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By H. Kamiya, H. Hasegawa, M. Nojiri, S. Matsui, Y. Fukuda, M. Tsukada

"The present paper focuses on the action mechanism of anionic polymer dispersants in dense Si3N4 and SiC suspension. An atomic force microscope (AFM) was used to determine the relationship between the macroscopic suspension viscosity and the microscopic adsorbed structure of a polymer dispersant at the solid / liquid interface. The surface interactions within the suspensions were analyzed in various dispersant pH and additive conditions. The addition of an anionic polymer dispersant decreased Si3N4 and SiC suspension viscosity and increased electro-steric repulsion force on the non-oxide surface in solution at pH> 6 which was the isoelectric point of the materials. It was assumed that the increase of repulsive force was promoted by a hydrophobic adsorption of polymer dispersant on the non-oxide particles.IntroductionThe surface of silicon nitride and silicon carbide powders in a water suspension system has quite a complex molecular structure. In the case of Si3N4, hydroxyl and ammonium groups form on the surface and the pH of the suspension is increased from neutral to about 10 due to surface oxidation. The particle surface is negatively charged in alkaline solutions (pH=10), because the isoelectric point of silicon nitride exists in the pH range from 5 to 6. However, in spite of charging the negative surface charge, an anionic polymeric dispersant is generally used for the reduction in slurry viscosity.In dense SiC suspensions, an anionic polymer dispersant is generally used in order to disperse aggregates and reduce the suspension viscosity, too. Since an anionic dispersant is used in alkaline solutions higher than the isoelectric point of silicon carbide, the dispersant adsorbed on the negative charged surfaces of SiC.Few researchers have discussed and estimated the adsorption mechanism and structure of anionic polymeric dispersants on silicon nitride and silicon carbide surfaces. This is because it is difficult to observe the structure and measure the interaction at the solid/liquid interfuce directly. However, new developments in surface-force measurement technology have enabled the determination of non-DLVO type interaction for analyzing aggregation behavior2. The use of the AFM for analyzing the effects of various surfactants and co-polymers on colloidal dispersions and solid surfaces has also begun to rapidly expand to characterize the interaction between solid surfaces."

Jan 1, 2000

By Pekka Parvinen, Saija Luukkanen, Pentti Pirkonen, Väinö Hintikka, Hannu Sekki

In the study was developed a new method for the treatment soils contaminated by polychlorinated dibenzodioxin and dibenzofuran. The method is based on attrition of soil so that the contaminants absorbed on the particle surfaces are liberated with the fine fraction formed in the attrition process. Same the attrition process produces active surface which can absorb the free contaminants. Before starting the remediation process must be decided the limit value under which the residual concentration must lie. Then in the laboratory is performed an experiment in the base of which is determined the grain size level; material under which much be removed together with the contaminant. In the real sample has been found that after the attrition the limit value 0.5 ng/g (I-TEQ) is obtained when the fine under 0.1mm fraction (20% of the original soils amount) is removed together with the contaminants 96% (original level 10 ng/g; 100%).

Jan 1, 2008

By Xiao Y. Yan

A fused salt electrochemical process was investigated for the synthesis of non-oxide ceramic powders directly from metal oxides, boric oxide, and carbon powders by electro-deoxidation. Sintered pellets of the mixed powders were designed to act as a composite cathode in the electrolytic cell. Electrolysis was carried out in molten CaCl2-NaCl eutectic at 3.1 V and at 600-900 ºC under argon. The favoured cathodic reaction was the removal of the oxygen from the oxides to produce metal atoms that reacted with either the reduced boron atoms, forming a metal boride, or the carbon initially present in the sintered pellets to produce a metal carbide. The technical viability of the process was demonstrated by the electro-deoxidation of sintered pellets of TiO2/B2O3 and TiO2/C to produce TiB2 and TiC, respectively. Compared to existing carbothermic reduction process, this new electrochemical process may be less energy intensive and may lead to lower production costs. I

Jan 1, 2008

By Kazusuke Sato, Takahiro Uno, Koji Hoshino

"A novel Ni coating technique of Ni(OH)2 powders was developed to improve the positive-electrode performance· of the Ni-MH batteries. It was found out that Ni(OH)2 powder was reduced by N2H4 without any catalysts in an alkaline - solution at high temperatures. In result of observation of pH and potential changes in the solution during the reaction, it was found that the reduced species was HNio2- ion dissociated from Ni(OH)2 in the alkaline solution. The molar fraction of reduced Ni of the Ni(OH)2 was increased in proportion to the amount of added N2H4. At the small Ni fraction, a porous Ni layer was formed on the surface of Ni(OH)2 powder. Open cell tests were carried out with the paste type electrodes made of either the Ni coated Ni(OH)2 powder or non-coat powder, and cell performances were compared. In result, it was found that the Ni coating technique is effective on improvement in the utilization of Ni(OH); as a positive-electrode active material under high current densities.IntroductionNi-MH rechargeable battery is generally used for the power source of portable machines and electric vehicles because of its good performance at high energy density and. long term cyclical life as well as cleanness and good safety. Cell component materials have been improved respectively, and as concerns ·the positive-electrode reducing 'the internal resistance is a principal problem to improve the discharging performance at higher current densities.In recent years, improved Ni(OH)2 powders coated with conductive materials as NI. or CoOOH have been developed for the· positive-electrode active materials in order to· reduce the internal resistance of the electrode1)· 2) The Ni coated Ni(OH)2, however, is costly because it is fabricated by .the -non-electrode plate technique which needs a expensive precious ·metal catalyst as PdC12We found that Ni(OH)2 powder was reduced by N2H4 without any cryatalysts in an alkaline solution at high temperatures. After the treatment, Ni(OH)2 powder become gray color like Ni powder from light-green color; and. turned into a magnetic. In this study, the mechanism of the -reducing reaction was investigated to apply the reactions .to a novel Ni coating technique of Ni(OH)2 powders, · and the performance of the Ni coated Ni(OH)2 powder obtained by the reducing process was evaluated as an -positive-electrode active material of Ni-MH batteries."

Jan 1, 2000

By Jewel Gomes

Green rust is an important intermediate in oxidative transformation of Fe(II) phase. This unstable compound contains a mixture of ferrous and ferric hydroxides that belong to a family of minerals known as layered double hydroxides (LDH). Its general formula is [FeII(6-x) FeIIIx (OH)12]x+[Ax/n-*yH2O] x-, where A is an n-valent anion mainly Cl-, CO3-2 and SO4-2, and in which either the bivalent or the trivalent iron can be replaced for other trivalent or bivalent metal ions. It was first identified as corrosion product, later in soils as a product of interactions between microbes and metals in soils. Due to its high reactivity, it is used in the reduction of organic and inorganic compounds, As removal, and the treatment of acid mine drainage. In this paper, we described the method of electrochemical generation of green rust, its characterization by XRD, SEM and FT-IR, and its implications to electrocoagulation.

Jan 1, 2009

By J. P. Ibáñez

The uptake of copper from extremely dilute aqueous solutions by alginate in the form of protonated dry alginate beads was investigated. Barium was used to cross link the alginate forming the beads. The effect of various experimental parameters such as pH and metal ions concentration on the uptake of copper were studied. The uptake was strongly dependent on the Cu-bearing solution pH up to a value of 4.5. A removal of 100% o was achieved when the initial concentration of copper was as low as 8.0 mg/L. The maximum uptake, i, e., the loading capacity, was found to be 167 mg of copper per g of beads. The mechanism governing the removal of copper was found to be ion exchange between protons of the alginate beads and cupric ions of the solution. For this ion exchange process a molar ratio, d[H+]/d[Cu2+], of 2.0 was determined. EPMA-EDX analysis of the Cu-loaded beads showed a uniform distribution of the ions throughout the structure of the alginate, regardless the solution pH. This may suggest that this sorbent material is a porous ion exchanger having high permeability and capacity. The uptake of copper and of the heavy metals cadmium and zinc by this sorbent is compared.

Jan 1, 1999

By L. Katgerman, E. N. Straatsma, Suyitno

"Single-roll strip casting process is studied using computational fluid dynamics which takes into account fluid flow, heat transfer and solidification. The computational model is based on the conservation Jaws of momentum, energy and continuity. Correlation of strip thickness, solidification zone length, and puddle shape on single-roll strip casting of Al-1 %Mn is explored. Feeding pressure and roll speed are investigated. The results show that the··strip thickness slightly increases with pressure, similarly the length of solidification zone. The variations of strip thickness and solidification zone length with roll speed show a sharp decline for strip thickness and slight decline for the length of solidification zone with increasing roll speed. The constraint and free-jet flow have different feature in term of flow field. Severe turbulence is observed on the free-jet flow.IntroductionThe near-net shape casting of strip metals is a demand nowadays. The demand is particularly stimulated by the challenge to become more competitive through enhanced performance. The improvement in the existing processes and new innovative technologies are introduced by the metal industry to gain better product quality, more efficiency in energy consumption, low throughput, yield and operating costs [1-3].There are many advantages that can be obtained by the direct casting of strip. The most prominence is the elimination of hot rolling. Beside that the high rate of heat extraction associated with strip casting offers the possibility of a finer, Jess segregated cast structure. The microstructure will result in the improvement of mechanical properties compared to conventional material, or alternatively the opportunity of using grades of metal outside the normal range for continuous casting.The concept of single-roll strip casting has been difficult to commercialize, because of the complex interactions between fluid flow, solidification, shrinkage, and stress, which lead to serious quality problems. Besides that, the quality and the thickness of the strip are affected by the thermal properties of the strip, roll cooling conditions, roll geometry, and other process parameters. To understand how these parameters affect the strip formation, some researchers have modeled the process [4]."

Jan 1, 2004

By Kerri-Ann Hue, Kerry Hasapidis, Ken Babcock, Patrick O'Hagan

"Metallic nanoparticles exhibit properties that are significantly different from individual atoms or bulk materials. Their applications are diverse and have varying uses in areas such as cancer treatment, biochemical sensors, nanoelectronics, and drug delivery. For each application extensive characterization must be performed in order to probe the unique properties of these nanoparticles. In this study, ultra-high resolution mass sensors consisting of MEMs-fabricated, suspended microchannel resonators (SMRs) were used to determine the size and concentration of metallic nanoparticles. With femtogram (10- 15 g) mass resolution, ultra-high resolution mass sensors can weigh individual particles suspended in fluid, and so measure their mass, density, and size. Particle size analysis with these sensors provides excellent accuracy and resolution compared to mature technologies such as light scattering. This technique also provides quantitative information via the ability count particles.IntroductionThe unique electronic, chemical, and optical properties associated with nanoparticles vary with their size, shape, and composition[ 1-4]. These properties are attributed to increased surface area and nanosized mean free path of electrons to the particle surface. Nanoparticle colloidal solutions have been prepared and are commercially available. In recent years, noble metals such as gold, copper, and silver have been extensively researched[5-7]. In order to tailor the optical, electronic, and electrical properties of nanoparticles, size and shape must be controlled. For many applications a monodisperse colloidal solution is ideal. Methods of size characterization include Transmission Electron Microscopy (TEM), Dynamic Light Scattering (DLS), and Electrophoretic Mobility Measurements to name a few[6, 8]. Although TEM can provide shape and size distributions, sample preparation requires that samples be dried on a metal grid and cannot be analyzed in solution. DLS uses curve fitting algorithms that while useful for determining mean particle diameters are not ideal for polydisperse colloidal solutions. New technologies are therefore needed to accurately determine the particle size distributions of metallic nanoparticles."

Jan 1, 2011

By F. L. Marley

Small and medium-sized flotation plants with no assaying instrumentation still depend much upon the art of the operator to produce acceptable and consistent results. Improved performance can be accomplished by the use of the simple microscope set up as a control device. The visual recognition of products in the circuit does much to eliminate uncertain shift operating decisions and is an easy technique to acquire. Mineral staining methods further assist in the determination of components within the mill products. Simple mounting upon scotch tape and other adhesives is rapid and convenient. The microscope also has a practical role for the plant metallurgist or laboratory technician when evaluating middling products, and their routing within the circuit. Examples are reviewed where the microscope has been used for operational control in both sulfide and nonmetallic mineral flotation plants.

Jan 1, 1981

By Ruixiang Wang, Jinhui Li, Youjun Xiao, Daoling Xiong, Hao Chen

"Leaching solution prepared from spent battery materials contains large quantities of valuable metals, such as Cu, Ni, Co, Mn and Fe. Therefore, recovery of valuable metals from acidic polymetallic aqueous solutions is of great importance for every plant. In this work, a method is introduced of recovery of Ni, Co and Mn from polymetallic solution prepared by leaching spent battery material. The basic concept includes copper was removed through replacement by iron powder followed by iron precipitation in goethite method. The experimental results show that Cu can be removed 99% at least through replacement by Fe powder, and the removal of Fe can achieve 99% by goethite method. At the same time, the loss of Ni, Co and Mn are about 2%, 3 % and 2%, respectively. The process of differential removal of metals can be selected as the treatment alternative that combines simplicity, efficiency and reliability with low capital and maintenance costs. The purified solution which only contains Ni, Co and Mn can be used to prepare NixCoyMnz ternary system precursor.1 IntroductionNickel and Cobalt are very important metals which are applied in many fields, such as energy material and support material for some new material field. The world demands for such metals is progressively increasing, while raw resources are being depleted and with the constraints raised by the Law and related legislation assigned to protect the environment from hazardous wastes in the world. Nowadays study on reutilization of waste materials has great significance for achieving secondary resources recycling and preventing environmental pollution. There are many hydrometallurgy methods applied for dealing with these wastes, while they usually contain large quantities of valuable metals, such as Cu, Co, Mn and Ni, as well as impurities, such as Fe, Zn, and etc. Therefore, proper treatment of these leaching solutions prior to their discharge is of great importance, so that the contained valuable metals can be recovered.Separation and extraction of metals from leaching solution can use some methods through solvent extraction[l,2], ion exchange[3,4], precipitation with sulfide[ 5] or alkali[ 6] and electrolytic recovery[?]. Among the appropriate treatment alternatives, replacement and differential precipitation is the most attractive treatment that combines simplicity, efficiency and reliability with low capital and maintenance costs."

Jan 1, 2011

By T. Watanabe, T. Fujiwara, S-Wan Song, Y. Nakagawa, R. Teranishi, M. Yoshimura

"We have tried a new method to fabricate cobalt oxide films onto porous films directly by an electrodeposition method at low temperature. The porous substrate films (membrane-filters and paper) were placed between a LiOH solution and a CoSO4 solution and treated under electricalcurrents of ~1 mA/cm2 using carbon cathode and anode. Effects of temperatures, flow rates and electrical currents have been investigated. As a result, we found that the LiCoO2 films and Co3O4 films were successfully fabricated on paper and/or porous PTFE filters at 120 °C, while CoOOH films were deposited at 80 °C. Furthermore, LiCoO2 films did not cover whole the substrates, but was fabricated just over the anode. The chemical reactions of electrodeposition were also considered from these results.IntroductionRecent agreements on global environment require rapid progress of low energy and low waste processings for the fabrication of thin films that succeed to the mass production with the high consumption of the fossil fuels (such as physical vapor deposition°, chemical vapor deposition2), dip coating with firing3) etc.). The total energy consumption in aqueous systems should be the lowest among all these processing routes, because a much lager excess of energy is necessary to create melts, vapor, gas, or plasma than to form an aqueous solution at the same temperature4)The ""Soft Solution-Process"" (SSP) was one of the best concepts to realize the low energy and low waste fabrication of inorganic materials. 5) Generally speaking, SSP gives similar results to any other processing using fluids (such as vapor, gas plasma) and/or beam/vacuum processing. However, the total energy consumption of all these possessing routes should be the lowest in aqueous systems, because a much larger excess of energy is necessary to create melts, vapor, gas or plasma than to form an aqueous solution at the same temperature (Fig. 1). This idea can be easily demonstrated, using the simple example of BaTiO3. The energy diagram for the formation of BaTiO3 from various precursors is shown in reference 4. The driving forces (AG) for representative synthesis reaction of (1), (2), (3), (4) and(5) are 38, 727, 3685, 17 and —14kcal/mol, respectively at room temperature. 6' 7"

Jan 1, 2000

By Wenliang Cao, Jidong Li, Mingjie Zhang, Yiyong Wang

In CaC12-CaF 2 System, we studied the electrode process and discharge mechanism of preparation of Al-Ca alloys by fused salt electrolysis with CaO as raw material. The change of back electromotive force after adding CaO was measured by continuous pulse oscillograph method and the discharge process mechanism was also investigated by cyclic voltammetry. The finial results indicate that back electromotive force decreases by 0.6V after CaO of 1 % is added and there was a peak of oxidation current ahead of the potential at which the negative chlorine ions precipitated. According to thermodynamic calculation, it was determined that current peak was caused by the CO2 produced by 0 2 - ionic discharge due to CaO addition.

Jan 1, 2014

By Philip Nash, Jie Zhou, Joshua Blackketter

"Large ingots tend to have internal defects such as shrinkage cavities and porosities, which have to be closed during the cogging stage to ensure sound internal quality of forged parts. In this work, finite element methods were used to simulate open die forging passes, with varying parameters that affect the void closure behavior profoundly. Numerical models ware constructed in ABAQUS, DEFORM and FORGE using data taken from footage of the forging process and material mechanical data obtained from the Gleeble compression tests. Forging variables such as pass rotation, reduction per pass, and feed ratio were studied with intense attention paid on the special properties of H13 steel, so that this study can be applied to solve real world problem.IntroductionCenterline defect closure is a frequently studied but still challenging topic in open die forging industry. In practice, open die forging is employed as an effective hot forming process to make desired shape of metal products as well as to ensure center consolidation of internal defects which result from the casting process. Nowadays, remarkable large forgings have been more and more required to meet industries demand. However, the increase in ingot size has tended to result in considerable macrosegregations and shrinkage cavities or voids, which need to be worked thoroughly during the forging process; but the size of the products and limitations of manufacturing capacity, such as the press load, make it difficult to achieve adequate local deformation to close those defects. Therefore, choosing optimal forging parameters under given work condition to ensure good internal quality of forged products is critically important."

Jan 1, 2012

By Robert E. Brown

Magnesium recycling has been used to recover both new scrap and old scrap. It was used extensively in Germany during WWII to expand the magnesium supply. There were a large number of magnesium recyclers in the US who got their start smelting old scrap, old airplanes and old waste dumps from the WWII build up. As the world magnesium industry dwindled, only a few companies were left that did magnesium recycling as a primary business. The sand foundries tended to recycle of their production scrap in their melting furnaces. Even the original die casters tended to put scrap directly back into melting furnaces at the die casting machines. As high purity alloys were developed and the use of die castings in automotive work increased, the tendency was to let the magnesium recyclers convert the scrap back to high quality ingot. Automotive use has grown because of the low density of magnesium. This property is the one of the biggest problems to overcome in shipping scrap. Gates and runners from die casting are very irregular shapes and it is very hard to load a truck with enough material to get a low shipping cost per pound. Recent new equipment companies have developed magnesium equipment that is specifically designed to recycle, refine and cast secondary magnesium metal. These melt cells are supplied as integrated units to magnesium casting sites. The cost and effectiveness of this approach will be discussed.

Jan 1, 2000

By T. T. Natarajan, Nagy EI-Kaddah

"Numerical simulation of electromagnetic confinement systems generally requires large CPU time due to the strong coupling between the electromagnetic and the free boundary problems. The present paper examines the accuracy and the computational efficiency of the most common numerical schemes used in modeling such systems. Levitation melting was taken as a test case. In this study, a comparison was made between the finite element and surface integral methods for electromagnetic field calculations. The computational efficiency of Lagrange and the modified Hestenes methods for solving the free boundary problem were investigated. The convergence of the Lagrange method was found to be much faster than the modified Hestenes method. It was also found that finite element method not only gives accurate solutions, but faster convergence to the final equilibrium shape than the surface integral method. The applications and the limitations of these techniques in modeling electromagnetic confinement systems will be discussed.IntroductionIn recent years there has been a growing interest in the use of electromagnetic forces for confinement of molten metals as a means to eliminate molten metal contamination during melting and to improve surface quality of cast products. Continuous casting of metal without contact of a mold is now a reality, and is being commercially applied for casting of aluminum slabs /1/, and copper rods /2/. New applications of electromagnetic confinement in melting and casting include containerless melting (Magnetic Suspension Melting) /3/, edge containment in twin roll casting, and meniscus shape control in continuous casting of steel /4/.Modeling of confinement systems involves the determination of the electromagnetic field and the equilibrium shape. These two problems are strongly coupled due to the dependence of the field on the shape of the melt. While significant advances have been made in computational electromagnetics /5/, the application of developed computational techniques to electromagnetic confinement problems is not a simple task. The principal difficulty in using these methods is that the solution domain is not known a priori. due to coupling between the electromagnetic field and the free boundary problems. These two problems have to be solved simultaneously, leading to an iterative solution procedure. As a result, numerical simulation of electromagnetic confinement systems are computationally intensive with computational time at least an order of magnitude larger than the fixed domain problems."

Jan 1, 1994

By Michael Heximer, Dominic Verfielst, Timothy Moore

"Teck's Trail Operations recently installed new pressure filters in the cold stage purification step in the zinc leaching plant. Alloy 2205 duplex stainless steel was chosen as the material of construction as it was in use in the hot stage purification operation. Within a year of commissioning, an unacceptably high rate (greater than 1 mm/y) of corrosion was observed on the weld heat affected zone (HAZ). Laboratory and field tests were conducted to establish the conditions under which the corrosion was occurring. The tests isolated the aggressive conditions to a unique combination of materials present during the filter regeneration stage. Furthermore, the change of the duplex grain structure of the alloy during welding resulted in the HAZ being more susceptible to the corrosive environment. A new material of construction was recommended as a result of the investigation.IntroductionThe sulphide leaching plant uses four horizontal tank pressure leaf filters to remove solids precipitated in the cold stage electrolyte purification process. The current filters were installed in 2007, and replaced a bank of filter presses. The material of construction for the filters - alloy 2205 duplex stainless steel - was selected based on its successful use in similar service areas of the leaching plant. However, within the first year, unexpected and rapid corrosion of the filter tank material was observed. Although moderate general corrosion was noted throughout the filters, the attack was particularly aggressive in the areas where intense heat was applied during fabrication, observed at the HAZs caused by welding, and on the exposed edge grain of the duplex plates. On the inaugural annual inspection of the filters in the first year of operation, a corrosion penetration rate of 1.0 to 1.5 mm/y was observed at the HAZs. The parent plate of the pressure tank was a minimum of 6 mm, with a minimum allowable thickness of 3 mm under the ASME pressure tank design rules. Therefore, the projected useful life of the filters could then be roughly calculated to be two to three years. Urgent action was required to understand and correct this problem."

Jan 1, 2012

By Julie M. Melluish

The metallurgical response of the Point Leamington deposit has been studied. Two series of bench tests were conducted and various ore samples and flotation products were examined using image analysis techniques. The majority of sphalerite and chalcopyrite grains in this texturally complex ore were found to be smaller than 10 micrometres. Copper recoveries were low with losses mainly as fine inclusions in pyrite. Sphalerite recoveries were somewhat better due to a generally coarser habit. Gold and silver recoveries were also low and only solid solution silver was identified in the ore. The deposit shows poor economic prospects unless additional tonnage of high grade zinc ore can be delineated.

Jan 1, 1989

By Joseph C. Milbourne

The selection of a suitable nitrate removal process depends on a variety of site-specific chemical and environmental issues. The dominant technologies for nitrate removal include biological denitrification and continuous countercurrent ion exchange. The decision to apply either of these technologies, or both together, depends on the nature of the waste water to be treated. Factors that affect the selection of the biological system include the feed composition and feed temperature. Ion exchange nitrate removal systems are less sensitive to the feed composition but require disposal or destruction of the concentrated pregnant eluate. The paper discusses Tetra's continuous countercurrent ion exchange technology (CCIXTM) and fixed film biological reactor, Denite°. The treatment of the ion exchange pregnant eluant is also discussed.

Jan 1, 1994

By Huaming Yang

Infrared materials are a special kind of material widely used in military, biological engineering and chemical industry. However, the problems associated with them such as unstable properties, high cost and a high thermal expansion coefficient seriously restrict the development and the wide application of the traditional infrared materials with the SiC or ZrSiO4 matrix. The ultrafine quartz powder is normally used to prepare the infrared materials by hot-pressing technology. The aim of the paper is to investigate the thermal expansivity, the effect of the SiO2 size and the addition of Al2O3 or Fe2O3 on the infrared emissivity of the quartz matrix of the infrared material (QMIM) in a 8-25um wavelength range. The results indicate that 89% of infrared emissivity and 0.4x 10-5/°C of thermal expansion coefficient of QMIM can be obtained. The affecting mechanism of A1203 and Fe2O3 on the infrared emissivity of QMIM were also discussed.

Jan 1, 2003

By Serdar Aksu, Fiona M. Doyle

"CMP will be an essential process in the production of integrated circuits containing copper interconnects. This study aims to improve our mechanistic understanding of the role that organic chelating agents might play in the reactive slurries used in copper CMP. Copper dissolution behavior in EDTA arid glycine was first examined by producing potential-pH diagrams for the copper-water-EDTA and copper-water-glycine 'systems. The results of potentiodynamic polarization experiments were then considered in light of these diagrams. . In-situ polarization experiments were conducted to gain insight into the electrochemistry of copper during dynamic polishing in slurries prepared from EDT A and glycine.IntroductionCopper has recently started to replace aluminum as the interconnect metal in integrated circuits. Copper interconnection offers faster and more reliable integrated circuits due to its higher electrical conductivity and superior electromigration resistance (1). The damascene method is used to form multilevel interconnects in the manufacture of integrated circuit devices with copper metallization (2, 3). Copper is deposited by CVD or electroplating into vias and trenches etched in the interlayer dielectric (IDL), over a diffusion barrier usually made from titanium, tantalum or their nitrides. Chemical mechanical planarization (CMP) then prepares the wafer for the next deposition step, by removing excess copper and planarizing the surface. During CMP, the wafer is rotated and pressed against a rotating platen covered with a polishing pad. Chemically active slurries containing submicron size abrasive particles (Si02, Al20 3, ceria, diamond, etc.) are applied. Both the mechanical action of the abrasive particles and the chemical action of slurry constituents remove material from the wafer surface. Planarization results because material is removed faster from protruding regions on the surface than from recessed regions. Since CMP can globally planarize .the entire wafer, it has become one of the key technologies for producing integrated circuits with copper metallization."

Jan 1, 2000