RI 6681 Measurement Of Backscattered Electrons In An Electron Probe Microanalyzer

Total yield and backscattered electron coefficients were measured in this Bureau of Mines study in an microanalyzer as a function of atomic number and of primary crier: ;y in the 15- to 35-kilovolt range. The electron coefficients were obtained indirectly from measurements of the specimen electron current and the primary beam current collected in a Faraday cage and were measured with a precision better than 0.5 percent. Secondary electron emission was suppressed with opposing potential applied to a screen grid surrounding the specimen. The values of the backscattered electron coefficients agreed with published values within 5 percent.