Synthesis of Highly Oriented Zr(Y)O2 Film by Sol-Gel Method

"ZrO2 and Y2O 3-doped ZrO2 gel film were obtained by spin coating of sol from Zr-n-propoxide, n-propanol, acetylacetone, nitric acid, and water on a silica glass as a substrate. ·Dried gel films crystallized to monoclinic, tetragonal, cubic and their mixed phases, depending on the chemical composition of sol, .firing temperature, and coating cycles. ZrO2 films with highly preferential orientation were successfully obtained from a solution containing a large amount of n-propanol. The highly oriented ZrO2 film was found to have high transparency compared with non-oriented 'films. Electrical conductivity of 8 mol% Y2O 3 doped ZrO2 film was also measured.Introduction3 mol% Y2O 3 doped ZrO2, which has a tetragonal symmetry is ·well known to have a strong mechanical property and a high toughness. (1) On the other hand, 8 mol % Y 2O 3-doped ZrO2 is high oxide-ion conducting material and is applied to oxygen sensor, oxygen pump, and solid oxide fuel cell (SOFC). (2) Sol-gel methods using metallic alkoxide are widely applied for synthesizing ceramics such as high-purity fine particles, thin film, and fiber. (3) For ceramics films, many reports have been made on SiO2, (4) TiO2, (5) and PZT. (6) Several case studies have been done on zirconia film based on the sol-gel method, (7) - (11) but very few on preferentially oriented film and on systematic Y zO3 doping. Almost zirconia ceramic· films reported were prepared by means of dip-coating. Kamiya et al. (12) and Ganguli et al (13) converted zirconia into fiber. Sol from Zr alkoxide is usually very unstable, and a stabilizing agent such as glycol or ß-keton is used beforehand (7) (14)."