Computer Aided Design of Hybrid Plasma Reactors for Use in Materials Synthesis

"A mathematical model for the analysis and design of hybrid plasma reactors for advanced materials synthesis is presented. The model is based upon a solution of the electromagnetic vector potential equation and is capable of predicting the two-dimensional velocity, temperature, and electromagnetic fields as well as the reaction kinetics inside the reactor for any axi-symmetric coil configuration. The model is used as a computer aided design tool for the design of hybrid plasma reactors consisting of a conventional DC torch augmented by an RF induction coil and it is demonstrated that the hybrid system possesses superior characteristics for materials synthesis over conventional DC or RF systems. The coupling between the RF and DC components is found to affect both the temperature field and the flow field and to have a significant effect on the reaction kinetics and on materials recovery. The model is used to study the thermal decomposition of silicon tetrachloride as a function of reactor design and operating parameters and it is demonstrated that through a CAD approach it is possible to significantly improve the operation of materials synthesis systems.IntroductionIn recent years there has been growing interest in the use of the inductively coupled plasma for chemical synthesis as a way of meeting the increasing demand for high quality, high performance materials for use in critical applications/l/. Although the basic feasibility of this approach has been demonstrated in the laboratory/2,3/ there still exists a number of operational problems that adversely affect system performance for some applications. In particular, the recirculation and back flow effects that arise from the electromagnetic forces in the plasma can result in the repulsion of the reactants from the hot plasma core and their subsequent deposition on the walls of the reactor. Another operational problem arises from the fact that the energy dissipated in the plasma has to compensate for the heat losses to the environment by conduction, convection, and radiation in order to maintain the ionization of the plasma and, hence, the stability of the plasma may be affected by the presence of the reactants and their products."