Search Documents

By Serdar Aksu, Fiona M. Doyle

"CMP will be an essential process in the production of integrated circuits containing copper interconnects. This study aims to improve our mechanistic understanding of the role that organic chelating agents might play in the reactive slurries used in copper CMP. Copper dissolution behavior in EDTA arid glycine was first examined by producing potential-pH diagrams for the copper-water-EDTA and copper-water-glycine 'systems. The results of potentiodynamic polarization experiments were then considered in light of these diagrams. . In-situ polarization experiments were conducted to gain insight into the electrochemistry of copper during dynamic polishing in slurries prepared from EDT A and glycine.IntroductionCopper has recently started to replace aluminum as the interconnect metal in integrated circuits. Copper interconnection offers faster and more reliable integrated circuits due to its higher electrical conductivity and superior electromigration resistance (1). The damascene method is used to form multilevel interconnects in the manufacture of integrated circuit devices with copper metallization (2, 3). Copper is deposited by CVD or electroplating into vias and trenches etched in the interlayer dielectric (IDL), over a diffusion barrier usually made from titanium, tantalum or their nitrides. Chemical mechanical planarization (CMP) then prepares the wafer for the next deposition step, by removing excess copper and planarizing the surface. During CMP, the wafer is rotated and pressed against a rotating platen covered with a polishing pad. Chemically active slurries containing submicron size abrasive particles (Si02, Al20 3, ceria, diamond, etc.) are applied. Both the mechanical action of the abrasive particles and the chemical action of slurry constituents remove material from the wafer surface. Planarization results because material is removed faster from protruding regions on the surface than from recessed regions. Since CMP can globally planarize .the entire wafer, it has become one of the key technologies for producing integrated circuits with copper metallization."

Jan 1, 2000

By Kandipati Sreenivasarao

Ion flotation is a promising separation process for continuously removing toxic metal ions from dilute process effluents. After treating the effluent with appropriate surfactant(s), the metal- bearing species adsorb onto the surface of rising gas bubbles and can be collected as foams. Suitable collectors have been identified for most of the elements of the periodic table. However, a better understanding of the thermodynamic, kinetic and engineering principles that determine the performance of ion flotation systems would facilitate commercial utilization of this technology. A model system of sodium dodecylsulfate-ethanol has been studied for the removal of Cu (11) from dilute solutions, using laboratory-scale flotation columns. This paper reports the effects of the air flow rate, solution height, foam drainage zone height and col1ector:metal ion ratio on the flotation kinetics, ultimate recovery of metal, flotation product grade, foam losses and effluent quality. Preliminary results for Pb (11) removal are also reported.

Jan 1, 1993

By Seshadri Seetharaman, Nurni N. Viswanathan, Haijuan Wang

"In order to make the stainless steel making process efficient and environment friendly, it is essential to minimize the loss of chromium to the slag phase. With a view to investigate the advantages of using CO2 to attain moderate oxygen partial pressures in the oxidant gas during the decarburizations of stainless steel, the present experiments were carried out to understand the oxidation kinetics of Fe-Cr alloys and Fe-V alloy with gas mixtures containing CO2. In the present work, the oxidation behavior of Fe-Cr and Fe-V was examined by thermogravimetric analysis (TGA). Various mixtures of O2 and CO2 were used as the oxidant gas and the oxidation rate was followed by the weight changes as a function of time.The experiments demonstrated that the oxidation rate is independent of temperature at present experimental situation, but has strongly related to the Cr-content of the alloy as well as the oxygen partial pressure in the oxidant gas mixture. The wetting of alumina by the iron drop and the change of the drop shape during the course of the oxidation were investigated by X-ray radiography."

Jan 1, 2010

By N. Can

Kinetics and mechanism of the chemical interactions between Si3N4 and TiC were investigated by isothermally reacting samples under nitrogen and argon atmospheres at temperatures between 1600°C and 1700°C? The initial composition of the powder compact contained 20, 30 and 40 volume per cent TiC? Kinetic analysis were performed by measuring mass losses and composition of the titanium carbonitride (TiC1-xNx) at predetermined time intervals? It was found that in the Si3N4-TiC system the degree and rate of the reactions increased with increasing temperature and content of TiC in both nitrogen and argon atmospheres? Si3N4 in the presence of TiC was stable in nitrogen atmosphere and the reactions were confined to Si3N4/TiC and TiC/N2 interfaces? At both interfaces interchange reaction occurs by simultaneous diffusion of nitrogen towards the centre of the particle and desoprtion of carbon in the opposite direction resulting in formation of titanium carbonitrides with various compositions? Reaction products under nitrogen atmosphere were B-SiC, TiCl1-xNx and N2? The maximum "x" value in TiC1-xNx was found to be 0?67 under nitrogen atmosphere? Si3N4 was found to be unstable in argon atmosphere in the presence of TiC and dissociated into liquid silicon and nitrogen gas within approximately four hours of reaction time, depending on temperature? The reaction mechanism in the initial stages of the interaction between Si3N4 and TiC under argon atmosphere proceeds similar to reactions under nitrogen atmosphere? However, considerable amount of Si3N4 dissociates within the first half hour? Liquid silicon aggressively attack both TiC1-xNx and unreacted or partially reacted TiC particles through cracks and pores and diffuses into interier part of the particle forming liquid solutions? After this stage, reactions under argon atmosphere proceeded according to Si-Ti-C ternary system?

Jan 1, 1999

By A. P. Paiva

Studies focused on the recovery of precious metals by solvent extraction have recently increased. either to devise suitable solvents or to clarify the involved extraction mechanisms and kinetics. In this work, a comparison of the performance exhibited by triphenylphosphine (TPP), bis-(penty1thio)-ethane (BPTE) and triisobutylphosphine sulfide CI"I'BPS) in the extraction of silver from acidic chloride media is carried out. Extraction and stripping isotherms involving the three extractants are presented together with the results obtained on the selectivity of silver extraction against high contents of iron, copper and lead. Attempts to clarify the mechanism of silver extraction by TIBPS were performed by studying the distribution coefficient dependence on ligand and chloride concentrations. The effect of temperature on extraction and stripping is also considered. The interfacial tension for the system, measured with different concentrations of extractant in the organic phase, is analysed.

Jan 1, 1994

The 15m high Inco flash furnace uptake was designed as a reaction chamber with the objective of destroying the H2S contained in the furnace off-gas by combustion with oxygen at about 1300°C. Until recently, the oxygen required for this purpose was injected through afterburners located at the bottom of the uptake. An undesirable side effect of this practice was the formation of build up accretions on the inside walls of the uptake. This buildup had a negative impact on both the furnace on line time and the control of the flash smelting process. In late 200 I, the afterburners were relocated to the roof of the uptake. As a result, about 80% of the uptake accretion buildup disappeared with obvious beneficial effects for the operation of the furnace. This paper discusses key flash smelting aspects that affect the operation of the flash furnace uptake such as the dusting rate, the formation of H2S in the freeboard of the furnace, and the impact of using coke to supply some of the heat required by the process. The mechanism of buildup formation and its dependence 'on uptake afterburners location are also examined. Prof. Yazawa's sulfide smelting thermodynamic relationships proved instrumental in understanding the conditions that influence the formation and the elimination of H2S and uptake buildup.

Jan 1, 2003

By Carlos G. Levi

"The principles involved in the rapid solidification of supercooled metal droplets and existing numerical models are reviewed. The limitations of these models for studying alloy solidification are discussed in terms of the effects of alloying elements on the relevant heat transfer, thermodynamic and kinetic parameters. Analysis of the enthalpy-temperature diagram reveals how the extent of rapid solidification is hindered by the addition of solute. A solidification model incorporating thermodynamic and kinetic relationships into a Newtonian heat transfer formulation is used to analyze the thermal history and concurrent solute redistribution during recalescence. IntroductionIt is well acknowledged that microstructural evolution during solidification is intimately associated with the thermal history of the liquid-solid interface. Structural parameters like chemical homogeneity, morphology and size scale of the phases can be related to the interfacial temperature and velocity. These in turn change by the interaction of the interface with the thermal and solutal fields in its neighboring environment.The thermal history of powder solidification can be conveniently described on the enthalpy-temperature diagram for a pure metal shown in Figure 1 and discussed in detail elsewhere [1). A system can conceivably follow any path of decreasing enthalpy in the supercooled region of Figure 1 (~ < 1), starting at the nucleation temperature (oN < 0) on the liquid line, and ending at some point on the solid line. A vertical path represents an isothermal transformation, of which a limiting case is solidification without significant barriers to nucleation and growth, with the interface at the equilibrium temperature TM (path one in Figure 1). A horizontal path represents isenthalpic (or adiabatic) solidification whereby the system could form an amount of solid proportional to the initial supercooling of the liquid without further heat loss to the environment. A liquid that can completely transform to solid under adiabatic conditions is said to be ""hypercooled""."

Jan 1, 1986

The generation of acid mine water is? due to the oxidation and weathering of sulfide bearing tailings and overburdens. Ferrite precipitation prooess has been applied to treat acid mine water. The conventional ferrite preC1pitatlon requires air oxidation at high temperature, or long aging time or addition of magnetite powder ,as promoter. In this investigation, a modified ferrite, precipitation process is developed by which magnetic ferrite can be produced at an ambient temperature. Acid mine waters from Berkeley Pit (Montana, U. S. A.) and from Noranda Tailings (Quebec, Canada) were used. The co precipitation of heavy metals from these two acid mine waters is studied as a function of FeIM molar ratio, oxidation time and settling rate under applied magnetic field. The investigation indicates that the modified ferrite co precipitation can remove substantially all of the, dissolved metal ions from acid mine water. The ferrite product obtained after precipitation&apos; is characterized by XRD, SEM, BET and saturation magnetization. The results show that spinel ferrite, precipitation can be achieved at room temperature and the saturation magnetization of ferrite product from,acid mine water is comparable to that of pure ferrites.

Jan 1, 1995

By W. G. Davenport

All Outokumpu flash furnaces burn some hydrocarbon fuel. Hydrocarbon combustion supplements heat from Fe and S oxidation and provides local heating in cool; parts of the furnace. Adjustment of hydrocarbon fuel combustion rate is an effective way of controlling furnace temperature. More oxygen and more oxidation of Fe?and S in the flash furnace continue to diminish the need for1hydrocarbon fuel. Still, as Tables 2.1 and 3.1 show, all flash furnaces use it. Oil is the most common fuel -natural gas, coal and coke are also used. This chapter demonstrates how hydrocarbon fuel is included in our flash furnace matrix. It shows that: (a) three new variables, mass hydrocarbonfoel. mass CO2 in offgas and mass H2O in offgas are inserted (b) carbon and hydrogen balances are added (c) hydrocarbon fuel quantity is specified (d) ,the oxygen balance is modified to include CO2 and H2O (e) the enthalpy balance is modified to include hydrocarbon fuel, CO2 and H20.

Jan 1, 2001

By Nobuhiro Kuriyama

Electrochemical activation behavior of an AB2-Laves-phase type hydrogen storage alloy, Zr0,9Ti0.lNi1.lCo0.1Mn0.6V0.2 was studied to make clear activation process of pellet-type metal hydride electrodes. An alkaline treatment of the electrodes with heated alkaline solution gave alloy surface enriched with nickel, and the treated electrode was more easily activated. The treated electrode desorbed more hydrogen during the first charge-discharge cycle, and was activated without induction period. A cross sectional view of the activated electrode showed finer pulverization of alloy particles than the annealed alloy, and impedance spectroscopy indicated larger surface area of the electrode using the as-cast alloy. Since the as-cast alloy contains inhomogeneities, multi-phase microstructure and stress in the particle, the finer pulverization of alloy particles with hydrogenation are considered to increase surface area in an earlier cycle in the case of the as-cast alloy, which leads larger reaction area and faster activation of the as-cast alloy electrode.

Jan 1, 2002

By Kazuki Morita

Dissolution mechanism and solubility of chlorine in the oxide melts, such as CaO-SiO2-Al2O3 (-Na2O), Na2O-SiO2-Al2O3 and CaO-SiO2-FeO systems, have been equilibrium technique was employed with controlled Po2 and PCl2, (Po2 = 10-6 -10 19 atm, PCl2 10-6 -10-13 atm at 1673-1748 K). The solubility of chlorine in the 40mass%CaO-40mass%SiO2- 20mass%Al2O3, slag was found to vary in proportion to Pb2/ w and pc/z/p&apos; which proved that chlorine dissolved in the melts as C1 anion. Hence, the chloride capacity (CCI-), indicating the ability of molten oxide to absorb chlorine, has been defined as; The Ccl value was observed to increase with increasing slag basicity and temperature, and showed a reasonable relationship with that Of CS2-. Based on the result obtained in the present study, chlorine distribution during incineration with slags was predicted quantitatively.

Jan 1, 2003

By Ken-ichiro Uemura

"The DIOS process has been developed for eight years since 1988. The research project was started with the element studies carried out by each of the five integrated steel making companies in Japan, the final two and half years were spent for the pilot plant studies. Operation were conducted in the entirely closed and pressurized system successfully as planned. From the result, the DIOS process was proved to be viable as a future iron-making process substitutable for the conventional blast furnace. In addition, a lot of findings were obtained. Hot metal productivity was primarily determined by a oxygen flow rate, and a coal consumption varied depending on the productivity. The post combustion ratio was a little lower than expected from the result of the element study. It was supposed to relate the gas-reforming with coal or volatile matter in the free space of the furnace. Hot metal carbon content seemed to depend on the char content in slag.INTRODUCTIONThe JISF's DIOS pilot plant (DIOS=Direct Iron Ore Smelting Reduction Process) has finished its last campaign of the operations in January 1996. The project was started in 1988 as a joint research of the Center for Coal Utilization, Japan and the Japan Iron and Steel Federation (JISF) with a subsidy for promoting coal productions and utilization technologies from the Agency of National Resources and Energy, the Ministry of International Trade and Industry(MITI). Throughout the pilot plant test, a total of over 20,000 tons of hot metal was produced for more than 2,000 hours of the operation. Recorded production rate was 538 ton/day for 3 days at a specific coal consumption of approx. 1,000kg/hmt. Long-term operation was carried out in the fifth campaign for 18 days, which has proved that the entirely closed and pressurized DIOS process works well as planned. In Figure 1 is shown the representative operational performance obtained in the first five campaigns. The project is going to be finished by the end of March this year after investigating the technical viability and economic potential of the process, and completing the conceptual design of the DIOS commercial plant. In this paper, the system and facilities of the DIOS process are first introduced and some of the results of the pilot plant test are detailed later."

Jan 1, 1996

By Tatsuzo Kitamura

The tank house of Tamano refinery, that started its operation in January, 1972, was constructed incorporating the application of Periodic Reverse Current (P.R.C.) from the outset of design works. In 1973, the production of electrolytic copper came up to 8,000 mtpm, a sharp increase ds compared with the designed capacity of 7,000 mtpm, and successful operation has been achieved up to the present. P.R.C. has been employed for the purpose of raising productivity level and reducing copper inventories. Since there were various problems in P.R.C. application to such a large sized cathode as 1 m x 1 m, special attentions were paid to the following items: -Development of a unique bus bar to make an electrolytic current to each electrode as uniform as possible. -Improvement of circulating method of electrolyte. -Application of high-performance equipment to realize a uniform spacing between anode and cathode. Owing to these creative technical developments mentioned above, technical level for operation up to 350 amp per sq m of cathode current density has been established. The quality of electrolytic copper, which was a matter of interest, has been proved to be as excellent as those of conventional electrolysis products through a long term supply to the field of SCR and Dip forming where high levels in quality are required.

Jan 1, 1976

By Yousef Mohassab, Feng Chen, Hong Yong Sohn, Mohamed Elzohiery

The determination of reduction degree in a DR process is sensitive to the total iron in the ore and DRI. An accurate and high throughput analysis method for total iron has been developed. Titration of the solution after tin(II) chloride reduction of ferric ion is a widely used method for iron analysis. However, it is a multistep method that requires many chemical reagents and much time. In this work, an ICP-OES analysis method with higher or equivalent accuracy compared with the titrimetric method was developed. This method has much higher throughput and demands fewer chemical reagents compared with the titrimetric method. In this paper, a comparison of the two methods is presented.

Jan 1, 2016

New method for processing of copper and nickel production feed has been developed and tested at pilot unit having 10 t/hr capacity. The process allows single-stage treatment of ore feed including that with high magnesium oxide content and resulting in the production of rich matte, high-grade matte, or moralised alloy for further leaching, as well as dump slag and off-gasses suitable for production of elemental sulphur, liquid sulphur dioxide, or sulphuric acid. Tests results and principal technical and economical parameters are presented.

Jan 1, 2006

By D. W. Collins

The uptake of gold from halide solutions by activated carbon has been investigated using various techniques. Halide systems typically exhibit combined adsorption-reduction type behavior. In an attempt to gain more information about the nature of these processes, samples of synthetic highly-oriented pyrolytic graphite (HOPG) were contacted with aqueous solutions of gold-iodide. HOPG represents a model structure for activated carbon comprising of basal- plane sites, edge sites, and various defect sites. Two basic instrumental methods were used to examine the uptake of gold by HOPG. The first was standard X-ray photoelectron spectroscopy (XPS). The other involved several scanning probe techniques. XPS clearly indicated a preferred uptake of gold at edge sites. However, iodine appeared to be distributed on both basal-plane and edge sites. At low iodine additions, tapping mode AFM showed that clusters were concentrated along steps and surface defects. At high iodine concentrations, the HOPG surface was uniformly covered by iodine.

Jan 1, 1998

By J. E. Klein

Bench scale tests using a stack of ten whole SAES St909 pellets, 6 grams, to crack methane have been completed with pure methane feed. Test conditions ranged from 600 to 800°C at 101 kPa (760 ton) with a methane feed rate of ten sccm. Methane reformation tests, test where hydrogen was passed through a St909 bed after cracking methane, were performed to determine if and how much methane can be generated under "reformation" conditions. Phase structure determinations of St909, composed of a ZrMnFe alloy with aluminum used as a pellet binder, after methane cracking were complicated by the number of materials that can be formed by the elements in the St909 and the carbon from methane cracking. It was determined that the aluminum not only alloys with the Zr, Mn, and Fe in the St909 alloy, but also forms aluminum transition metal carbides in addition to ZrC as the carbon content and the temperature of the St909 increases. Some A14C3 was also found in some pellets. Passing hydrogen over St909 pellets after methane cracking formed methane at various rates in the temperature range of 600 to 800°C. Temperatures of 800°C gave the best methane cracking performance and efficiencies decreased rapidly with temperature.

Jan 1, 2002

By Zhuoqing An, Qi Li, Zhancheng Guo, Yanling Zhang

Fluidized bed is an important iron-making reactor, especially for the finely sized iron-bearing materials. However, defluidization caused by sticking between particles extremely limited its wide spread commercialization. In this paper, apparent viscosity was put forward to express the ability of particles to resist movement, which is reasonably considered as the comprehensive results of interaction between particles. Meanwhile, an experimental measuring method of apparent viscosity of particles was proposed, during which the torque exerted on the rotating blade in a particle layer is measured, and then the apparent viscosity is obtained based on the motion equations of powder particles. Further, the apparent viscosity of iron particles was measured by using of this method, and the effects of shape, size, and temperature were examined. The data can provide important information for understanding when and why defluidization happened.

Jan 1, 2015

By Robert Vidal

A model of the homogeneous chemistry and transport processes within the separator of a chrome-alum electrowinning cell is introduced, discussed, and compared to experiment. The influence of diffusion, electromigration, and convection are included; it is found that convection was the dominant mode of transport for the experimental conditions. Simulation results explain experimental observations concerning an apparent disappearance of dichromate ions produced at the cell anode. The relation between potential drop across the diaphragm and the current and fluid flow is also illustrated. The model is used to recommend future experimental and theoretical work.

Jan 1, 1994

By V. Ramachandran

In view of the increasing environmental regulations that have been promulgated in the last 30 years, non-ferrous smelters and refineries have learnt to handle effectively the process waste streams that need to be bled from the system for impurities&apos; control. The cations of concern are copper, lead, zinc, cadmium, mercury, thallium, nickel, silver, sodium and potassium. Anionic species of arsenic and selenium also need to be addressed, Sulfates and chlorides-not a major concern at present-have come under scrutiny in the recent past. The current paper reviews several treatment options with reference to a) types of waste streams processed b)process chemistry c )discharge options and recovery of treated water and d) sludge disposal. The long term goal of any smelter and/or refinery should be to achieve zero liquid discharge from the plant. Methods to obtain zero discharge are discussed.

Jan 1, 2003