Phase Distributions on Titanium Oxide Rough Thin Films Obtained by Anodization Process

"Titanium oxide films were fabricated on commercially pure titanium surfaces via anodization procedure. Anodization parameters, anodization time and voltage were altered, whereas temperature and chemical composition of anodization bath were kept constant. The main idea in this study is to obtain rough titanium-oxide surfaces. The type and feature of titanium oxide formed were observed via SEM and EDX analyses. What was revealed from SEM and EDX analyses were combined with Ti-O phase diagram in order to make judgment on the type of phases obtained, e.g. solid solution and/or compounds. Studies on the different regions of each sample showed that surfaces consist of different titanium oxide compounds with various O/Ti ratios in nano level and solid solutions varying in terms of chemistry on the same sample. Thus together rough surfaces and inhomogeneous distribution of "titanium oxides" were obtained. It was also found that when anodization time and voltage were increased, more granular surface with higher O/Ti atomic ratio was obtained."