Role Of Rare Earth Compounds For High Thermal Conductive Aluminum Nitride

Aluminum nitride(A1N) is a theoretically high thermal conductive ceramic, but is a poor sinterable one because of its covalent bond structure. The densification of A1N had to be done first. It was found in 1968 that rare earth compounds as yttria were an excellent sintering aids. Recently more improvement of conductivity was attained by following effects of yttria: (1) trapping of oxygen in A1N sources to form yttrium aluminates, (2)elimination of the aluminates by heating in carbo-reductive atmosphere. Consequently very high thermal conductivity of up to 270W/mK has been developed. Thus A1N applications for substrates and packages have been opened.