled and pose potential environmental risks due to the heavy toxic elements, such as Pb, Cd, As, Cu, Cl, and Zn which are contained in the dust. With the rapid depletion of rich ore resources in recent years, it has become increasingly more financially attractive to recover valuable metals from previously stockpiled dust, while simultaneously reducing the potential of environmental pollution from toxic elements contained in the dust. Nowadays, pyro-metallurgical and hydrometallurgical routes or both combined methods can be developed to treat secondary materials such as lead ash, leach residues etc. By comparison the hydrometallurgical processes are often considered more eco-friendly.Some chloride leaching processes for recovering lead have been employed using either NaCl, or MgC2 and CaCl2, or FeCl3 [1] The effectiveness of the brine leaching method is based on the formation of complex metal chlorides in concentrated chloride solutions [2] Similarly, Other metals such as zinc, cadmium and copper contained in the flue dust are often treated with sulfuric acid, hydrochloric acid, ammonium solution and sodium hydroxide etc. as lixiviants [3] The metals from leach solutions thus has been obtained by precipitation, ion exchange, solvent extraction or replacement [4]"

Jan 1, 2014

By Ryokichi Shimpo, Akio Fuwa

"The process-measurements of copper smelters in Japan were investigated for the summary of the latest technique and for the fundamental study of process control. The smelters investigated are those employing flash smelting furnace and P.S. converter, one reverberatory furnace and P.S. converter, and one continuous smelting converting furnace (M.I. process). Respective process is then considered, consisted of several reactors of different functions. The measurement methods were summarized in each reactor, including the measurement points. The methods of chemical analyses of the samples in each reactor were also investigated.IntroductionAn investigation on the process measurements, chemical analyses, and system control in copper smelters in Japan were carried out for understanding and summarizing the technique of the pyrometallurgical copper smelting operations. The typical seven processes in six copper smelters were investigated in the period from 1985 to 1987. The smelters investigated were Touyo Smelter of Sumitomo Metal Mining Co., Ltd., Kosaka Smelter of Dowa Mining Co., Ltd., Saganoseki Smelter of Nippon Mining Co., Ltd., Tamano Smelter of Hibi Kyodo Smelting Co., Ltd., Ashio Smelter of Furukawa Co., Ltd. and Naoshima Smelter of Mitsubishi Metal Co., Ltd. They include five flash smelting furnace and P.S. converter systems, one Mitsubishi continuous smelting and converting process (M.I. process), and one reverberatory furnace and P.S. converter system.The investigation was performed by making inquiries about the measurements, chemical analyses, system control, and their future prospects to the engineers in each smelter and by summarizing up in each item. The system control and future prospects were summarized in another paper titled ""Process Control Scheme of Copper Smelting Processes in Japan and Future View."

Jan 1, 1989

By Ygor Macabu de Moraes, Jean Igor Margem, Carolina Gomes Dias Ribeiro, Frederico Muylaert Margem, Sergio Neves Monteiro, João Batista Vasconcelos

A natural fiber presents interfacial characteristics with polymeric matrices that favor a high impact energy absorption by the composite structure. The objective of this work was then to assess the Izod impact resistance of polymeric composites reinforced with one or two layers of batt malva and jute fibers. The results showed are markable increase in the notch toughness with increasing layers of mauve blankets and jute.This can be attributed to a preferential debonding of the fiber/matrix interface, which contributes to an elevated absorbed energy.

Mar 1, 2017

By V. B. Telles, J. A. S. Tenorio, J. O. Alves, D. C. R. Espinosa

"The world production of crude steel in 2009 reached 1.2 billion tons. For each ton of steel produced, 150 kg of steelmaking slag and 20 kg of steelmaking dust are generated. These are wastes with considerable production and limited applications, therefore this work studied the recovery of these wastes into useful sub-products. The slag was used as raw material in the production of rock wool (a thermo-acoustic insulator) and the dust was inserted in the iron ore sintering process. Results showed that produced materials have exceptional proprieties, therefore the recovery of these wastes can contribute to decrease extraction of non-renewable resources, reduce the costs and impact of disposals, and aggregate value to the slag and dust.1. IntroductionSteel production using Eletric Arc Furnace (EAF) has grown over 119 million tones in the last years. In 2008 30.7% of all steel produced, was obtained through EAF. In United States of America (USA) the percentage of this process in the production of steel was about 58% in 2008, while in 2000 this percentage was only 47% [1]."

Jan 1, 2011

By Jim Hardy, Tim McKnight

"The thermal mass flow controller, or MFC, has become an instrument of choice for the monitoring and controlling of process gas flow throughout the materials processing industry. In the semiconductor industry, these MFCs are used on over 70% of the processing tools. Reliability and accuracy are major concerns for the users of the MFCs. Calibration and characterization technologies for the development and implementation of mass flow devices are described. Sources of inaccuracy in process gas handling are described, and a model to correct for these inaccuracies is outlined. A gravimetric calibrator is described that allows flow sensors to be calibrated in corrosive, reactive gases to an accuracy of 0.3% of reading, at least an order of magnitude better than previously possible. All described capabilities are implemented in a Department of Energy User Facility which is available to industry and universities to test and develop gas flow sensors and controllers and evaluate their performance related to environmental effects, reliability, reproducibility, and accuracy.IntroductionMaterials processing is at the heart of semiconductor manufacturing. To make today's advanced integrated circuits, silicon wafers are subjected to over 200 process steps. Most of these steps involve processes such as etching, implanting, diffusion, annealing, deposition, and lithography (resist deposition and hardening). Often one or more process gases are used to complete the process step. To achieve the quality and performance required in the micro devices, accurate measurement and control of these gases is essential. The Oak Ridge National Laboratory (ORNL), in conjunction with the semiconductor industry, has been working to improve process gas measurement and control accuracy and reliability. Standardized test methods have been developed to characterize and benchmark the performance of mass flow controllers (MFCs), the method of choice for monitoring and controlling gas delivery. Testbeds have been designed and fabricated to produce repeatable and accurate data using these standards. Baseline testing was performed along with development of a unique mass flow instrument, the gravimetric calibrator."

Jan 1, 1997