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Jan 1, 1920

By M. E. Wadsworth, R. L. Pearson

THE dissolution of UO, in carbonate solutions can occur only il the tetravalent uranium is oxidized to the hexavalent state. The carbonate system is of particular interest because it provides a means whereby the oxidized uranium may be dissolved by forming the complex ion UO,(CO3)3-1. In the presence of oxygen the over-all reaction may be written UO+1/2O,4CO3T+2HCO2UO,(CO4)11+H2O [1] UO, was used in this study because it could be obtained in high purity and also because it is representative of the most refractory of the primary uranium minerals. The mineral ulrichite is the natural counterpart of the synthetic UO, used. The kinetics of the leaching of UO, should be similar for any of the uraninite type minerals. A pressurized system was used not with the hope it could be extended to commercial systems as a primary purpose but simply to provide the means whereby important temperature and pressure parameters could be varied for the evaluation of the kinetic processes. The importance of such pres-

Jan 1, 1959

By E. C. Kersey, R. J. Gennone

MetALLOGRAPHIC investigations of composites of zinc alloys and aluminum have been made to study the effects of various thermal treatments on the zinc-alloy grain size and diffusion of zinc into the core material. The use of various alloys of zinc has necessitated the development of a universal etchant which will allow microscopic examination of the zinc grain size regardless of the composition.

Jan 1, 1960

By Tormod Forland

FROM equilibrium measurements on the system NaF-Na 3A l Fo-A 1 2 O 3-Na CO 3-CO 2 with high contents of NaF, Forland, Storegraven, and Urnesl concluded that complexes are formed containing two oxygen, three aluminum, and a less defined number of fluorine per complex. The same number of oxygen atoms per complex was also found by cryoscopic measurements for mixtures high in NaALF 6. In a recent paper by Stokes: some other complex ions, Al2O2F42- and AlOF2-, have been suggested. Here an additional argument in favor of the complex ALO2F. suggested by Forland, Storegraven, and Urnes will be given. When fused Na3AlF6 containing some A12O3, is cooled slowly, the solid phase will consist of the two components as separate phases. The melting point and the heat of fusion of Al2O3 are so high that this component will form the stable solid phase even though in the liquid state the complex may have a high stability. If, however, the fused mixture is quenched, the decomposition of the oxygen-containing complex and the formation of solid Al2O3 does not proceed fast enough, and a solid solution of A12O3 in Na3AlF6 is obtained. Zintel and Morawietz3 obtained cryolite containing 10 pct AL2O3 in this way. The density and the lattice parameters of the A12O3 containing cryolite were also measured, and from this it was concluded that the Al2O3 enters the cryolite lattice as Al3AlO0 groups replacing Na3AlF6 groups. However, the experimental data could as well be explained by assuming that one Na+ ion and two of its neighboring F- ions are replaced by one Al3+ ion and two O2- ions. This may be pictured schematically as: F F F F F F F Al F Na F Al F ,-Na+ + Al8+ F Al 0 A1 0 A1 F F F F —2 F- + 2O2- F F F solid cryolite cryolite-alumina solid solution This means that the complex in the solid solution, derived from X-ray and density measurements, is the same as that which Forland, Storegraven, and Urnes derived from equilibrium measurements in the liquid state. References IT. Forland, H. Storegraven, and S. Urnes: Ztsch. fur anorgan-ische und allgemeine Chemie, 1955, vol. 279, p. 205. 2J. J. Stokes: AIME Trans. To be pubhshed. s E. Zintel and W. Morawietz: Ztsch. pubhshed.fur anorganische und allgemeine Chemie, 1939, vol. 240, p. 145.

Jan 1, 1958

By C. Schlumberger

SINCE the beginning of .the year 1928 the senior authors and their associates have applied a series of procedures which makes possible the detailed study in situ of the formations traversed by a drill hole before the casing has been landed. They have given the name "electrical coring" to the ensemble of these processes, which now replace in a large measure the mechanical coring performed by the drillers, and permit the gathering of bottom-hole data hitherto unobtainable. Three years have elapsed since the technique and interpretation of these measurements emerged from the experimental stage and entered the field of industrial application on a large scale. The total length of drill holes so far surveyed by the authors and their associates, all over the world, amounts to several millions of feet. Practical and strongly built equipment has been evolved, which permits the examination in a short time of an open hole several thousand feet long. No comprehensive paper has yet been published discussing the essential principles of the processes applied and bringing into evidence their economic interest. This is the object of the present paper.1 Numerous examples of field work performed under varied geological conditions are given, constituting a concrete illustration of the services rendered by the new methods. The study in situ of the formations penetrated by a drill hole is based on the measurement of a given physical factor or parameter associated with these formations. Generally. the measurements are made syste-matically along the whole length of the open hole. The physical factors or parameters which are now utilized by us to this end are: (1) the resistivities of the rocks; (2) their porosity; (3) their electrical anisotropy; (4) their temperature; (5) the resistivity of the muds. In order to

Jan 1, 1932

By E. G. Leonardon, C. Schlumberger, M. Schlumberger

Since the beginning of the year 1928 the senior authors and their associates have applied a series of procedures which makes possible the detailed study in situ of the formations traversed by a drill hole before the casing has been landed. They have given the name "electrical coring" to the ensemble of these processes, which now replace in a large measure the mechanical coring performed by the drillers, and permit the gathering of bottom-hole data hitherto unobtainable. Three years have elapsed since the technique and interpretation of these measurements emerged from the experimental stage and entered the field of industrial application on a large scale. The total length of drill holes so far surveyed by the authors and their associates, all over the world, amounts to several millions of feet. Practical and strongly built equipment has been evolved, which permits the examination in a short time of an open hole several thousand feet long. No comprehensive paper has yet been published discussing the essential principles of the processes applied and bringing into evidence their economic interest. This is the object of the present paper.' Numerous examples of field work performed under varied geological conditions are given, constituting a concrete illustration of the services rendered by the new methods. The study in situ of the formations penetrated by a drill hole is based on the measurement of a given physical factor or parameter associated with these formations. Generally the measurements are made systematically along the whole length of the open hole. The physical factors , or parameters which are now utilized by us to this end are: (1) the resistivities of the rocks; (2) their porosity; (3) their electrical anisotropy; (4) their temperature; (5) the resistivity of the muds. In order to

Jan 1, 1934

By J. J. Jakosky

A REVIEW of the progress in applied geophysics during the recent depression years reveals marked advances "over the methods employed several years ago. Of late, geophysical work has been curtailed to a con-siderable extent in the fields of oil and base-metal exploration, its especial domains a few years ago. Greater attention has been directed toward the use of geophysical technique in other engineering problems. Constantly maintained research programs have developed new instruments and per-fected better field, laboratory and interpretation techniques based on experience and skill acquired from years of application in the older geophysical field. During the past two years, geophysical methods have been employed in problems that required information on thickness of fill materials and subsurface bedrock contours. Considerable success has been attained, with subsequent drilling checking the predicted depths within one to five per cent. In general, these problems were similar as far as the fundamen-tal physical and geological conditions were concerned, but they have varied widely in specific detail and in engineering aspects. Character-istic of the different problems are: (1) yardage and bedrock profile in gold-placer mining; (2) water supply, involving underground drainage and storage conditions; (3) bedrock contours in dam-site and other structural investigations; (4) gravel and fill yardage, and other structural features along rights of way and in rock and gravel quarrying. Of particular interest, perhaps, to mining men are the problems of gold placer deposits and water supply. Geophysical work on gold placers is of especial interest because of the present expanded activity in all phases of gold mining. The development of a suitable water supply at, an economical cost is often of prime importance in insuring a successful mining venture. Particularly is this true in the arid Southwest. How-ever, the use of geophysical work in water supply is not confined to the needs of mining development.

Jan 1, 1933

By J. B. Davis

This paper has been prepared at the suggestion of Mr. Dunbar D. Scott, to supplement his " Evolution of Mine-Surveying Instruments."† Before entering into a detailed history of solar instruments, a few remarks will be made touching upon land-surveys in general, and on what has led to the development of these instruments.The oxidation of metals melted in contact with air takes place with dissimilar results. Tin, lead or zinc are examples of a class, the oxides of which float on the surface of the melted metal. First a film is produced, which covers the surface; then, if agitation from any cause exposes new metal to the action of the air, additional oxidation takes place, and the film is increased in volume. This change goes on until a considerable quantity of oxide (or " dross," as it is technically called) is formed; depending, of course, upon the duration of the exposure of the metal to the atmosphere. When such metals are poured, the dross may be skimmed off; and clean metal will be left underneath. The removal of such oxides is, therefore, merely a mechanical process. In the case of copper, however, the result is quite different. The sub-oxide of copper (Cu2O) is readily soluble in molten copper; and therefore, instead of the formation of a film of oxide, to be finally removed as dross, the surface of the metal remains bright and clear, because the oxide has been dissolved as soon as it was produced. It is customary in the process of copper-refining to leave a small quantity of oxide in the metal, in order to oxidize any traces of bismuth, arsenic or antimony which have not been entirely removed. As a result, these metals exist in the commercial product as oxides, and not as metals, which would form an

Jan 1, 1901

By Royal B. Jackman, Carle R. Hayward

Two comprehensive papers have appeared regarding the forms of copper that occur in smelter slags, one by Frank E. Lathe1 and the other by C. G. Maier and G. D. Van Arsdale.2 These authors comment on other published results and draw conclusions from their own investigations. The development of X-ray examination of minerals and improvement in high-power microscopic methods make it possible today to get additional evidence by means that were not available to earlier investigators. The present work was confined to reverberatory slags obtained from five different plants. Some definite conclusions were reached regarding the forms of copper present in these slags. In most cases these agree with some of the findings of Maier and Van Arsdale but new methods of attack were used in the investigation. Conclusions of Previous Investigators Various important conclusions reached by previous investigators are summarized in the following paragraphs, arranged chronologically. William A. Heywood:3 Slag losses increase with grade of matte but with the same grade of matte losses decrease as the acidity of the slag increases. Lewis T. Wright:' Slag losses are only partly due to prills of matte. It is suggested that part of the copper is dissolved in the slag. J. Parke Channing9 A considerable part of the copper enters the slag as silicate or oxide and not as sulfide. C. A. Grabill:6 Slag losses are both physical and chemical. Physical losses, due to poor settling, gas flotation and slight differences in specific gravity, are small under normal conditions. Chemical losses may- be due to formation of oxides or to solution of metals and sulfides. The last is considered the most important. John W. James:' The copper in converter slag is largely the oxide and as such enters the reverberatory slag when converter slag is added to the charge.

Jan 1, 1934

By M. P. Dalton

THE problem at the Morning mill is to separate the galena, which contains a great percentage of the silver, from the sphalerite, making each into a commercial product. The ore as received from the nine is dumped into hopper-bottomed bins of 1200 tons capacity. These are divided into five sections, the first section being the regularly used section and the re-mainder used as a reserve bin. The ore is first passed through a 9 by 15-in. Blake jaw-crusher with an opening of 4 in. This allows a ham-mer head to pass through without damage. The crusher discharges to a conveyor that delivers the ore into a two-section punched-plate trommel screen with 1 ½ and 2-in. openings. The undersize is carried by means of conveyors to the mill bins. The oversize passes over a shaking feeder and through a spray or high-pressure water to a picking-belt, where waste and crude ore is hand-sorted. About 4 per cent of the ore by weight is picked out as waste, assaying about 0.6 per cent lead, and this is discarded over the dump. About 4 per cent of the ore by weight is removed as crude ore, assaying 10 oz. silver, 30 per cent lead, and S per cent zinc, and is shipped direct to the smelter. The remainder of the oversize from the picking-belt is con-veyed to a 4-ft. Symons cone crusher with 1-in. opening, which is interesting as a new introduction in this dis-trict. The machine consumes approximately 40 hp. and the pinion shaft travels 555 r.p.m. The horsepower is rather high, but the machine has an extraordinarily large capacity, and, due to the unique construction, there is no danger of tramp steel causing any damage, as in that case the discharge "opening" is automatically

Jan 7, 1927

AT THE beginning of May the German government offered to the French and Belgians the payment of 30 billion .gold marks as indemnity, accom-panied by rather involved terms, among which was the ability of the Germans to finance the foreign loan. This offer was promptly and summarily refused by the French and Belgians. Since then there have been more palavers between the two parties, while the occupation of the Ruhr continued without especial incident, except some socialist riots and workmen's strikes. The renewed conference between the Allies and the Turks at Lausanne continued, without apparently getting anywhere. The Turks demanded an indemnity from the Greeks, which the latter refused to pay, threatening a resumption of hostilities rather than to do so. A. Bonar Law, the British premier, resigned his office soon after the middle of May, owing to poor health. The King appointed Stanley Baldwin as his successor. This. Attainment to the premiership of Great Britain by a business man is a noteworthy event. It is, moreover, to be remarked that Mr. Baldwin is personally acquainted with America and is well known to be a friend to Americans. The Irish rebellion came to an end. Economically there was some improvement in the situation in Great Britain during May, which was reflected in diminution in the number of unemployed. Nevertheless the aggregate of the unemployed in Great Britain continues at a very high figure. In Germany there has been an increase in the number of unemployed ever since the French occupation of the Ruhr, which naturally has been choking German industry. Previous to this the percentage of unemploy-ment among German workers had been low ever since the Armistice. A noteworthy domestic event was the non-stop flight of an airplane, May 2-3, bearing two aviators from New York to San Diego, California, in about 27 hours.

Jan 5, 1923

By Louis Jordan

THIS paper presents in an abbreviated form the chief points of interest in an investigation of the tarnish-resistant qualities of silver alloys, an investigation which has been carried out as a joint research by the Bureau of Mines and the Bureau of Standards and will later be reported in detail in an official publication from these bureaus. In 1923 a Commission of Gold and Silver Inquiry was created by a Resolution of the U. S. Senate to study the causes of the depressed condi¬tion of the gold and silver industry. In cooperation with this commission the Bureau of Mines made a preliminary survey to determine in what ways, if any, it might be possible to increase the uses of silver. One of the possibilities indicated by this survey was the development of silver alloys which should be non-tarnishing, or at least less-tarnishing, than the usual sterling silver (copper-silver). The preparation of a rather wide variety of silver alloys and the determination of their behavior under accelerated tarnish tests in the laboratory was therefore undertaken by the bureaus, of Mines and Standards as a joint investigation. PREVIOUS WORK ON TARNISH RESISTING SILVERS At about the time this work was undertaken interest in tarnish-resisting silvers was rather keen due to announcements from England that there had been developed a new silver alloy, "Silanca," which was resistant to tarnish. It was even frequently described in the popular press as "non-tarnishing." A few samples and several analyses of "Silanca" which were available indicated that it was an alloy of sterling fineness, that is, it contained about 93 per cent. of silver, with approximately 4.5 per cent. of antimony and either cadmium or zinc, or both, to make the remaining 2.5 per cent.

Jan 1, 1927

Jan 1, 1918

By Eugene Guccione

For at least a decade, the energy crisis was accurately predicted by a small number of industry people who were ignored until last year, when they suddenly found themselves accused for their "lack of planning" and "greed." With the worsening shortage of natural gas and oil, the current scramble is for alternate energy sources-which means: a big rush into coal and uranium mining. (Some big plans are also on the drawing boards regarding geothermal steam, oil shale, tar sands, and even solar energy. But developing such new industries from scratch would be difficult enough even in a healthy economic climate-which is not exactly what the country currently enjoys.)

Jan 8, 1974

By G. W. Healy, L. F. Sander

was investigated by reacting thin discs of calcium oxide with gas mixtures of CO2, CO, and Son. Its value was 19,300 * 300 cal independent of temperature in this range. No solid solubility of sulfur in calcium oxide was detected within the limits of the experimental method and it is estimated to be below 0.025 pct by weight. The importance of lime in desulfurization is well-established but complete information on the pure phase equilibrium: CaO + 1/2 s2 = CaS + +02 [11 is not yet available. The goal of this work was to evaluate solid solubility of CaS in CaO and to determine the free-energy change associated with Reaction [I] at temperatures of 1400" to 1650°C. The equilibrium constant for Reaction [1] can be written: It is convenient to rewrite Eq. [2] in the form: where A = {Ps /PqJ1'2 has been referred to' as the "sulfurizing power' of a gas mixture. In this work, thin discs of CaO were suspended in a vertical tube furnace and exposed to CO + CO2 + SOz gas mixtures having known values of A. The samples were then analyzed for sulfur. As expected, X-ray diffraction confirmed that CaS was the only sulfur-bearing phase formed at the relatively low oxygen pressures used. EXPERIMENTAL PROCEDURE Reagent-grade CaCO3 was pressed in a 3/8-in.-diam pill die and prefired in air to produce CaO discs weighing between 0.004 and 0.01 g. Several discs were used to provide a suitable weight for chemical analysis while maintaining a large surface area to react with gas mixtures. These were placed in a platinum mesh basket and suspended in the gas stream in the hot zone of a vertical tube furnace. Desired gas mixtures were prepared from cp grade CO and CO2 and anhydrous grade SO2. The method of soap bubble displacement was used to calibrate capillary flow meters. While this gave excellent results with CO and Con, some problems with bubble insta- bility and soap film "drag" arose with the use of SO2 at low flow rates. Hence, frequent sampling and analysis of gas mixtures was carried out to insure proper control of the ingoing SOZ. The furnace used for gas:solid equilibration was a vertical mullite tube externally wound with 60 pct Pt-40 pct Rh wire having a diameter of 0.028 in. An inner tube of $ in. ID served as the reaction chamber having Pyrex ground joints sealed to the mullite to provide gas-tight connections at top and bottom. A Pt-Pt 10 pct Rh thermocouple was inserted into a protection tube adjacent to the sample basket to measure sample temperature during a run. Constant-temperature control to 2C was observed at any desired set point within the range of this investigation. This was accomplished by a control thermocouple imbedded in the furnace windings which served to actuate an electronic controller wired for high-low operation. The sulfur analyses of the solid samples were carried out using a stoichiometric combustion technique based on the method of Fincham and Richardson. Some analyses were done using a modified evolution method3 but these were used primarily to check the results of the combustion method. The results were in good agreement but the combustion technique of-ferred an advantage in economy of time and material. CALCULATION OF GAS EQUILIBRIA Heating a given mixture of CO + CO + SO2 to high temperatures gives rise to a large number of product species. The details of calculating the partial pressures of these products of interaction and dissociation can be found in several references4,5 and need not be repeated here. The thermodynamic data selected for the major species in the gas mixtures are shown in Table I. Equilibrium constants from these reactions were combined with oxygen, carbon, and sulfur balances and a computer program written to facilitate the calculations. Some early difficulties in reproducing experimental results were finally traced to the effect of atmospheric pressure changes. No reference to consideration of this question had been found in the

Jan 1, 1969

By J. T. Ryan

WITH J. T. Ryan, of Pittsburgh, in the chair, 40 men on Monday afternoon were attracted to the first meeting of the new Health and Safety in Mines Committee. The speakers were well received and the discussion was good and virile. The field and scope of the new Health and Safety in Mines Committee was reviewed briefly, yet concisely, by Scott Turner. This committee is to cover the whole mining industry, in which much progress in reducing accidents has been made in recent years. Members of the A.I.M.E. can considerably assist in this important problem.

Jan 1, 1933

A new Military, Engineering School has been established at Camp A. A. Humphreys, Virginia. This camp was used throughout the summer and fall of 1918 for the Engineering Officers Training School in preparing engineer officers for the United States Army. The camp and the courses prescribed were laid out on an ambitious scheme, which since the armistice has been signed, have been directed wholly, toward the permanent establishment of an Engineering Training School for Officers of the regular Army. Those young officers who were graduated from Nest Point at the end of a two-year course, necessitated by the emergency, have been ordered to Camp Humphreys to complete their engineering education.

Jan 3, 1919

By J. H. Allen

The air lift method of pumping water is discussed. A review of several large diameter hole drilling projects that used reverse- circulation air-lift techniques is presented. Proposals are made for reverse circulation flow rates for slow rates of bit penetration (5 fph) as well as reverse-circulation flow rates for faster rates of bit penetration (10 fph). The Ingersoll-Rand air lift equations are modified for rotary drilling operations. By establishing minimum reverse circulation flow rates and utilizing the modified air lift equations, the establishment of minimum circulation equipment sizes and a more definitive requirement for improved bit body design should result.

Jan 1, 1978

By Joseph R. Stephens

Deformation substructures of' polycrystalline tungsten, W-2, 9, and 24 pct Re, and W-3 pct Ta were studied by tra?zsrnission electron microscopy. The stress-strain curve for unalloyed tungsten showed gradual yielding followed by work-hardening. Electron nzicrographs indicated a gradual increase in dislocation density with increase in strain up to 5.0 pct. Dislocations, although frequently jogged, were straight over moderate distances and were in a randorn array. Stress-strain curves for alloy specimens of W-2 and 9 pct Re and W-3 pct Ta exhibited a drop in stress at yielding followed by only slight work-hardening. Electron micrographs of these specimens after strains of 0.05, 0.1, and 0.5 pct revealed no change in dislocation substructure from the unstrained specimens. After 2.0 pct strain, the three alloys exhibited dense networks. W-3 pct Ta was characterized by straight, frequently jogged dislocations comparable with the dislocation structure in unalloyed tungsten after a similar amount of strain. In contrast, W-2 pct Re exhibited dislocations that contained widely spaced jogs, while W-9 pct Re had developed a cell structure after the relatively srnall strain of 2.0 pct. The W-24 pct Re alloy contained a few dislocations after 0.1 pct strain, while after 0.5 pct strain twins were evident. Dislocation slip bands apparently preceded the twins. The stress-strain curve for the alloy indicated that twinning commenced after approximately 0.25 pet strain. These results indicate that the primary effect of low rhenium concentrations (2 and 9 pct) in tungsten is to increase dislocation multiplication after macroyielding by reducing the Peierls-Nabarro force (lattice resistance to dislocation motion). The dislocation bands that precede twins in W-24 pct Re may be caused by localized internal stresses resulting fro a metastable structure, for example, clustering of rhenium atoms. The effect of high rhenium additions (22 a 65 pet* Rproperties of tungsten. Klopp, Witzke, and Raffo5 reported bend transition temperatures as low as -100°F (200°K) for dilute electron-beam-melted W-Re alloys tested in the worked condition. Recrystalliza-tion increased the bend transition temperature, but alloys with 2 to 4 pct Re were still markedly superior to unalloyed tungsten. Fractographic examinations of tungsten and W- 3 pct Re and W- 5 pct Re alloys by Gilbert 6 revealed that these low rhenium alloys showed a greater tendency toward cleavage failure than did tungsten. Garfinkle 7 showed that rhenium additions, up to 9 pct, to (100) oriented tungsten single crystals increased the proportional limit stress and decreased the flow stress and the rate of work-hardening. In addition, while deformation in unalloyed (100) oriented crystals apparently involved both (110)100) and (112) slip, crystals with rhenium contents of 5 andpct or more deformed primarily by (112) slip. The mechanism by which high and low rhenium additions affect the mechanical properties of tungsten is still not well-established. The present investigation was undertaken to determine by transmission electron microscopy the effects of low rhenium additions, 2 and 9 pct, and a high rhenium addition, 24 pct, on dislocation substructure in the early stages of deformation of polycrystalline electron-beam-melted tungsten. Unalloyed tungsten and a W- 3 pct Ta alloy were included for comparison. EXPERIMENTAL PROCEDURES Materials. Triple electron-beam-melted tungsten, W-2, 9, and 24 pct Re, and W- pet Ta were used for this investigation. Chemical analyses of the cast ingots are given in Table I. A description of the starting metal powders and melting and fabrication pro-cedures for unalloyed tungsten and the W-Re alloys is reported.5 The W-3 pet Ta alloy was processed in a similar manner. Compression specimens measuring 0.300 in. (7.6 mm) in length by 0.130 in. (3.3 mm) in diam were machined from swaged rods. All alloy specimens were annealed in a vacuum of 8 x 10- 6 Torr (10'2iVper sq m) for 1 hr at 3600°F (2255°K). The recrystallized grain size ranged from 0.06 to 0.08 mm diam for the alloy specimens. Unalloyed tungsten was annealed at 2400° F (1589°K) for 1 hr to produce a recrystallized grain diameter of approximately 0.12 mm. Specimens were electropolished in a 2 pet NaOH solution to a diameter of 0.125 in. (3.18 mm) to remove surface notches resulting from grinding and to improve reproducibility of t data. The ends o the compression specimens were ground flat, parallel to each other, and perpendicular to the longitudinal axes with 4/0 emery paper. Compression Tests. The compressive stress-strain apparatus used for compression tests is described in detail by Stearns and Gotsky.9 Room-temperature compression tests were conducted at a crosshead speed of 0.01 in. per min (0.25 mm per min).

Jan 1, 1969

By James C. Word, R. M. McLouski

This paper will describe the development and application of large-scale integration techniques employed in the fabrication of a germanium multielement array. The array consists of 100 by 228 PNP bipolar transistors fabricated on 5 mi1 centers. Back-biased p-n junction techniques are used for electrical isolation of the individual elements. The end use of the array is a high resolution, large area IR sensor. The monolithic array is fabricated in 1 ohm-cm p-type germanium epitaxially deposited on 6 ohm-cm n-type substrate. Epitaxy was accomplished through the hydrogen reduction of germanium te trachloride. Di-borane was used as the dopant. Base regions are achieved by the diffusion of arsenic from doped oxide or arsine sources. Oxide-masking of the arsenic im-pzlvity was achieved by the chemical deposition of a boron doped glass. The emitter is formed by an aluminum alloy diffusion technique. Vacuum deposited aluminum is used for the emitter, interconnections, and for the contact and bonding pads. ALTHOUGH a great volume of literature pertaining to the development of large scale integration techniques (LSI) has been published for silicon and in particular silicon imaging applications,' to date only a small number of similar devices have been constructed using germanium technology.' Since the physical and chemical properties of germanium are vastly different from those of silicon, the fabrication technology for integrated structures in germanium is also different from that of silicon. In particular germanium does not possess a stable oxide as can be grown on silicon by heating in an oxidizing ambient for masking of dopants and passivation. This paper describes the application of germanium LSI techniques employed in the fabrication of a multielement infrared sensor array. The array is used in a high resolution, large area infrared sensor for operation in the 0.8- to 1.5-u spectral range. Back biased p-n junction techniques are used for electrical isolation of individual elements. Discrete germanium devices have been fabricated routinely for some time. However, mainly due to the lack of a suitable mask for selective doping and the high current leakages inherent in germanium p-n isolation, few monolithic germanium structures have been constructed. THE INFRARED MOSAIC A cross-sectional view of the array is shown in Fig. 1. The monolithic structure consists of 12,800 PNP transistor elements in a 100 by 128 matrix fab- ricated on 5 mil centers. The emitters of each line of transistors are connected together using aluminum interconnects while the strip collectors are connected together in series at right angles to the emitter lines. The selection of this structure is dictated by the readout technique involved. Access to each element transistor is obtained by applying a bias voltage to a particular collector strip and separately interrogating each emitter row. A charge storage, i.e., an integration mode is used for reading out this particular array Construction techniques available for use with germanium do not include a selective p-type diffusion capability for surface concentrations greater than 10" per cu cm and junction depths greater than about 10 u. This fact limits the type of structure that may be used. Therefore, an array of PNP transistors that did not employ p-type diffusions was chosen. The structure was fabricated by growing a 1 ohm-cm p-type epitaxial layer on a carefully prepared 6 ohm-cm n-type substrate. N-type dopants were used for the isolation and base diffusions and alloyed aluminum was used to form the emitter junctions. The array was then completed by evaporation of aluminum interconnections and contact pads. SUBSTRATE AND SUBSTRATE PREPARATION Germanium substrates of (111) orientation grown by both Czochralski and zone leveling techniques were utilized for mosaic fabrication. Czochralski substrates were preferred because of the lower dislocation densities available in this type of material. Dislocation densities for the Czochralski material were typically less than 3000 per sq cm, while those for the zone leveled material were typically less than 5000 per sq cm. All substrates were uncompensated to minimize thermal conversion problems in subsequent epitaxial and diffusion processing. Both in-house and vendor polished wafers were used. The in-house polishing technique employed consisted of an initial gross chemical etch in CP4 to remove saw damage from both surfaces. This was followed by a chemical-mechanical polishing operation of one side of the wafer. The chemical-mechanical polishing solution used was Lustrox 1000 (Tizon Chemical Co.), and consists of zirconium dioxide, sodium hypochlorite, water and a surfactant. The wafer thickness before and after polishing was typically 0.020 and 0.010 in, respectively. THERMAL CONVERSION The problem of thermal conversion of both the substrate and epitaxial layer was particularly acute because of the relatively low carrier concentrations employed in both regions. This problem has been encountered by other workers in the past.3 Without special treatment before epitaxial growth substrate conversion (n-type to p-type) and changes in the re-

Jan 1, 1970