PART II - Communications - Determination of Quantitative Pole Figures for Flat Thin Films on a Substrate

ESTABLISHED methods for obtaining quantitative pole figures for flat sheets1"5 can be extended to apply to thin films on a substrate. The mode of scanning the sample is exactly the same as described in the references? but consideration is given to the fact that the scattered X-ray intensities are due to both the thin film and its substrate with appropriate attenuation factors. The purpose of this paper is to describe a method to obtain the scattered intensities from the film alone for subsequent pole-figure determinations. Fig. 1 shows the four possible general positions of the film (f) and its substrate (s) with respect to the incident X-ray beam (I,). In this paper it will be assumed that the plane of the sample is normal to the plane of the diffractometer. In the diagrams the line jV is the normal to the flat sample and the line P is the trace of the diffracting crystallographic planes in the plane of the diffractometer. The angle of tilt, a, is the positive acute angle measured from the line N to the line P; if this angle is measured clockwise then a is said to be in the positive a region; if this angle is measured counterclockwise then a is said to be in the negative a region. For the reflection cases, the total scattered intensity, at the proper Bragg angle for a particular set of planes, is due to that scattered by the film Vf) and that scattered by the substrate. The beam incident on