Coating Copper Nanofilm on the Microscale Cenospheres Using Magnetron Sputtering Method

Cenospheres is a sandlike hollow sphere component of the fly ash that is collected in coal-burning electric power generating plants. Metal coated particles have been widely used in industries. Magnetron sputtering method which was used to coat copper film on the surface of the cenospheres is a widely used coating technique in large surface metal coating. A newly designed equipment is used to make the fine particle coating can be carried out because the fine particle is hard to disperse and it must make the particle keep moving to let every direction of the particle be coated. The copper film coated is compact, smooth, even and without uncoated spots under the optical microscopy and SEM. The film has good affinity to the cenosphere surface. The film does not separate with cenoshpere surface even when the cenosphere is crushed. The XRD, SEM, XPS, SPM was used to study the copper film characteristic. It is shown that using this newly designed magnetic sputtering equipment can coat high quality copper nanofilm on the cenoshpere surface.