MOCVD of Gallium and Calcium Sulfides for Improved Phosphor Processing

"Recently, doped calcium thiogallate (CaGa2S4) phosphors have been investigated for use in electroluminescent flat panel displays. The current technique used for the deposition of thin film calcium thiogallate is sputtering. Unfortunately, this requires a high temperature annealing process to provide the desired crystallinity of the phosphor. Recent efforts have focused on the possible use of metal-organic chemical vapor deposition (MOCVD) to produce the CaGa2S4 layer. The use of MOCVD provides an attractive alternative to sputtering since it does not require heating above the strain point temperatures of the glass substrates used for the display panels. To accomplish this, the deposition of both Ga2S3 and CaS is investigated as these compounds are intermediate steps in the development of the phosphor deposition. Uniform, crystalline films of both Ga2S3 and CaS were deposited and the process shows promise for successful deposition of the CaGa2S4 phosphor.IntroductionThe lack of a satisfactory blue phosphor having sufficiently high luminances at low power has hampered the development of high resolution flat panel displays. Recently, a new series of blue emitting materials have been investigated for use in thin film electroluminescent (TFEL) devices. l ,2,3 These phosphors are based on a series of alkaline earth thiogallate host materials of the form MGa2S4:RE where M can be either calcium, strontium, zinc, or barium and RE is a rare earth ion. A full-color VGA TFEL panel using CaGa2S4:Ce as the blue phosphor has recently been fabricated and tested. l This FPD provided a luminance of 10 cdlm2 at 60 Hz. The enhanced blue in this display allowed its color capabilities to approach those of the conventional CRT.The method of depositing the phosphor onto the display panels in these test devices has been sputtering. Unfortunately the phosphor as deposited does not possess the crystalline properties required for optimum luminance. The crystalline structure is achieved by subsequent annealing of the deposited material. Although this post deposition anneal provides the desired crystal structure, it occurs above the strain point temperature of ordinary glass. Consequently, the implementation of these phosphors requires the use of glasses capable of withstanding high temperatures, adding to the cost of the final display unit."