Electron-Beam Physical Vapor Deposition of Microlaminate Composites

Microlaminate composites were fabricated by electron-beam physical vapor deposition. The microlaminates consisted of five layers, each 2 to 4 pm thick, and were composed of either pure metal layers (Cu-Ag), or alternated between metal and intermetallic layers (Nb(Al)- Nb3Al). The microlaminates were heat treated in an Ar atmosphere for 2 to 12 hours, at temperatures of 600°C for the Cu-Ag and 1000°C to 1200°C for the Nb(Al)-NbsAl. Microlaminates were examined after deposition and after heat treatment by scanning electron microscopy and energy dispersive x-ray spectrometry. The effects of heat treatment on the morphological stability of these composites will be described.